Tables of ion implantation spatial distributions:
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Bibliographic Details
Format: Book
Language:English
Russian
Published: New York u.a. Gordon and Breach 1986
Edition:Engl. ed., rev. and enlarged
Subjects:
Item Description:Aus d. Russ. übers. - EST: Tablicy parametrov prostranstvennogo raspredelenija ionno-implantirovannych primesej <engl.>
Physical Description:VIII, 462 S. graph. Darst.
ISBN:2881240712

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