Scanning force microscopy using optical interferometry:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
1991
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| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Enschede, Univ., Diss. |
| Beschreibung: | VII, 273 S. Ill., graph. Darst. |
Internformat
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| 245 | 1 | 0 | |a Scanning force microscopy using optical interferometry |c door Arie Jeffrey den Boef |
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Datensatz im Suchindex
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| adam_text | IMAGE 1
S C A N N I NG F O R CE M I C R O S C O PY
USING
O P T I C AL I N T E R F E R O M E T RY
P R O E F S C H R I FT
TER VERKRIJGING VAN
DE GRAAD VAN DOCTOR AAN DE UNIVERSITEIT TWENTE, OP GEZAG VAN DE RECTOR
MAGNIFICUS, PROF. DR. IR. J.H.A. DE SMIT, VOLGENS BESLUIT VAN HET
COLLEGE VAN DEKANEN
IN HET OPENBAAR TE VERDEDIGEN OP DONDERDAG 21 FEBRUARI 1991 TE 16.00 UUR
DOOR
ARIE JEFFREY DEN B O EF
GEBOREN OP 6 SEPTEMBER 1960 TE OSHAWA (CANADA)
*
IMAGE 2
V
1
CONTENTS
LIST OF P R I N C I P AL S Y M B O LS VIII
1 I N T R O D U C T I ON 1
1.1 HISTORICAL BACKGROUND 1
1.2 CONCEPTS OF FORCE MICROSCOPY 4
1.3 APPLICATIONS OF FORCE MICROSCOPY 10
1.4 SURVEY OF THE THESIS 13
2 T H E O RY 15
2.1 TYPES OF FORCES 15
2.1.1 REPULSIVE ATOMIC FORCES 16
2.1.2 VAN DER WAALS FORCES 17
2.1.3 ELECTROSTATIC FORCES 21
2.1.4 MAGNETIC FORCES 25
2.1.5 CALCULATIONS OF MAGNETIC FORCES 29
2.2 THE CANTILEVER 35
2.2.1 CANTILEVER STATICS 36
2.2.2 CANTILEVER DYNAMICS 39
2.2.3 VIBRATIONAL NOISE OF THE CANTILEVER 45
2.2.4 CANTILEVER DESIGN CONSIDERATIONS 48
2.3 SENSING THE CANTILEVER DEFLECTION 49
2.3.1 TUNNELING TECHNIQUES . . . . . 50
2.3.2 CAPACITIVE MOTION SENSING 52
2.3.3 COUPLED-CAVITY TECHNIQUE 55
2.3.4 OPTICAL BEAM DEFLECTION 58
2.3.5 OPTICAL INTERFEROMETRY 61
IMAGE 3
VI
2.4 T HE CONTROL LOOP 65
2.4.1 STATIC IMAGING 66
2.4.2 DYNAMIC IMAGING 71
2.4.3 LEVER-INDUCED MOTION 78
3 I N T E R F E R O M E T R IC M O T I ON S E N S I NG 80
3.1 GENERAL THEORY 80
3.1.1 JONES REPRESENTATION OF POLARIZED LIGHT 81
3.1.2 BASICS OF INTERFEROMETRIC MOTION SENSING . . .. 84
3.1.3 HETERODYNE INTERFEROMETRY 90
3.1.4 OPERATION AND CHARACTERISTICS OF LASER DIODES . 94
3.2 NOISE SOURCES IN INTERFEROMETRIC MOTION SENSING . . .. 99
3.2.1 SHOT NOISE 100
3.2.2 PHASE NOISE AND WAVELENGTH VARIATION 101
3.2.3 INTENSITY NOISE OF SINGLE MODE LASER DIODES . . . 103
3.2.4 INTENSITY NOISE OF MULTIMODE LASER DIODES . . . 104
3.2.5 PRE-AMPLIFIER NOISE 108
3.3 LASER DIODE-BASED INTERFEROMETERS 110
3.3.1 TWO- WAVELENGTH INTERFEROMETER I LL
3.3.2 WAVELENGTH-MODULATED INTERFEROMETER 123
3.3.3 HETERODYNE INTERFEROMETER 132
4 E X P E R I M E N T AL S E T UP 1 41
4.1 MOTION SENSORS 142
4.1.1 MICHELSON INTERFEROMETER 142
4.1.2 DIFFERENTIAL INTERFEROMETER 147
4.2 MECHANICAL CONSTRUCTION 152
4.3 CONTROL ELECTRONICS AND DATA ACQUISITION 159
4.3.1 CONTROL LOOP OF THE DYNAMIC FORCE MICROSCOPE . 159 4.3.2 CONTROL
LOOP OF THE STATIC FORCE MICROSCOPE . . . 160
4.3.3 D A TA ACQUISITION 161
4.3.4 SOFTWARE 162
4.4 CANTILEVER PREPARATION . X 164
4.4.1 CANTILEVERS FOR THE DYNAMIC FORCE MICROSCOPE . 164 4.4.2
CANTILEVERS FOR MAGNETIC FORCE IMAGING 167
4.4.3 CANTILEVERS FOR THE STATIC FORCE MICROSCOPE . . . 171
IMAGE 4
V LL
5 E X P E R I M E N T AL R E S U L TS 1 75
5.1 INTERFEROMETER PERFORMANCE 175
5.1.1 MICHELSON INTERFEROMETER 175
5.1.2 DIFFERENTIAL INTERFEROMETER 181
5.2 SURFACE PROFILING WITH THE DYNAMIC FORCE MICROSCOPE . 185 5.2.1
CHARACTERIZATION OF ELECTROSTATIC AND VAN DER WAAELS FORCES 186
5.2.2 VERTICAL RESOLUTION 192
5.2.3 ACCURACY OF THE FORCE MICROSCOPE 199
5.3 MAGNETIC DOMAIN IMAGING 203
5.3.1 DESCRIPTION OF INVESTIGATED OBJECTS 204
5.3.2 TIP CHARACTERIZATION 206
5.3.3 INFLUENCE OF THE TIP STRAY FIELD 210
5.3.4 SEPARATING TOPOGRAPHY FROM DOMAIN IMAGES . . 214 5.4 LATERAL
FORCES IN THE STATIC FORCE MICROSCOPE 218
5.4.1 CANTILEVER RESPONSE TO LATERAL FORCES 218
5.4.2 INFLUENCE OF FRICTIONAL FORCES 224
5.4.3 STEP RESPONSE OF THE FORCE MICROSCOPE 228
5.5 IMAGE FORMATION IN STATIC FORCE MICROSCOPY 232
5.5.1 DESCRIPTION OF THE MODEL 233
5.5.2 CALCULATING THE TIP DEFLECTION 235
5.5.3 VERIFICATION OF THE MODEL 237
6 E X A M P L ES OF A P P L I C A T I O NS 2 44
6.1 SUBSTRATE DEFORMATION IN OPTICAL RECORDING 244
6.2 MAGNETO-OPTIC RECORDING IN P T / CO MULTILAYERS 249
6.3 MAGNETIC RECORDING IN CO-CR MEDIA 253
S U M M A RY A ND C O N C L U S I O NS 2 57
S A M E N V A T T I NG EN C O N C L U S I ES 2 60
A C K N O W L E D G E M E N TS 2 63
B I B L I O G R A P HY 266
|
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| indexdate | 2024-07-09T17:17:56Z |
| institution | BVB |
| language | English |
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| physical | VII, 273 S. Ill., graph. Darst. |
| publishDate | 1991 |
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| spelling | Boef, Arie J. den Verfasser aut Scanning force microscopy using optical interferometry door Arie Jeffrey den Boef 1991 VII, 273 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Enschede, Univ., Diss. Krachten gtt Microscopie gtt Scanning gtt Mikroskopie (DE-588)4039238-7 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Mikroskopie (DE-588)4039238-7 s DE-604 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=005484400&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Boef, Arie J. den Scanning force microscopy using optical interferometry Krachten gtt Microscopie gtt Scanning gtt Mikroskopie (DE-588)4039238-7 gnd |
| subject_GND | (DE-588)4039238-7 (DE-588)4113937-9 |
| title | Scanning force microscopy using optical interferometry |
| title_auth | Scanning force microscopy using optical interferometry |
| title_exact_search | Scanning force microscopy using optical interferometry |
| title_full | Scanning force microscopy using optical interferometry door Arie Jeffrey den Boef |
| title_fullStr | Scanning force microscopy using optical interferometry door Arie Jeffrey den Boef |
| title_full_unstemmed | Scanning force microscopy using optical interferometry door Arie Jeffrey den Boef |
| title_short | Scanning force microscopy using optical interferometry |
| title_sort | scanning force microscopy using optical interferometry |
| topic | Krachten gtt Microscopie gtt Scanning gtt Mikroskopie (DE-588)4039238-7 gnd |
| topic_facet | Krachten Microscopie Scanning Mikroskopie Hochschulschrift |
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