Atomistische Ursachen des Wafer-Verzuges: = Report-Nr. BMFT-FB-T 86-086 = Atomistic origin of wafer distortion
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | German |
| Veröffentlicht: |
Eggenstein-Leopoldshafen
Fachinformationszentrum Energie, Physik, Mathematik
1986
|
| Schriftenreihe: | Deutschland <Bundesrepublik> / Bundesminister für Forschung und Technologie: Forschungsbericht T / 86,001-86,999
86,86 |
| Schlagworte: | |
| Beschreibung: | Zsfassung in engl. Sprache |
| Beschreibung: | 111 S. Ill., graph. Darst. |
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| 245 | 1 | 0 | |a Atomistische Ursachen des Wafer-Verzuges |b = Report-Nr. BMFT-FB-T 86-086 = Atomistic origin of wafer distortion |c von Hans Christian Alt ... |
| 246 | 1 | 1 | |a Report-Nr. BMFT-FB-T 86-086 |
| 246 | 1 | 1 | |a Atomistic origin of wafer distortion |
| 264 | 1 | |a Eggenstein-Leopoldshafen |b Fachinformationszentrum Energie, Physik, Mathematik |c 1986 | |
| 300 | |a 111 S. |b Ill., graph. Darst. | ||
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| 490 | 1 | |a Deutschland <Bundesrepublik> / Bundesminister für Forschung und Technologie: Forschungsbericht T / 86,001-86,999 |v 86,86 | |
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| 700 | 1 | |a Alt, Hans Christian |e Sonstige |4 oth | |
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| id | DE-604.BV007642338 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:06:44Z |
| institution | BVB |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-005006020 |
| oclc_num | 74806499 |
| open_access_boolean | |
| owner | DE-355 DE-BY-UBR DE-210 |
| owner_facet | DE-355 DE-BY-UBR DE-210 |
| physical | 111 S. Ill., graph. Darst. |
| publishDate | 1986 |
| publishDateSearch | 1986 |
| publishDateSort | 1986 |
| publisher | Fachinformationszentrum Energie, Physik, Mathematik |
| record_format | marc |
| series2 | Deutschland <Bundesrepublik> / Bundesminister für Forschung und Technologie: Forschungsbericht T / 86,001-86,999 |
| spelling | Atomistische Ursachen des Wafer-Verzuges = Report-Nr. BMFT-FB-T 86-086 = Atomistic origin of wafer distortion von Hans Christian Alt ... Report-Nr. BMFT-FB-T 86-086 Atomistic origin of wafer distortion Eggenstein-Leopoldshafen Fachinformationszentrum Energie, Physik, Mathematik 1986 111 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Deutschland <Bundesrepublik> / Bundesminister für Forschung und Technologie: Forschungsbericht T / 86,001-86,999 86,86 Zsfassung in engl. Sprache Wafer (DE-588)4294605-0 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Wafer (DE-588)4294605-0 s Silicium (DE-588)4077445-4 s DE-604 Alt, Hans Christian Sonstige oth Bundesminister für Forschung und Technologie: Forschungsbericht T / 86,001-86,999 Deutschland <Bundesrepublik> 86,86 (DE-604)BV000004400 86,86 |
| spellingShingle | Atomistische Ursachen des Wafer-Verzuges = Report-Nr. BMFT-FB-T 86-086 = Atomistic origin of wafer distortion Wafer (DE-588)4294605-0 gnd Silicium (DE-588)4077445-4 gnd |
| subject_GND | (DE-588)4294605-0 (DE-588)4077445-4 |
| title | Atomistische Ursachen des Wafer-Verzuges = Report-Nr. BMFT-FB-T 86-086 = Atomistic origin of wafer distortion |
| title_alt | Report-Nr. BMFT-FB-T 86-086 Atomistic origin of wafer distortion |
| title_auth | Atomistische Ursachen des Wafer-Verzuges = Report-Nr. BMFT-FB-T 86-086 = Atomistic origin of wafer distortion |
| title_exact_search | Atomistische Ursachen des Wafer-Verzuges = Report-Nr. BMFT-FB-T 86-086 = Atomistic origin of wafer distortion |
| title_full | Atomistische Ursachen des Wafer-Verzuges = Report-Nr. BMFT-FB-T 86-086 = Atomistic origin of wafer distortion von Hans Christian Alt ... |
| title_fullStr | Atomistische Ursachen des Wafer-Verzuges = Report-Nr. BMFT-FB-T 86-086 = Atomistic origin of wafer distortion von Hans Christian Alt ... |
| title_full_unstemmed | Atomistische Ursachen des Wafer-Verzuges = Report-Nr. BMFT-FB-T 86-086 = Atomistic origin of wafer distortion von Hans Christian Alt ... |
| title_short | Atomistische Ursachen des Wafer-Verzuges |
| title_sort | atomistische ursachen des wafer verzuges report nr bmft fb t 86 086 atomistic origin of wafer distortion |
| title_sub | = Report-Nr. BMFT-FB-T 86-086 = Atomistic origin of wafer distortion |
| topic | Wafer (DE-588)4294605-0 gnd Silicium (DE-588)4077445-4 gnd |
| topic_facet | Wafer Silicium |
| volume_link | (DE-604)BV000004400 |
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