Chemical vapor deposition: principles and applications
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
London u.a.
Academic Press u.a.
1993
|
| Subjects: | |
| Physical Description: | V, 677 S. Ill., zahlr. graph. Darst. |
| ISBN: | 0123496705 |
Staff View
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| 245 | 1 | 0 | |a Chemical vapor deposition |b principles and applications |c ed. by Michael L. Hitchman ... |
| 264 | 1 | |a London u.a. |b Academic Press u.a. |c 1993 | |
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| 700 | 1 | |a Hitchman, Michael L. |e Sonstige |4 oth | |
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| id | DE-604.BV008024080 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:13:05Z |
| institution | BVB |
| isbn | 0123496705 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-005280073 |
| oclc_num | 27995365 |
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| owner_facet | DE-703 DE-355 DE-BY-UBR DE-91G DE-BY-TUM DE-29T DE-83 DE-11 |
| physical | V, 677 S. Ill., zahlr. graph. Darst. |
| publishDate | 1993 |
| publishDateSearch | 1993 |
| publishDateSort | 1993 |
| publisher | Academic Press u.a. |
| record_format | marc |
| spelling | Chemical vapor deposition principles and applications ed. by Michael L. Hitchman ... London u.a. Academic Press u.a. 1993 V, 677 S. Ill., zahlr. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Chemical vapor deposition CVD-Verfahren (DE-588)4009846-1 gnd rswk-swf CVD-Verfahren (DE-588)4009846-1 s DE-604 Hitchman, Michael L. Sonstige oth |
| spellingShingle | Chemical vapor deposition principles and applications Chemical vapor deposition CVD-Verfahren (DE-588)4009846-1 gnd |
| subject_GND | (DE-588)4009846-1 |
| title | Chemical vapor deposition principles and applications |
| title_auth | Chemical vapor deposition principles and applications |
| title_exact_search | Chemical vapor deposition principles and applications |
| title_full | Chemical vapor deposition principles and applications ed. by Michael L. Hitchman ... |
| title_fullStr | Chemical vapor deposition principles and applications ed. by Michael L. Hitchman ... |
| title_full_unstemmed | Chemical vapor deposition principles and applications ed. by Michael L. Hitchman ... |
| title_short | Chemical vapor deposition |
| title_sort | chemical vapor deposition principles and applications |
| title_sub | principles and applications |
| topic | Chemical vapor deposition CVD-Verfahren (DE-588)4009846-1 gnd |
| topic_facet | Chemical vapor deposition CVD-Verfahren |
| work_keys_str_mv | AT hitchmanmichaell chemicalvapordepositionprinciplesandapplications |