The physics of micro, nano fabrication:
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
New York u.a.
Plenum Press
1992
|
| Schriftenreihe: | Microdevices
|
| Schlagworte: | |
| Beschreibung: | XIX, 650 S. Ill., graph. Darst. |
| ISBN: | 0306441462 |
Internformat
MARC
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| 008 | 931028s1992 ad|| |||| 00||| eng d | ||
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| 041 | 0 | |a eng | |
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| 084 | |a ELT 270f |2 stub | ||
| 100 | 1 | |a Brodie, Ivor |e Verfasser |0 (DE-588)141138750 |4 aut | |
| 245 | 1 | 0 | |a The physics of micro, nano fabrication |c Ivor Brodie and Julius J. Muray |
| 246 | 1 | 3 | |a The physics of micro-, nano-fabrication |
| 264 | 1 | |a New York u.a. |b Plenum Press |c 1992 | |
| 300 | |a XIX, 650 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Microdevices | |
| 650 | 7 | |a Dunne films |2 gtt | |
| 650 | 7 | |a Micro-elektronica |2 gtt | |
| 650 | 7 | |a Microélectronique |2 ram | |
| 650 | 4 | |a Microelectronics | |
| 650 | 4 | |a Thin-film circuits | |
| 650 | 0 | 7 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Nanotechnologie |0 (DE-588)4327470-5 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Nanotechnologie |0 (DE-588)4327470-5 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |D s |
| 689 | 1 | 1 | |a Nanotechnologie |0 (DE-588)4327470-5 |D s |
| 689 | 1 | |5 DE-604 | |
| 700 | 1 | |a Muray, Julius J. |e Verfasser |4 aut | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-005490753 | ||
Datensatz im Suchindex
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| any_adam_object | |
| author | Brodie, Ivor Muray, Julius J. |
| author_GND | (DE-588)141138750 |
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| author_role | aut aut |
| author_sort | Brodie, Ivor |
| author_variant | i b ib j j m jj jjm |
| building | Verbundindex |
| bvnumber | BV008311489 |
| callnumber-first | T - Technology |
| callnumber-label | TK7874 |
| callnumber-raw | TK7874 |
| callnumber-search | TK7874 |
| callnumber-sort | TK 47874 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | UX 2350 ZN 4100 |
| classification_tum | ELT 270f |
| ctrlnum | (OCoLC)26398446 (DE-599)BVBBV008311489 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV008311489 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:18:06Z |
| institution | BVB |
| isbn | 0306441462 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-005490753 |
| oclc_num | 26398446 |
| open_access_boolean | |
| owner | DE-384 DE-91 DE-BY-TUM |
| owner_facet | DE-384 DE-91 DE-BY-TUM |
| physical | XIX, 650 S. Ill., graph. Darst. |
| publishDate | 1992 |
| publishDateSearch | 1992 |
| publishDateSort | 1992 |
| publisher | Plenum Press |
| record_format | marc |
| series2 | Microdevices |
| spelling | Brodie, Ivor Verfasser (DE-588)141138750 aut The physics of micro, nano fabrication Ivor Brodie and Julius J. Muray The physics of micro-, nano-fabrication New York u.a. Plenum Press 1992 XIX, 650 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Microdevices Dunne films gtt Micro-elektronica gtt Microélectronique ram Microelectronics Thin-film circuits Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 s DE-604 Halbleitertechnologie (DE-588)4158814-9 s Muray, Julius J. Verfasser aut |
| spellingShingle | Brodie, Ivor Muray, Julius J. The physics of micro, nano fabrication Dunne films gtt Micro-elektronica gtt Microélectronique ram Microelectronics Thin-film circuits Halbleitertechnologie (DE-588)4158814-9 gnd Nanotechnologie (DE-588)4327470-5 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)4327470-5 |
| title | The physics of micro, nano fabrication |
| title_alt | The physics of micro-, nano-fabrication |
| title_auth | The physics of micro, nano fabrication |
| title_exact_search | The physics of micro, nano fabrication |
| title_full | The physics of micro, nano fabrication Ivor Brodie and Julius J. Muray |
| title_fullStr | The physics of micro, nano fabrication Ivor Brodie and Julius J. Muray |
| title_full_unstemmed | The physics of micro, nano fabrication Ivor Brodie and Julius J. Muray |
| title_short | The physics of micro, nano fabrication |
| title_sort | the physics of micro nano fabrication |
| topic | Dunne films gtt Micro-elektronica gtt Microélectronique ram Microelectronics Thin-film circuits Halbleitertechnologie (DE-588)4158814-9 gnd Nanotechnologie (DE-588)4327470-5 gnd |
| topic_facet | Dunne films Micro-elektronica Microélectronique Microelectronics Thin-film circuits Halbleitertechnologie Nanotechnologie |
| work_keys_str_mv | AT brodieivor thephysicsofmicronanofabrication AT murayjuliusj thephysicsofmicronanofabrication |