Voruntersuchung über trockene Resisttechniken zur Elektronenstrahl-Lithographie:
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | English German |
| Veröffentlicht: |
Bonn
Bundesmin. für Forschung u. Technologie
1984
|
| Ausgabe: | Als Ms. gedr. |
| Schlagworte: | |
| Beschreibung: | Zsfassung in engl. Sprache. - PST: Study for dry resist techniques for electron-beam lithography |
| Beschreibung: | 63 S. Ill., graph. Darst. |
Internformat
MARC
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| 245 | 1 | 0 | |a Voruntersuchung über trockene Resisttechniken zur Elektronenstrahl-Lithographie |c Christian Fritzsche ; Wolfram Rothemund* |
| 246 | 1 | 3 | |a Reportnr. BMFT FB T 84 037 |
| 250 | |a Als Ms. gedr. | ||
| 264 | 1 | |a Bonn |b Bundesmin. für Forschung u. Technologie |c 1984 | |
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Datensatz im Suchindex
| _version_ | 1804121932630589440 |
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| any_adam_object | |
| author | Fritzsche, Christian Rothemund, Wolfram |
| author_facet | Fritzsche, Christian Rothemund, Wolfram |
| author_role | aut aut |
| author_sort | Fritzsche, Christian |
| author_variant | c f cf w r wr |
| building | Verbundindex |
| bvnumber | BV007615739 |
| ctrlnum | (OCoLC)35429873 (DE-599)BVBBV007615739 |
| edition | Als Ms. gedr. |
| format | Book |
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| genre | Trockene Resisttechnik gnd |
| genre_facet | Trockene Resisttechnik |
| id | DE-604.BV007615739 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T17:05:50Z |
| institution | BVB |
| language | English German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-004981800 |
| oclc_num | 35429873 |
| open_access_boolean | |
| owner | DE-355 DE-BY-UBR |
| owner_facet | DE-355 DE-BY-UBR |
| physical | 63 S. Ill., graph. Darst. |
| publishDate | 1984 |
| publishDateSearch | 1984 |
| publishDateSort | 1984 |
| publisher | Bundesmin. für Forschung u. Technologie |
| record_format | marc |
| spelling | Fritzsche, Christian Verfasser aut Voruntersuchung über trockene Resisttechniken zur Elektronenstrahl-Lithographie Christian Fritzsche ; Wolfram Rothemund* Reportnr. BMFT FB T 84 037 Als Ms. gedr. Bonn Bundesmin. für Forschung u. Technologie 1984 63 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Zsfassung in engl. Sprache. - PST: Study for dry resist techniques for electron-beam lithography Polymerfilm (DE-588)4175236-3 gnd rswk-swf Elektronenstrahllithografie (DE-588)4151897-4 gnd rswk-swf Trockene Resisttechnik gnd rswk-swf Elektronenstrahllithografie (DE-588)4151897-4 s Trockene Resisttechnik f DE-604 Polymerfilm (DE-588)4175236-3 s 1\p DE-604 Rothemund, Wolfram Verfasser aut 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Fritzsche, Christian Rothemund, Wolfram Voruntersuchung über trockene Resisttechniken zur Elektronenstrahl-Lithographie Polymerfilm (DE-588)4175236-3 gnd Elektronenstrahllithografie (DE-588)4151897-4 gnd |
| subject_GND | (DE-588)4175236-3 (DE-588)4151897-4 |
| title | Voruntersuchung über trockene Resisttechniken zur Elektronenstrahl-Lithographie |
| title_alt | Reportnr. BMFT FB T 84 037 |
| title_auth | Voruntersuchung über trockene Resisttechniken zur Elektronenstrahl-Lithographie |
| title_exact_search | Voruntersuchung über trockene Resisttechniken zur Elektronenstrahl-Lithographie |
| title_full | Voruntersuchung über trockene Resisttechniken zur Elektronenstrahl-Lithographie Christian Fritzsche ; Wolfram Rothemund* |
| title_fullStr | Voruntersuchung über trockene Resisttechniken zur Elektronenstrahl-Lithographie Christian Fritzsche ; Wolfram Rothemund* |
| title_full_unstemmed | Voruntersuchung über trockene Resisttechniken zur Elektronenstrahl-Lithographie Christian Fritzsche ; Wolfram Rothemund* |
| title_short | Voruntersuchung über trockene Resisttechniken zur Elektronenstrahl-Lithographie |
| title_sort | voruntersuchung uber trockene resisttechniken zur elektronenstrahl lithographie |
| topic | Polymerfilm (DE-588)4175236-3 gnd Elektronenstrahllithografie (DE-588)4151897-4 gnd |
| topic_facet | Polymerfilm Elektronenstrahllithografie Trockene Resisttechnik |
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