Containing papers presented at the European Materials Research Society 1992 spring meeting, Symposium C: Chemistry for Electronic Materials: June 2 - 5, 1992, Strasbourg, France
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Lausanne
Elsevier Sequoia
1993
|
| Schriftenreihe: | Materials science and engineering : B
17,1/3 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Literaturangaben. - Einzelaufnahme eines Zs.-Bandes |
| Beschreibung: | VIII, 206 S. Ill., graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV008022988 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 930712s1993 ad|| |||| 10||| eng d | ||
| 035 | |a (OCoLC)35533860 | ||
| 035 | |a (DE-599)BVBBV008022988 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-91G |a DE-703 |a DE-706 | ||
| 084 | |a WER 001f |2 stub | ||
| 111 | 2 | |a Symposium Chemistry for Electronic Materials |d 1992 |c Straßburg |j Verfasser |0 (DE-588)5079347-0 |4 aut | |
| 245 | 1 | 0 | |a Containing papers presented at the European Materials Research Society 1992 spring meeting, Symposium C: Chemistry for Electronic Materials |b June 2 - 5, 1992, Strasbourg, France |c guest eds.: T. Hirai ... |
| 264 | 1 | |a Lausanne |b Elsevier Sequoia |c 1993 | |
| 300 | |a VIII, 206 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Materials science and engineering : B |v 17,1/3 | |
| 500 | |a Literaturangaben. - Einzelaufnahme eines Zs.-Bandes | ||
| 650 | 0 | 7 | |a Werkstoffkunde |0 (DE-588)4079184-1 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1992 |z Straßburg |2 gnd-content | |
| 689 | 0 | 0 | |a Werkstoffkunde |0 (DE-588)4079184-1 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Hirai, T. |e Sonstige |4 oth | |
| 856 | 4 | 2 | |m Digitalisierung TU Muenchen |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=005279168&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-005279168 | ||
Datensatz im Suchindex
| _version_ | 1804122386889441280 |
|---|---|
| adam_text | MATEMALS SCIENCE AND
ENGINEERING
B
VOLUME
17,
NUMBERS
1-3,
FEBRUARY
28, 1993
Contents
Preface
..............................................................
vii
Organizers and Sponsors
..................................................... viii
SEMICONDUCTOR COMPOUNDS
New metal-organic precursors for growth of GaAs and Al^Ga,
_,As
by chemical beam epitaxy
................. 1
A. C. Jones (Wirral, UK), P. A. Lane, T. Martin and
C. R.
Whitehouse (Malvern, UK)
Metai-organic research in semiconductor epitaxy: ESPRIT II—MORSE project overview
.................... 9
J. Hirtz
(Orsay,
France)
Improved GaAs/Ga,
_,А1л:
As chemical beam epitaxy using triisopropylgallium
...........................15
P. A. Lane, T. Martin,
C. R.
Whitehouse,
R.
W.
Freer,
M. R. Houlton, P. D. J. Calcott, D. Lee, A. D.
Pitt
(Malvern, UK),
A. C.
Jones and
S. Rushworth (Wirral, UK)
New alternatíve
arsenic
precursors for the metal-organic vapour-phase epitaxy of III-V semiconductors: in-situ formation of
As
-Н
functionality by
β
elimination of specific metal-organic arsenic compounds
........................ 21
P. Gimmnich, A. Greiling, J. Lorberth, C.
Thalmann,
К.
Rademann,
G.
Zimmermann,
H.
Protzmann, W.
Stolz
and
E. O. Göbel
(Marburg,
Germany)
New Group
III aluminium
and gallium hydride precursors for metal-organic vapour-phase epitaxy
................ 25
R.
Dorn,
M.
Müller,
J. Lorberth, G.
Zimmermann,
H. Protzmann, W.
Stolz
and E. O.
Göbel (Marburg,
Germany)
Selective epitaxial growth of In, _rAlxAs by metal-organic vapour-phase epitaxy
........................ 29
K. Shimoyama, Y. Inoue, K.
Fujii
and H. Gotoh (Ibaraki, Japan)
A new organoindium precursor for electronic materials
...................................... 34
V.
Soulière,
P. Abraham, M. Sacilotti, M. P. Berthet, J. Bioux, Y. Monteil
(Villeurbanne,
France), A. M. Pougnet,
R.
Mellet,
A. Ougazzaden and
A. Mircéa (Bagneux,
France)
Growth kinetics during metal-organic chemical vapour deposition of ZnTe
............................ 41
H. Dumont, A. Marbeuf, J.-E.
Bourée
and O. Gorochov (Meudon, France)
SILICON FILMS
The selective epitaxial growth of silicon
.............................................. 47
M. R.
Goulding (Swindon, UK)
In-situ investigations of radical kinetics in the deposition of hydrogenated amorphous silicon films
................ 68
K. Tachibana (Kyoto, Japan)
Silicon deposited by low pressure chemical vapour deposition from Si2H6: experiments, modelling and properties
........ 72
E.
Scheid,
J. J. Pedroviejo, P. Duverneuil, M. Gueye (Toulouse, France), J. Samitier, A. El Hassani (Barcelona, Spain)
and D. Bielle-Daspet (Toulouse, France)
Chemical reactivity and gas flow dynamics considerations on atmospheric pressure chemical vapor deposition with siiane
precursor
............................................................. 11
G. Jursich, K. Mulderink and W.
Von Drasek
(Countryside,
IL, USA)
Properties and stability of hydrogenated amorphous silicon films with a low hydrogen content prepared by cyclic chemical
vapour deposition and
hydrogénation
...............................................
^
S. Koynov, R.
Schwarz,
T.
Fischer and R. Schorer (Garching, Germany)
METALLIC FILMS
A new metal-organic chemical vapor deposition process for selective copper metallization
.................... 87
J. A. T. Norman, B.
A. Muratore,
P.
N.
Dyer, D. A. Roberts, A. K.
Hochberg
(Carlsbad. CA. USA) and L.
H. Dubois
(Murray Hill, NJ, USA)
Etching of copper and copper
oxide
at high
rates
via generation of
volatile
copper
species
.................... 93
J.
Farkas,
K. M.
Chi,
M. J. Hampden-Smith, T. T.
Kodas
(Albuquerque,
NM, USA) and L. H.
Dubois
(Murray
Hill,
NJ,
USA)
Preparation of copper and copper oxide films by metal-organic chemicai vapour deposition using /3-ketoiminato complexes
... 97
T. Gerfin, M. Becht and K.-H. Dahmen
(Zürich,
Switzerland)
Organic solutions of triphenylphosphine gold complexes: attractive new candidates for gold deposition
............. 101
K. Bali, T.
Szörényi
(Szeged, Hungary), M. R. Brook, G. A. Shafeev and
K. I. Grandberg
(Moscow, Russian Federation)
Organometallic compounds: the chemist s contribution to new electronic materials
........................ 104
D.
Blessman,
A. Grafe, R.
Heinén,
F. Jansen,
Th.
Kruck and C. Terfloth (Köln,
Germany)
Tungsten deposition by organometallic chemical vapour deposition with organotungsten precursors
............... 108
С
I. M. A. Spee,
F. Verbeek,
J.
G.
Kraaijkamp,
J. L.
Linden,
T.
Rutten,
H. Delhaye,
E.
A.
van der Zouwen and
Η. Α.
Meinema (Zeist,
Netherlands)
On the growth of epitaxial ultrathin films of a-Sn on CdTe(l
10) . . ..·.............................. 112
P. J.
Möller
and A. Dittmar-Wituski (Copenhagen, Denmark)
Chemical vapour deposition precursors for metal suicides
.................................... 118
R. Madar,
N.
Thomas and
С
Bernard (St. Martin
d Hères,
France)
Synthesis of chromium silicide-silicon carbide composite powders
................................ 126
P. Luo, P. R. Strutt and T. D. Xiao (Storrs, CT, USA)
Chemical vapour deposition of tungsten in a UHV system: effect of substrate conditions on the initial stages of growth
...... 131
U.
Jansson
and J.-O.
Carlsson
(Uppsala, Sweden)
Studies on the nucleation and growth of chemical-vapor-deposited
W
on TiN substrates
..................... 137
E. S. Kim,
С
M.
Lee (Inchon, Korea),
J.
G.
Lee (Suwon, Korea),
H. B.
lm (Taejon,
Korea)
Mineral
precursor for chemical vapor deposition of
Rh metallic
films...............................
143
P.
Doppelt,
V.
Weigel
and P.
Guinot
(Paris, France)
Reaction diffusion in Ta/GaAs contacts
.............................................. 147
Q. Han and R. Schmid-Fetzer (Clausthal-Zellerfeld, Germany)
SUPERCONDUCTOR MATERIALS
Microstructure
and cracking in pure and substituted YBa2Cu3O7_,5
................................ 152
P.
Diko,
M.
Ye,
M.
Mehbod, R. Deltour (Brussels,
Belgium) and I. Sargankova
(Kosice,
Czechoslovakia)
Optimizing metallo-organic chemical vapour deposition of YBCO films: substrates and
Po¡-
Г
conditions
............ 157
О.
Yu. Gorbenko, A. R. Kaul, I. V. Pogosova, S.
N.
Polyakov, E. V. Kolosova, S. A. Pozigun and V. I. Scritny (Moscow,
Russian Federation)
INSULATING MATERIALS
A model for low pressure chemical vapor deposition in a hot-wall tubular reactor
........................ 163
W. G.
Houf,
J.
F.
Grcar (Livermore,
CA,
USA) and
W.
G.
Breiland
(Albuquerque,
NM,
USA)
Growth kinetics and properties of dielectric films synthesized by low pressure chemical vapor deposition from diethylsilane
... 172
R. A. Levy and J. M. Grow (Newark, NJ, USA)
Molecular simulation: a microscopic approach to study the growth of native silicon oxide
..................... 181
V. V. Pham, R. Razafindratsita and J. J.
Simonne
(Toulouse, France)
Silicon nitride elaborated by low pressure chemical vapour deposition from
SÌA
and NH3 at low temperature
......... 185
E.
Scheid,
L. K.
Kouassi,
R.
Henda (Toulouse, France), J. Samitier and
J. R.
Morante
(Barcelona, Spain)
MISCELLANEOUS STUDIES
Heterogeneous systems based on precious metal powders and polymers
............................ ; 90
R.
Kužel
(Prague, Czechoslovakia), J.
Kubát
(Gothenburg, Sweden), I.
Křivka,
J.
Prokeš, O. Stefan
(Prague, Czecho¬
slovakia) and C. Klasan (Lund, Sweden)
Computer simulation of Czochralski silicon thermal history and its effect on bulk stacking fault nuclei generation
........ 196
A. Virzi and M.
Porrmi (Merano,
Italy)
AUTHORINDEX
........................................................ 202
SUBJECT INDEX
........................................................ 204
|
| any_adam_object | 1 |
| author_corporate | Symposium Chemistry for Electronic Materials Straßburg |
| author_corporate_role | aut |
| author_facet | Symposium Chemistry for Electronic Materials Straßburg |
| author_sort | Symposium Chemistry for Electronic Materials Straßburg |
| building | Verbundindex |
| bvnumber | BV008022988 |
| classification_tum | WER 001f |
| ctrlnum | (OCoLC)35533860 (DE-599)BVBBV008022988 |
| discipline | Werkstoffwissenschaften |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01589nam a2200349 cb4500</leader><controlfield tag="001">BV008022988</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">930712s1993 ad|| |||| 10||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)35533860</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV008022988</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91G</subfield><subfield code="a">DE-703</subfield><subfield code="a">DE-706</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">WER 001f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">Symposium Chemistry for Electronic Materials</subfield><subfield code="d">1992</subfield><subfield code="c">Straßburg</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)5079347-0</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Containing papers presented at the European Materials Research Society 1992 spring meeting, Symposium C: Chemistry for Electronic Materials</subfield><subfield code="b">June 2 - 5, 1992, Strasbourg, France</subfield><subfield code="c">guest eds.: T. Hirai ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Lausanne</subfield><subfield code="b">Elsevier Sequoia</subfield><subfield code="c">1993</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">VIII, 206 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Materials science and engineering : B</subfield><subfield code="v">17,1/3</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben. - Einzelaufnahme eines Zs.-Bandes</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Werkstoffkunde</subfield><subfield code="0">(DE-588)4079184-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1992</subfield><subfield code="z">Straßburg</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Werkstoffkunde</subfield><subfield code="0">(DE-588)4079184-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hirai, T.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">Digitalisierung TU Muenchen</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=005279168&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-005279168</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1992 Straßburg gnd-content |
| genre_facet | Konferenzschrift 1992 Straßburg |
| id | DE-604.BV008022988 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:13:03Z |
| institution | BVB |
| institution_GND | (DE-588)5079347-0 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-005279168 |
| oclc_num | 35533860 |
| open_access_boolean | |
| owner | DE-91G DE-BY-TUM DE-703 DE-706 |
| owner_facet | DE-91G DE-BY-TUM DE-703 DE-706 |
| physical | VIII, 206 S. Ill., graph. Darst. |
| publishDate | 1993 |
| publishDateSearch | 1993 |
| publishDateSort | 1993 |
| publisher | Elsevier Sequoia |
| record_format | marc |
| series2 | Materials science and engineering : B |
| spelling | Symposium Chemistry for Electronic Materials 1992 Straßburg Verfasser (DE-588)5079347-0 aut Containing papers presented at the European Materials Research Society 1992 spring meeting, Symposium C: Chemistry for Electronic Materials June 2 - 5, 1992, Strasbourg, France guest eds.: T. Hirai ... Lausanne Elsevier Sequoia 1993 VIII, 206 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials science and engineering : B 17,1/3 Literaturangaben. - Einzelaufnahme eines Zs.-Bandes Werkstoffkunde (DE-588)4079184-1 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1992 Straßburg gnd-content Werkstoffkunde (DE-588)4079184-1 s DE-604 Hirai, T. Sonstige oth Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=005279168&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Containing papers presented at the European Materials Research Society 1992 spring meeting, Symposium C: Chemistry for Electronic Materials June 2 - 5, 1992, Strasbourg, France Werkstoffkunde (DE-588)4079184-1 gnd |
| subject_GND | (DE-588)4079184-1 (DE-588)1071861417 |
| title | Containing papers presented at the European Materials Research Society 1992 spring meeting, Symposium C: Chemistry for Electronic Materials June 2 - 5, 1992, Strasbourg, France |
| title_auth | Containing papers presented at the European Materials Research Society 1992 spring meeting, Symposium C: Chemistry for Electronic Materials June 2 - 5, 1992, Strasbourg, France |
| title_exact_search | Containing papers presented at the European Materials Research Society 1992 spring meeting, Symposium C: Chemistry for Electronic Materials June 2 - 5, 1992, Strasbourg, France |
| title_full | Containing papers presented at the European Materials Research Society 1992 spring meeting, Symposium C: Chemistry for Electronic Materials June 2 - 5, 1992, Strasbourg, France guest eds.: T. Hirai ... |
| title_fullStr | Containing papers presented at the European Materials Research Society 1992 spring meeting, Symposium C: Chemistry for Electronic Materials June 2 - 5, 1992, Strasbourg, France guest eds.: T. Hirai ... |
| title_full_unstemmed | Containing papers presented at the European Materials Research Society 1992 spring meeting, Symposium C: Chemistry for Electronic Materials June 2 - 5, 1992, Strasbourg, France guest eds.: T. Hirai ... |
| title_short | Containing papers presented at the European Materials Research Society 1992 spring meeting, Symposium C: Chemistry for Electronic Materials |
| title_sort | containing papers presented at the european materials research society 1992 spring meeting symposium c chemistry for electronic materials june 2 5 1992 strasbourg france |
| title_sub | June 2 - 5, 1992, Strasbourg, France |
| topic | Werkstoffkunde (DE-588)4079184-1 gnd |
| topic_facet | Werkstoffkunde Konferenzschrift 1992 Straßburg |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=005279168&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT symposiumchemistryforelectronicmaterialsstraßburg containingpaperspresentedattheeuropeanmaterialsresearchsociety1992springmeetingsymposiumcchemistryforelectronicmaterialsjune251992strasbourgfrance AT hirait containingpaperspresentedattheeuropeanmaterialsresearchsociety1992springmeetingsymposiumcchemistryforelectronicmaterialsjune251992strasbourgfrance |