1990 Solid State Sensor and Actuator Workshop: Hilton Head Island, SC, June 4 - 7, 1990
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York, NY
Inst. of Electrical and Electronics Engineers
1990
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | V, 191 S. Ill., graph. Darst. |
Internformat
MARC
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| 111 | 2 | |a Solid State Sensor and Actuator Workshop |n 4 |d 1990 |c Hilton Head Island, SC |j Verfasser |0 (DE-588)5144964-X |4 aut | |
| 245 | 1 | 0 | |a 1990 Solid State Sensor and Actuator Workshop |b Hilton Head Island, SC, June 4 - 7, 1990 |c general chairman Ben Hocker |
| 264 | 1 | |a New York, NY |b Inst. of Electrical and Electronics Engineers |c 1990 | |
| 300 | |a V, 191 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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Datensatz im Suchindex
| _version_ | 1804122514034524160 |
|---|---|
| adam_text | 1990
SOLID-STATE SENSOR AND ACTUATOR WORKSHOP
June
3-7, 1990
Mariner s Inn, Hilton Head, SC
PROGRAM
Sunday, June
3
7-9PM WELCOME RECEPTION with no host bar
Monday, June
4
Session
1 -
Acoustic and Resonant Devices
Chairman: Stephen D. Senturia
7:30 AM BREAKFAST
8:00
AM Welcome and Introductions
8:15 AM Quartz
microbalance
studies of solvent and ion transport in thin polymer films in sensor applications of the QCM
1
Steven J. Lasky, Howard R. Meyer, and Daniel A. Buttry, University of Wyoming (Invited)
9:00
Multiple-Frequency Surface Acoustic Wave Devices as Sensors
5
A. J.
Ricco
and S. J. Martin,
Sandia
National Laboratories
9:25
Performance Characteristics of Second Generation Polysilicon Resonating Beam Force Transducers
9
J. J. Sniegowski, H. Guckel, and T. R. Christenson, University of Wisconsin
9:50
The Effect of Thermoelastic Internal Friction on the
Q
of Micromachined Silicon Resonators
13
Terry V. Roszhart, Kearfott Guidance and Navigation Corporation
10:15
COFFEE BREAK
Monday, June
4
Session
2 -
Microactuators
- 1
Chairman: David S. Eddy
10:40
Friction and Wear in Mierofabricated Harmonic Side-Drive Motors
17
Mehran Mehregany, Stephen D. Senturia, and Jeffrey H. Lang, Massachusetts Institute of Technology
11:05
Electrostatically Balanced Comb Drive for Controlled
Lévitation
23
William
С
Tang, Martin
G. Lim,
and Roger T. Howe, U. California, Berkeley
11:30
A Micromachined Silicon Scan Tip for an Atomic Force Microscope
28
L. C
Kong, B. G.
Orr,
and K. D. Wise, University of Michigan
11:55
LUNCH
Monday, June
4
Session
3 -
CAD
Chairman: Wen
H. Ko
1:15 PM Pressure Sensor Design and Simulation using the CAEMEMS-D Module
32
Y. Zhang, S. B.
tiary,
and K. D. Wise, University of Michigan
1:40
Automatic Generation of a
3-D
Solid Model of a Mierofabricated Structure
36
Robert M. Harris,
Fariborz
Maseeh, and Stephen D. Senturia, Massachusetts Institute of Technology
2:05 - 4:00
POSTER SESSION with refreshments provided
Sfâbffity
of
Iridium Crade
Films mffigh Temperature,
200-250 ,
Solutions
42
Kenneth Krcider and Michael Tarlov, NIST
Squeeze-Film Damping in Solid-State Accekrometers
44
James B. Starr, Honeywell
Polysilicon Mkrogripper 4g
Chang-Jin Kim, Albert P.
Pisano,
Richard S.
Muller,
and Martin G. Iim, Umveristy of California, Berkeley
Issues Regarding the High Rate Afterglow and Direct Plasma Etching of Silicon
52
Andrew M.
Hoff,
University of South Florida
Visccelasticity and Creep Recovery of
Połyimide
Thin Films
55
Fariborz Maseeh and Stephen D. Senturia
Massachusetts
Institute
of Technology
Controlled Microstroctare Oxide Coatings for Chemical Sensors
61
Gregory C. Frye, C. Jeffrey Blinker,
Thomas Bein*,
Carol S. Ashley, and S. L. Martinez
Sandia
National Laboratories, and »University of New Mexico
iii
ElectrkaUy-AcövaiedMkroïmchJned
Diaphragm
Valves
65
Hal Jerman,
1С
Sensors
Verification
of
FEM
Analysis of Load-Deflection Methods for Measuring Mechanical ftoperties of Thin Films
70
Jeffrey Y. Pan, Pinyen Lin,
Fariborz
Maseeh, and Stephen
D. Sentaria,
Massachusetts Institute of Technology
Bubble Formation During Silicon Wafer Bonding: Causes and Remedies
74
K. Mitani, V.
Lehmann,
and U.
Gösele, Duke
University
Vmabie-Ftow Micro-Valve Structure Fabricated with Silicon Fusion Bonding
78
Farzad Pourahmadi,
Lee Cristel,
Kurt Petersen, Joseph Mallon, and
Janusz Bryzek,
NovaSensor
An Acoustic Plate Mode hnmunosensor
82
J.
С
Andle, J. F. Vetelino, R. Lee, and D. J. McAllister, University of Maine
Tuesday, June
5
Session
4 -
Chemistry and Physics of Materials and Processes
Chairman: Jed Harrison
7:45 AM BREAKFAST
8:15 AM The Mechanism of
Anisotropie
FJectrochemical Silicon Etching;in Alkaline Solutions
86
Helmut SeMeL Messeerschmitt-Bolkow-Blohm GmbH (Invited)
£00
AnInvestigatkmofthem«to)chemicalEtthmgof(100)SiliconinCsOHandKOH
92
Vincent M. McNeil, Simon S. Wang*, Kay-Yip Ng, and Martin A. Schmidt
Massachusetts Institute of Technology, and ♦General Motors Research Laboratory
£25
Utilization of Polymer
Viscoelastic
Properties in Acoustic Wave Sensor Applications
98
S. J, Martin, A. J. Ricco, and
G. C. Frye,
Sandia
National Laboratories
9:50
Effects of Aging on Polyimide: A Study of Bulk and Interface Chemistry
102
Milan
С
Buncick and
Denice
D.
Demon, University of Wisconsin
10:15
COFFEE BREAK
Tuesday, June
5
Session
5 -
Integrated Sensor Systems; Magnetic Sensors
Chairman: Roger T. Howe
10:40
An
Impiantatile
CMOS Analog Signal Processor for Multiptexai Mcroelectrode Recording Arrays
107
Jin Ji and
Kensall
D.
Wise, University of Michigan
Há» 2-D
Magnetic FfeM Sensor Based on Vertical Hall Device 111
Lj. Ristic, M. Paranjape, and M. T. Doan, University of Alberta
11:30
A High Sensitivity Magnetoresistive Sensor
114
J. E.
Lenz,
G.
F.
Rouse,
L.
K. Strandjord,
В. В.
Pant, A. Metze,
Η.
F.
French,
E.
T.
Benser,
and D. R. Krahn
Honeywell
11:55
LUNCH
Afternoon
fice
for leisure activities
бЛО
BANQUET -Low Country Cookout on the deck
Wednesday, June
б
Session
6 -
Fabrication Methods, Structures, and Materials
Chairman:
Kensall D.
Wise
7:45 AM BREAKFAST
8:15
AM Deep
Х
-Ray Lithography for Micromechanics
118
HL GuckeL T. R. Christenson, K. Skrobis, D.
Dentón,
В.
Choi,
E. G.
Loveli, J.
W. Lee, and
T. W.
Chapman
University of Wisconsin (Invited)
9:00
A Pressure-Balanced Electrostatically-Actuated
Microvalve
123
Michael A. Huff, Michael S. Meaner*, Theresa A. Lober, and Martin A. Schmidt
Massachusetts Institute of Technology, and *Robert Bosch Co.
9:25
A Study on Silicon Diaphragm Buckling
128
Xkoyi Ding, Wen
H. Ko, Yinli
Niu, and Weihua He, Case Western Reserve Univ.
9:50
Polycrystaffine Diamond Film Flow Sensor
132
C.
Đ.
Effis, D. A. Jaworske, R. Ramesham, and T. Roppel, Auburn University
10:15
COFFEE BREAK
Wednesday, June
6
Session
7 -
Microactuators
- 2
Chairman: Clif Fung
10:40
Large Displacement Linear Actuator
135
Reid A.
Brennen,
Martin G.
Lim,
Albert P.
Pisano,
and Alan
T. Chou,
U.
California, Berkeley
11:05
AMmatureFar«y-PerotInterfeixmietervriAaQ)migatedSfficonraaphragmSupport
140
J. H. Jerman, D. J. Clift*, and S. R. Mallinson*,
1С
Sensors, and *British Telecom Research Laboratories
11:30
RF Telemetry Powering and Control of Hermetically-Sealed Integrated Sensors and Actuators
145
Tayfun Akin, Babak Ziaie, and Khalil Najafi, University of Michigan
H:55 LUNCH
Wednesday, June
б
Session
8 -
Acceterometers and Flow Sensors
Chairman: Robert Huber
1:15
PM Second-Order Effects in Self-Testable Accelerometers
149
Diederik
W.
deBruin, Henry V. Allen, and Stephen
С
Terry,
1С
Sensors
1
:40 Wide Dynamic Range Direct Digital Output Accelerometer
153
Widge Henrion,
Len
DiSanza, Matthew Ip, Stephen Terry*, and Hal Jerman*, Triton Technolgies, and *IC Sensors
2:05
Environmentally Rugged, Wide Dynamic Range
Microstructure
Airflow Sensor
158
T. R. Ohnstein, R. G. Johnson, R.
E
Higashi, D. W. Burns, J.
O. Holmen,
E.
A. Satren,
G. M. Johnson,
R. E.
Bicking*, and S. D.
Johnson*, Honeywell, and ♦MicroSwitch
2:30
A Multi-Element Monolithic Mass Flowmeter with On-Chip CMOS Readout Electronics
161
Euisik Yoon and
Kensall
D.
Wise, University of Michigan
2:55
Adjourn
—
remainder of afternoon available for leisure activities
8
flO PM RUMP SESSION
-
Discussion of late-news items and related topics (with refreshments), Joe Giachino, presiding
Thursday, June
7
Session
9 -
Chemical and Biological Sensors
Chairman: Antonio
Ricco
7:45 AM BREAKFAST
8:15 AM Integrated Ion Sensors: How Much More Should Be Done?
165
D. Jed Harrison, Slobodan Petrovic, Xizhong Ii, Elisabeth
M
J. Verpoorte,
Alem
Teclemariam, Alebachew Demoz
University of Alberta (Invited)
9:00
Ion-Selective Sensors Incorporating Strongly Adhesive Polymeric Membranes
169
R D.
Goldberg,
G. S. Cha, and R. B.
Brown, University of Michigan
9:25
Silicon Mfcromachining in the Fabrication of Biosensors Using Living Cells
173
Luc J. Bousse, J. Wallace
Parce,
John C. Owicki and Karen M. Kercso, Molecular Devices Corporation
9:50
A Surface Generated Acoustic Wave Liquid
Microsensor
177
P. Clarke, R. Lee, and
J. F.
Vetelino, University of Maine
10:15
COFFEE BREAK
Thursday, June
7
Session
10 -
Pressure Sensors
Chairman: Thomas Poteat
10:40
High-Stress and Overrange Behavior of Sealed-Cavity Polysfficon Pressure Sensors
181
K. Chau,
С
Fung, P. R. Harris, and J. Panagou, Foxboro Company
11:05
Secondary Sensitivities and Stability of Ultrasensitive Silicon Pressure Sensors
184
S. T. Cho, K. Najafi, and K. D. Wise, University of Wisconsin
11:30
Surface-Mkaomachined Piezoelectric Pressure Sensors
188
P. Schiller, D. L.
Polla,
and M. Ghezze*, University of Minnesota, and *General Electric Company
11:55
Adjourn
AUTHOR INDEX
191
AUTHOR INDEX
Akin,Tayíte»
145
Allai,
Henry V,
149
Andle,
1.
С
82
Ashley, Carol S.
61
Baj
Шаг,
S. S.
118
Bein,
Thomas
61
Besser,
Ε. Τ.
114
Bicking,
R. B.
158
Вошѕе,
Luc J.
173
Bremen, Reid A.
135
Brinker, C. Jeffrey
61
Brown,
R. B.
169
Bryzek,Janusz
78
Bund
ek. Milan C.
102
Bums, D. W.
158
Buttry, Daniel A.
1
Cha, G. S.
169
Chapmm.T. W.
118
Cbao. K.
181
Cho, S. T.
184
Choi,
B.
118
Chou,
Alan
T.
135
Christel Lee
78
Christenson, T. R.
9,118
darte,
P.
177
CaiíuO.J.
140
Ctmy, S. B.
32
deBruta,
Diederik W,
149
Demoz, Alebachcw
165
Dentón,
JJcnice D.
102,118
Dtog, Xiaoyi
128
DiSanza,Len
153
Doan.M.T.
111
Ellis,
C. D,
132
French,
H. F.
114
Frye, G. C.
61,98
Fung,
C.
181
Gtoezzo, M.
188
Goldberg,
H. D.
169
Gosele,U.
74
Gucket
H.
9,118
Hems, P. R.
181
Hfuris,
Robert
M.
36
Harrison,
D. Jed
165
He, Weite»
128
№orion,Widge
153
Higashi,
R. E.
158
Hoff, Andrew
M.
52
Hotaea, J. O.
158
Bowe, Roger T.
23
Haff, Michael A.
123
Ip.MÄtÜiew
153
JewwÄe, D. A.
132
feman,
Ш1
65,140,153
ћ,Гт
107
Johnson,
G. M.
158
Joimsoo, R. G.
158
Johnsen,
S. D.
158
KJercso, Ksrcn M.
173
Кшъ
Ошеш-Јш
48
Ko,
Wen if
128
Км«,
L. C.
28
114
Kmd«,
Кешеві
42
Lang; Jeffrey
Η.
17
Lasky, Steven J.
1
Lec,
R.
8?, 177
Lee, J.
W.
118
Lehmarm,
V.
74
Lenz,
J. E.
114
Li, Xizhong
165
Lim,
Martin G.
23,48, 135
Lin,
Pinyen
70
Lober,
Theresa A.
123
Lovell,
E. G.
118
MáEinson, S. R.
140
Mallon, Joseph
78
Martin, S. J.
5,98
Martinez,
S. L.
61
Maseeh,
Fariborz
36, 55,70
McAllister,
D. J.
82
McNeil,
Vincent M.
92
Mehregany, Mehran
17
Meffiier,
Michael
S.
123
Metze, Á.
114
Meyer, Howard R.
1
Mitani.K.
74
Midler,
Richard S.
48
Najafi, Khalil
145, 184
Ng, Kay-Yip
Niu,Yinli
92
128
Ohnstein, T. R.
158
Orr,
B. G.
28
Owicki, John C.
173
Pan, Jeffrey
Y.
70
Panagou, J.
181
Pant,
B. B.
114
Paranjape, M.
Ш
Parce,
J.
Wallace
173
Petersen, Kurt
78
Petrovic,
Slobodan
165
Pisano,
Albert P.
48,135
Polia, D. L.
188
Pourahmadi, Farzad
78
Ramesham, R.
132
Ricco,
A. J.
5,98
Ristic, Lj.
111
Roppel, T.
132
Roszhart,
Terry
V.
13
Rouse,
G. F.
114
Satten,
E. A.
158
Schiller,
P.
188
Schmidt,
Martin A.
92,123
Seidel,
H.
86
Senturia,
Stephen
D,
17, 36, 55, 70
Skrobis, K.
118
Sniegowski, J. J.
9
Starr,
James B.
44
Strandjord, L. K.
114
Tang,
William C.
23
Tatìov,
Michael
42
Teclemariam,
Alem
165
Terry, Stephen
С.
149,153
Verpoorte, Elisabeth M.J.
165
Vetelino,
J. F.
82,177
Wang,
Simon
S.
92
Wise,
K. D.
28,32,
107, 161, 184
YooaEuisik
161
Zhang,
Y.
32
Ziaic,
Babák
145
191
|
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| indexdate | 2024-07-09T17:15:05Z |
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| publisher | Inst. of Electrical and Electronics Engineers |
| record_format | marc |
| spelling | Solid State Sensor and Actuator Workshop 4 1990 Hilton Head Island, SC Verfasser (DE-588)5144964-X aut 1990 Solid State Sensor and Actuator Workshop Hilton Head Island, SC, June 4 - 7, 1990 general chairman Ben Hocker New York, NY Inst. of Electrical and Electronics Engineers 1990 V, 191 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Halbleitersensor (DE-588)4140390-3 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1990 Hilton Head Island SC gnd-content Halbleitersensor (DE-588)4140390-3 s DE-604 Hocker, Ben Sonstige oth Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=005364491&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | 1990 Solid State Sensor and Actuator Workshop Hilton Head Island, SC, June 4 - 7, 1990 Halbleitersensor (DE-588)4140390-3 gnd |
| subject_GND | (DE-588)4140390-3 (DE-588)1071861417 |
| title | 1990 Solid State Sensor and Actuator Workshop Hilton Head Island, SC, June 4 - 7, 1990 |
| title_auth | 1990 Solid State Sensor and Actuator Workshop Hilton Head Island, SC, June 4 - 7, 1990 |
| title_exact_search | 1990 Solid State Sensor and Actuator Workshop Hilton Head Island, SC, June 4 - 7, 1990 |
| title_full | 1990 Solid State Sensor and Actuator Workshop Hilton Head Island, SC, June 4 - 7, 1990 general chairman Ben Hocker |
| title_fullStr | 1990 Solid State Sensor and Actuator Workshop Hilton Head Island, SC, June 4 - 7, 1990 general chairman Ben Hocker |
| title_full_unstemmed | 1990 Solid State Sensor and Actuator Workshop Hilton Head Island, SC, June 4 - 7, 1990 general chairman Ben Hocker |
| title_short | 1990 Solid State Sensor and Actuator Workshop |
| title_sort | 1990 solid state sensor and actuator workshop hilton head island sc june 4 7 1990 |
| title_sub | Hilton Head Island, SC, June 4 - 7, 1990 |
| topic | Halbleitersensor (DE-588)4140390-3 gnd |
| topic_facet | Halbleitersensor Konferenzschrift 1990 Hilton Head Island SC |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=005364491&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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