Handbook of chemical vapor deposition (CVD): principles, technology, and applications
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Bibliographic Details
Main Author: Pierson, Hugh O. (Author)
Format: Book
Language:English
Published: Park Ridge, NJ Noyes 1992
Series:Materials science and process technology series
Subjects:
Physical Description:XXII, 436 S. Ill., graph. Darst.
ISBN:0815513003

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