Lithography in microelectronics:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Commack
Nova Science Publ.
1989
|
| Schriftenreihe: | Institut Obščej Fiziki <Moskva>: Proceedings of the Institute of General Physics
8. |
| Schlagworte: | |
| Beschreibung: | X, 207 S. |
| ISBN: | 0941743306 |
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| 245 | 1 | 0 | |a Lithography in microelectronics |c ed. by T. M. Makhviladze |
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| 650 | 7 | |a Microélectronique |2 ram | |
| 650 | 4 | |a Microelectronics | |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| genre_facet | Aufsatzsammlung |
| id | DE-604.BV008132827 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T17:15:03Z |
| institution | BVB |
| isbn | 0941743306 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-005363034 |
| oclc_num | 20115828 |
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| owner_facet | DE-20 |
| physical | X, 207 S. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | Nova Science Publ. |
| record_format | marc |
| series | Institut Obščej Fiziki <Moskva>: Proceedings of the Institute of General Physics |
| series2 | Institut Obščej Fiziki <Moskva>: Proceedings of the Institute of General Physics |
| spelling | Lithography in microelectronics ed. by T. M. Makhviladze Commack Nova Science Publ. 1989 X, 207 S. txt rdacontent n rdamedia nc rdacarrier Institut Obščej Fiziki <Moskva>: Proceedings of the Institute of General Physics 8. Lithographie ram Microélectronique ram Microelectronics Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 Makhviladze, T. M. Sonstige oth Institut Obščej Fiziki <Moskva>: Proceedings of the Institute of General Physics 8. (DE-604)BV000746375 8 |
| spellingShingle | Lithography in microelectronics Institut Obščej Fiziki <Moskva>: Proceedings of the Institute of General Physics Lithographie ram Microélectronique ram Microelectronics Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4191584-7 (DE-588)4143413-4 |
| title | Lithography in microelectronics |
| title_auth | Lithography in microelectronics |
| title_exact_search | Lithography in microelectronics |
| title_full | Lithography in microelectronics ed. by T. M. Makhviladze |
| title_fullStr | Lithography in microelectronics ed. by T. M. Makhviladze |
| title_full_unstemmed | Lithography in microelectronics ed. by T. M. Makhviladze |
| title_short | Lithography in microelectronics |
| title_sort | lithography in microelectronics |
| topic | Lithographie ram Microélectronique ram Microelectronics Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Lithographie Microélectronique Microelectronics Lithografie Halbleitertechnologie Aufsatzsammlung |
| volume_link | (DE-604)BV000746375 |
| work_keys_str_mv | AT makhviladzetm lithographyinmicroelectronics |