Selektive Silizium-Niederdruckepitaxie:
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | German |
| Veröffentlicht: |
Eggenstein-Leopoldshafen
Fachinformationszentrum Energie, Physik, Mathematik
1985
|
| Ausgabe: | Als Ms. gedr. |
| Schlagworte: | |
| Beschreibung: | Zsfassung in engl. Sprache. - PST: Selective low-pressure silicon epitaxy |
| Beschreibung: | 89 S. zahlr. Ill. u. graph. Darst. |
Internformat
MARC
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| 040 | |a DE-604 |b ger |e rakddb | ||
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| 100 | 1 | |a Voss, Heinz-Jürgen |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Selektive Silizium-Niederdruckepitaxie |c Heinz-Jürgen Voss ; Hans Kürten* |
| 246 | 1 | 3 | |a Report-Nr. BMFT-FB-T 85-133 |
| 250 | |a Als Ms. gedr. | ||
| 264 | 1 | |a Eggenstein-Leopoldshafen |b Fachinformationszentrum Energie, Physik, Mathematik |c 1985 | |
| 300 | |a 89 S. |b zahlr. Ill. u. graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Zsfassung in engl. Sprache. - PST: Selective low-pressure silicon epitaxy | ||
| 650 | 0 | 7 | |a Epitaxie |0 (DE-588)4152545-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Selektive Epitaxie |0 (DE-588)4659870-4 |2 gnd |9 rswk-swf |
| 655 | 7 | |a Niederdruckepitaxie |2 gnd |9 rswk-swf | |
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| 700 | 1 | |a Kürten, Hans |e Verfasser |4 aut | |
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| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
Datensatz im Suchindex
| _version_ | 1804121956085137408 |
|---|---|
| any_adam_object | |
| author | Voss, Heinz-Jürgen Kürten, Hans |
| author_facet | Voss, Heinz-Jürgen Kürten, Hans |
| author_role | aut aut |
| author_sort | Voss, Heinz-Jürgen |
| author_variant | h j v hjv h k hk |
| building | Verbundindex |
| bvnumber | BV007633949 |
| ctrlnum | (OCoLC)74762900 (DE-599)BVBBV007633949 |
| edition | Als Ms. gedr. |
| format | Book |
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| genre | Niederdruckepitaxie gnd |
| genre_facet | Niederdruckepitaxie |
| id | DE-604.BV007633949 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:06:13Z |
| institution | BVB |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-004998349 |
| oclc_num | 74762900 |
| open_access_boolean | |
| owner | DE-355 DE-BY-UBR |
| owner_facet | DE-355 DE-BY-UBR |
| physical | 89 S. zahlr. Ill. u. graph. Darst. |
| publishDate | 1985 |
| publishDateSearch | 1985 |
| publishDateSort | 1985 |
| publisher | Fachinformationszentrum Energie, Physik, Mathematik |
| record_format | marc |
| spelling | Voss, Heinz-Jürgen Verfasser aut Selektive Silizium-Niederdruckepitaxie Heinz-Jürgen Voss ; Hans Kürten* Report-Nr. BMFT-FB-T 85-133 Als Ms. gedr. Eggenstein-Leopoldshafen Fachinformationszentrum Energie, Physik, Mathematik 1985 89 S. zahlr. Ill. u. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Zsfassung in engl. Sprache. - PST: Selective low-pressure silicon epitaxy Epitaxie (DE-588)4152545-0 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Selektive Epitaxie (DE-588)4659870-4 gnd rswk-swf Niederdruckepitaxie gnd rswk-swf Silicium (DE-588)4077445-4 s Niederdruckepitaxie f DE-604 Epitaxie (DE-588)4152545-0 s Selektive Epitaxie (DE-588)4659870-4 s 1\p DE-604 Kürten, Hans Verfasser aut 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Voss, Heinz-Jürgen Kürten, Hans Selektive Silizium-Niederdruckepitaxie Epitaxie (DE-588)4152545-0 gnd Silicium (DE-588)4077445-4 gnd Selektive Epitaxie (DE-588)4659870-4 gnd |
| subject_GND | (DE-588)4152545-0 (DE-588)4077445-4 (DE-588)4659870-4 |
| title | Selektive Silizium-Niederdruckepitaxie |
| title_alt | Report-Nr. BMFT-FB-T 85-133 |
| title_auth | Selektive Silizium-Niederdruckepitaxie |
| title_exact_search | Selektive Silizium-Niederdruckepitaxie |
| title_full | Selektive Silizium-Niederdruckepitaxie Heinz-Jürgen Voss ; Hans Kürten* |
| title_fullStr | Selektive Silizium-Niederdruckepitaxie Heinz-Jürgen Voss ; Hans Kürten* |
| title_full_unstemmed | Selektive Silizium-Niederdruckepitaxie Heinz-Jürgen Voss ; Hans Kürten* |
| title_short | Selektive Silizium-Niederdruckepitaxie |
| title_sort | selektive silizium niederdruckepitaxie |
| topic | Epitaxie (DE-588)4152545-0 gnd Silicium (DE-588)4077445-4 gnd Selektive Epitaxie (DE-588)4659870-4 gnd |
| topic_facet | Epitaxie Silicium Selektive Epitaxie Niederdruckepitaxie |
| work_keys_str_mv | AT vossheinzjurgen selektivesiliziumniederdruckepitaxie AT kurtenhans selektivesiliziumniederdruckepitaxie AT vossheinzjurgen reportnrbmftfbt85133 AT kurtenhans reportnrbmftfbt85133 |