Scanning electron microscopy and x-ray microanalysis: a text for biologists, materials scientists, and geologists
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
New York u.a.
Plenum Press
1992
|
| Ausgabe: | 2. ed. |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XVIII, 820 S. Ill., graph. Darst. |
| ISBN: | 0306441756 |
Internformat
MARC
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| 245 | 1 | 0 | |a Scanning electron microscopy and x-ray microanalysis |b a text for biologists, materials scientists, and geologists |c Joseph I. Goldstein ... |
| 250 | |a 2. ed. | ||
| 264 | 1 | |a New York u.a. |b Plenum Press |c 1992 | |
| 300 | |a XVIII, 820 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
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| 650 | 4 | |a Microanalyse aux rayons X | |
| 650 | 7 | |a Microanalyse par émission X |2 ram | |
| 650 | 7 | |a Microscopes électroniques à balayage |2 ram | |
| 650 | 4 | |a Microscopie électronique à balayage | |
| 650 | 7 | |a Microscopie électronique à balayage |2 ram | |
| 650 | 4 | |a Electron Probe Microanalysis | |
| 650 | 4 | |a Microscopy, Electron, Scanning | |
| 650 | 4 | |a Scanning electron microscopy | |
| 650 | 4 | |a X-ray microanalysis | |
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Datensatz im Suchindex
| _version_ | 1804121545686122496 |
|---|---|
| adam_text | Scanning Electron
Microscopy and
X-Ray Microanalysis
A Text for Biologists,
Materials Scientists, and Geologists
SECOND EDITION
Joseph I Goldstein
Lehigh University
Bethlehem, Pennsylvania
Dale E Newbury
National Institute of
Standards and Technology
Gaithersburg, Maryland
Patrick Echlin
University of Cambridge ,
Cambridge, England
David C Joy
University of Tennessee
Knoxville, Tennessee
A D Romig, Jr
Sandia National Laboratories
Albuquerque, New Mexico
Charles £ Lyman
Lehigh University
Bethlehem, Pennsylvania
Charles Fiori
National Institute of
Standards and Technology
Gaithersburg, Maryland
Eric Lifshin
General Electric Corporate Research
and Development
Schenectady, New York
PLENUM PRESS • NEW YORK AND LONDON
Contents
1 Introduction 1
1 1 Evolution of the Scanning Electron Microscope 2
1 2 Evolution of the Electron Probe Microanalyzer 10
1 3 Outline of This Book 17
2 Electron Optics 21
2 1 How the SEM Works 21
211 Functions of the SEM Subsystems 21
212 • Why Learn about Electron Optics? 24
2 2 Electron Guns 25
221 Thermionic Electron Emission 25
222 Conventional Triode Electron Guns 26
223 Brightness 29
224 Tungsten Hairpin Electron Gun 31
225 Lanthanum Hexaboride (LaB6) Electron Guns 35
226 Field Emission Electron Guns 38
2 3 Electron Lenses 43
231 Properties of Magnetic Lenses 43
232 Lenses in SEMs 46
233 Producing Minimum Spot Size 48
234 Lens Aberrations 53
2 4 • Electron Probe Diameter versus Electron Probe Current 57
241 Calculation of dmia and imax 57
242 Comparison of Electron Sources 60
243 Measurement of Microscope Parameters 65
2 5 Summary of SEM Microscopy Modes 67
3 Electron—Specimen Interactions 69
3 1 Introduction 69
3 2 Electron Scattering 70
321 Elastic Scattering 71
322 Inelastic Scattering 73 VU
Vlii 3 3 Interaction Volume 79
331 Experimental Evidence 79
CONTENTS 332 Monte Carlo Electron-Trajectory Simulation 81
3321 Influence of Beam Energy on
Interaction Volume 83
3322 Influence of Atomic Number on
Interaction Volume 84
3323 Influence of Specimen Surface Tilt on
Interaction Volume 86
333 Measures of Interaction Volume—Electron Range 87
3331 Bethe Range 88
3332 Kanaya-Okayama Range 89
3333 Range for a Tilted Specimen 89
3334 Comparison of Ranges 89
3335 Range at Low Beam Energy 90
3 4 Signals from Elastic Scattering 90
341 Backscattered Electrons 91
3411 Atomic Number Dependence 92
3412 Beam-Energy Dependence 94
3413 Tilt Dependence 95
3414 Angular Distribution 97
3415 Energy Distribution 100
3416 Lateral Spatial Distribution 101
3417 Sampling Depth of Backscattered
Electrons 104
3 5 Signals from Inelastic Scattering 106
351 Secondary Electrons 107
3511 Definition and Origin 107
3512 Energy Distribution 108
3513 Specimen Composition Dependence 108
3514 Beam-Energy Dependence 110
3515 Specimen Tilt Dependence I l l
3516 Angular Distribution of Secondary
Electrons 112
3517 Range and Escape Depth of Secondary
Electrons 113
3518 Relative Contributions of SE, and SEn 115
352 X-Rays 116
3521 Continuum X-Ray Production 117
3522 Inner-Shell Ionization 119
3523 X-Ray Absorption 135
3524 X-Ray Fluorescence 139
353 Auger Electrons 142
354 Cathodoluminescence 144
355 Specimen Heating 146
3 6 Summary 146
4 Image Formation and Interpretation 149
4 1 Introduction 149
4 2 The Basic SEM Imaging Process 150
421 Scanning Action
; 150 IX
422 Image Construction (Mapping) 152
4221 Line Scans 153 CONTENTS
4222 Image (Area) Scanning 154
4223 Digital Imaging: Collection and Display 156
423 Magnification 157
424 Picture Element (Pixel) Size 159
425 Low-Magnification Operation 163
426 Depth of Field (Focus) 163
427 Image Distortions 166
4271 Projection Distortion: Gnomonic
Projection 166
4272 Projection Distortion: Image
Foreshortening of Tilted Objects 167
4273 Corrections for Tilted Flat Surfaces 170
4274 Scan Distortion: Pathological 170
4275 Moire Effects 174
4 3 Detectors 174
431 Electron Detectors 176
4311 Everhart-Thornley Detector 177
4312 Dedicated Backscattered-Electron
Detectors 181
4313 Specimen Current (The Specimen As
Detector) 186
432 Cathodoluminescence Detector 188
4 4 Image Contrast at Low Magnification ( 10,000x) 189
441 Contrast 190
442 • Compositional (Atomic Number) Contrast 191
4421 Compositional Contrast with
Backscattered Electrons 191
4422 Compositional Contrast with Secondary
Electrons 195
4423 Compositional Contrast with Specimen
Current 197
443 Topographic Contrast 198
4431 Origin 198
4432 Topographic Contrast with the
Everhart-Thornley Detector 200
4433 Light-Optical Analogy 203
4434 Topographic Contrast with Other Detectors 205
4435 Separation of Contrast Components 210
4436 Other Contrast Mechanisms 214
4 5 Image Quality 215
4 6 High-Resolution Microscopy: Intermediate (10,000-100,000x)
and High Magnification ( 100,000x) 219
461 Electron-Specimen Interactions in High-
Resolution Microscopy 220
4611 Backscattered Electrons 220
4612 Secondary Electrons 223
462 High-Resolution Imaging at High Voltage 224
463 High-Resolution Imaging at Low Voltage 226
X464 Resolution Improvements: The Secondary-
Electron Signal 227
CONTENTS 465 Image Interpretation at High Resolution 229
4 7 Image Processing for the Display of Contrast Information 231
471 The Visibility Problem 232
472 Analog Signal Processing 233
4721 Display of Weak Contrast (Differential
Amplification) 234
4722 Enhancement of a Selected Contrast
Range (Gamma Processing) 237
4723 Enhancement of Selected Spatial
Frequencies (Derivative Processing) 238
4724 Signal Mixing 242
4725 Contrast Reversal 243
4726 y-Modulation 243
473 Digital Image Processing 244
4731 Real Time Digital Imaging 244
4732 Off-Line Digital Image Processing 245
4733 Digital Imaging for Minimum-Dose
Microscopy 246
4 8 Defects of the SEM Imaging Process 247
481 Contamination 247
482 Charging 249
4821 Incipient Charging 253
4822 Severe Charging 254
4 9 Special Topics in SEM Imaging 255
491 SEM at Elevated Pressures (Environmental SEM) 255
4911 The Vacuum Environment 255
4912 Detectors for Elevated-Pressure
Microscopy 256
4913 Contrast in Elevated-Pressure Microscopy 257
4914 Resolution 258
4915 Benefits of SEM at Elevated Pressures 258
492 Stereo Microscopy 260
4921 Qualitative Stereo Microscopy 260
4922 Quantitative Stereo Microscopy 263
493 STEM in SEM 267
4 10 Developing a Comprehensive Imaging Strategy 270
5 X-Ray Spectral Measurement: WDS and EDS 273
5 1 Introduction 273
5 2 Wavelength-Dispersive Spectrometer 273
521 Basic Design 273
522 The X-Ray Detector 280
523 Detector Electronics 283
5 3 Energy-Dispersive X-Ray Spectrometer 292
531 Operating Principles 292
532 The Detection Process 296
533 Charge-to-Voltage Conversion 297
534 Pulse-Shaping Linear Amplifier and Pileup •*
Rejection Circuitry 298
535 The Computer X-Ray Analyzer 304 CONTENTS
536 Artifacts of the Detection Process 310
5361 Peak Broadening 310
5362 Peak Distortion 313
5363 Silicon X-Ray Escape Peaks 315
5364 Absorption Edges 316
5365 Internal Fluorescence Peak of Silicon 319
537 Artifacts from the Detector Environment 319
5371 Microphony 320
5372 Ground Loops 321
5373 Ice-Oil Accumulation 323
5374 Sensitivity to Stray Radiation 325
538 Summary of EDS Operation and Artifacts 330
5 4 Comparison of WDS and EDS 331
541 Geometrical Collection Efficiency 331
542 Quantum Efficiency 332
543 Resolution 332
544 Spectral Acceptance Range 334
545 Maximum Count Rate 334
546 Minimum Probe Size 334
547 Speed of Analysis 336
548 Spectral Artifacts 336
Appendix: Initial Detector Setup and Testing 337
6 Qualitative X-Ray Analysis 341
6 1 Introduction 341
6 2 EDS Qualitative Analysis 343
621 X-Ray Lines 343
622 Guidelines for EDS Qualitative Analysis 348
6221 General Guidelines for EDS Qualitative
Analysis 348
6222 Specific Guidelines for EDS Qualitative
Analysis 349
623 Pathological Overlaps in EDS Qualitative Analysis 353
624 Examples of EDS Qualitative Analysis 355
6 3 WDS Qualitative Analysis 357
631 Measurement of X-Ray Lines 357
632 Guidelines for WDS Qualitative Analysis 361
6 4 Automatic Qualitative EDS Analysis 363
7 X-Ray Peak and Background Measurements 365
7 1 General Considerations for X-Ray Data Handling 365
7 2 Background Correction 366
721 Background Correction for EDS 366
7211 Background Modeling 368
7212 Background Filtering 373
XII 722 Background Correction for WDS 376
7221 Interpolation 376
CONTENTS 7222 Substitute Material Method 377
*73 Peak Overlap Correction 377
731 EDS Peak Overlap Correction 377
7311 Linearity 379
7312 Goodness of Fit 380
7313 The Linear Methods 381
7314 The Nonlinear Methods 383
7315 Error Estimation 386
732 WDS Peak-Overlap Correction 391
8 Quantitative X-Ray Analysis: The Basics 395
8 1 Introduction 395
8 2 Advantages of Quantitative X-Ray Microanalysis in the
SEM/EPMA 396
8 3 Quantitative Analysis Procedures 397
8 4 The Approach to X-Ray Quantitation: The Need for
Matrix Corrections 399
8 5 The Physical Origin of Matrix Effects 400
8 6 X-Ray Production 401
861 Effect of Atomic Number 401
862 X-Ray Generation with Depth, t (pz) 403
8 7 ZAF Factors in Microanalysis 405
871 Atomic Number Effect 405
872 X-Ray Absorption Effect 407
873 X-Ray Fluorescence 412
8 8 Types of Matrix Correction Schemes 413
8 9 Caveats 415
9QuantitativeX-RayAnalysis:TheoryandPractice 417
91 Introduction 417
9 2 ZAF Technique , 417
921 Introduction 417
922 The Atomic Number Correction Z 419
923 The Absorption Correction A 424
9231 Formulation 424
9232 Expressions for f(x) 425
9233 Practical Considerations 426
9234 Calculations of the Absorption Factor A 421
9 2A The Characteristic Fluorescence Correction F 429
925 The Continuum Fluorescence Correction 432
926 Summary Discussion of the ZAF Method 434
9 3 4 (pz) Technique 436
931 Introduction 436
932 The p(pz) Curves 437
9321 Definition 437
9322 Measurement of j (pz) Curves 439
933 Calculation of 0(pz) Curves 440 XIII
934 Atomic Number Correction Z, 443
935 Absorption Correction At - 445 CONTENTS
936 Summary Discussion of the j (pz) Method 448
9 4 Quantitative Analysis with Nonnormal Electron-Beam
Incidence 453
9 5 Standardless Analysis 456
9 6 The Biological or Polymer Specimen: Special Procedures 460
961 The Characteristic Signal 461
962 The Continuum Signal 462
963 Derivation of the Hall Procedure in Terms of
X-Ray Cross-Sections 463
964 Error Analysis 465
965 Bulk Targets and Analysis of a Minor Element 465
9 7 Special Procedures for Geological Analysis 466
971 Introduction 466
972 Formulation of the Bence-Albee Procedure 467
973 Application of Bence-Albee Procedure 468
974 Specimen Conductivity 470
9 8 Special Sample Analysis 471
981 Introduction: The Analytical Total 471
982 Films on Substrates 472
983 Foils 476
984 Particles and Rough Surfaces 479
9841 Mass Effect 479
9842 Absorption Effect 480
9843 Fluorescence Effect 486
9844 Compensating for Geometric Effects in
Quantitative Analysis 486
9 9 Precision and Sensitivity in X-Ray Analysis 493
991 Statistical Basis for Calculating Precision and
Sensitivity 493
992 Sample Homogeneity 496,
993 Analytical Sensitivity 497
994 Trace-Element Analysis 499
995 Variance under Peak Overlap Conditions in the EDS 502
9 10 Light-Element Analysis 503
9 10 1 Introduction 503
9 10 2 Operating Conditions for Light-Element Analysis 504
9 10 3 X-Ray Spectrometers 505
9 10 3 1 WDS 505
9 10 3 2 EDS 509
9 10 4 Chemical Bonding Shifts 510
9 10 4 1 WDS 510
9 10 4 2 EDS 512
9 10 5 Standards for Light-Element Analysis 513
9 10 6 Surface Contamination 514
9 10 7 Measurement of Background Intensities 516
9 10 7 1 WDS 516
9 10 7 2 EDS 517
9 10 8 Quantitation Procedures for the Light Elements 517
XIV Appendix 9 1 Equations for the a, fi, y, and 0(0) Terms of the
Packwood-Brown (j (pz) Equation 520
CONTENTS Appendix 9 2 Solutions for the Atomic Number and Absorption
Corrections 522
10 Compositional Imaging 525
10 1 Introduction 525
10 2 Analog X-Ray Area Scanning (Dot Mapping) 526
10 2 1 Procedure 526
10 2 2 Limitations and Artifacts 529
10 3 Digital Compositional Mapping ; 535
10 3 1 Principles 535
10 311 Data Collection 536
10 312 Dead-time Correction 536
10 313 Defocusing or Decollimation Correction 536
10 314 Background Correction 537
10 315 Standardization (fc-Value) 538
10 316 Matrix Correction 538
10 317 Combined EDS-WDS Strategy 538
10 318 Statistics in Compositional Mapping 539
10 3 2 Advantages 539
11 Specimen Preparation for Inorganic Materials:
Microstructural and Microchemical Analysis 547
11 1 Metals 547
11 1 1 Specimen Preparation for Surface Topography 549
11 1 2 Specimen Preparation for Microstructural and
Microchemical Analysis 550
11 121 Final Specimen Preparation for
Microstructural Analysis 550
11 122 Final Specimen Preparation for
Microchemical Analysis 552
11 1 3 Preparation of Standards for X-Ray Microanalysis 554
11 2 Ceramics and Geological Specimens 556
11 2 1 Initial Specimen Preparation 556
11 2 2 Mounting 556
11 2 3 Polishing 557
11 2 4 Final Specimen Preparation 557
11 3 Electronic Devices and Packages 557
11 3 1 Initial Specimen Preparation 558
11 3 2 Mounting 559
11 3 3 Polishing 560
11 3 4 Final Preparation 560
11 4 Semiconductors 560
11 4 1 Voltage Contrast 560
11 4 2 Charge Collection 561
11 4 3 Electron Channeling 562
11 5 Sands, Soils, and Clays 562
11 6 Particles and Fibers 564
11 6 1 Particle Substrates 565 XV
11 611 Bulk Substrates 565
11 612 Thin-Foil Substrate 566 CONTENTS
11 6 2 Transfer and Attachment of Particles to Substrates 566
11 621 Abundant, Loose Particles 567
11 622 Particle Transfer from a Filter 568
11 623 Particles in a Solid Matrix 568
11 6 3 Transfer of Individual Particles 569
12 Sample Preparation for Biological, Organic,
Polymeric, and Hydrated Materials 571
12 1 Introduction • 571
12 2 Compromising the Electron-Beam Instrument 572
12 2 1 Environmental Stages 572
12 2 2 Environmental Microscopes 572
12 2 3 Nonoptimal Microscope Performance 573
12 3 Compromising the Sample 574
12 4 Correlative Microscopy 576
12 5 Techniques for Structural Studies 576
12 5 1 Specimen Selection 578
12 5 2 Specimen Cleaning 579
12 5 3 Specimen Stabilization 582
12 5 4 Specimen Dehydration 585
12 541 Chemical Dehydration 585
12 542 Critical-Point Drying 590
12 543 Low-Temperature Drying 592
12 544 Ambient-Temperature Sublimation 594
12 5 5 Exposure of Internal Surfaces 594
12 551 Sectioning 596
12 552 Fracturing 599
12 553 Replication 604
12 554 Surface Etching 606
12 5 6 Specimen Supports 606
12 5 7 High-Resolution Scanning Microscopy # 609
12 571 Isolation of Object of Interest 609
12 572 Stabilization and Conductive Staining 611
12 573 Specimen Coating 611
12 6 Specimen Preparation for Localization of Metabolic Activity
and Chemical Specificity 611
12 6 1 Introduction 611
12 6 2 The Nature of the Problem 612
12 621 The Form of the Substance Being
Analyzed 612
12 622 Precision of Analytical Investigation 612
12 623 Types of Specimens 614
12 624 Types of Instrumentation 616
12 625 Types of Analytical Applications 616
12 6 3 General Preparative Procedures 617
12 631 Before Fixation 617
12 632 Fixation 617
12 633 Histochemical Techniques 619
XVI 12 634 Precipitation Techniques 620
12 635 Dehydration 621
CONTENTS 12 636 Embedding 622
12 637 Sectioning and Fracturing 623
12 638 Specimen Supports 623
12 639 Specimen Staining 624
12 6 4 Localizing Regions of Biological Activity and
Chemical Specificity 624
• 12 641 Backscattered-Electron Cytochemical
Methods 624
12 642 Radioactive Labelling Methods 628
12 643 Immunocytochemical Methods 629
12 6 5 Criteria for Satisfactory Specimen Preparation 633
12 7 Preparative Procedures for Organic Samples Such as
Polymers, Plastics, and Paints 635
12 7 1 Introduction 635
12 7 2 Examination of the Surface of Polymers and Fibers 635
12 7 3 Examination of the Interior of Polymers and Fibers 635
12 731 Sectioning 636
12 732 Polished Cut Surfaces 636
12 733 Peelback Procedure 637
12 734 Fracturing 638
12 735 Replicas 639
12 7 4 Surface Etching of Polymers 639
12 741 High-Energy Beam Bombardment 640
12 742 Argon Ion-Beam Etching 640
12 1 A3 Oxygen Plasma Etching 640
12 1 AA Chemical Dissolution 640
12 745 Chemical Attack 641
12 746 Enzymatic Digestion 641
12 7 5 Staining of Polymers and Plastics 641
12 751 Osmium Tetroxide 641
12 752 Chlorosulphonic Acid 641
12 753 Phosphotungstic Acid 642
12 754 Ruthenium Tetroxide 642
12 755 Silver Salts 642
12 7 6 Specialized Preparative Methods 643
12 8 Low-Temperature Specimen Preparation for Structural and
Analytical Studies 644
12 8 1 Introduction 644
12 8 2 Water: Properties 645
12 8 3 Ice 646
12 8 4 Rapid Cooling Procedures 647
12 8 5 Cryosectioning 649
12 8 6 Cryofracturing 649
12 8 7 Freeze Drying 651
12 8 8 Freeze Substitution and Low-Temperature
Embedding 652
12 8 9 Low-Temperature SEM 654
12 8 10 Low-Temperature X-Ray Microanalysis 654
12 9 Damage, Artifact, and Interpretation 658
12 9 1 Introduction 658
12 9 2 Sample Damage during Preparation 658 XVII
12 9 3 Specimen Damage during Examination and Analysis 659
12 931 Observable Damage 659 CONTENTS
12 932 Nonobservable Damage 662
12 9 4 Artifacts _ 668
12 9 5 Interpretation 669
12 10 Specific Preparative Procedures: A Bibliography 669
13 Coating and Conductivity Techniques for SEM and
Microanalysis 671
13 1 Introduction 671
13 2 Specimen Characteristics 672
13 2 1 Conductivity ^ 672
13 2 2 Thermal Damage 672
13 2 3 Secondary- and Backscattered-Electron Emission 674
13 2 4 X-Ray and Cathodoluminescence Emission 674
13 2 5 Mechanical Stability 675
13 3 Untreated Specimens 675
13 4 Bulk Conductivity Staining Methods 678
13 5 Specimen Mounting Procedures 684
13 6 Thin-Film Methods 685
13 7 Thermal Evaporation 686
13 7 1 High-Vacuum Evaporation 688
13 7 2 The Apparatus 692
13 7 3 Choice of Evaporant 694
13 7 4 • Evaporation Techniques 696
13 7 5 Artifacts Associated with Evaporative Coating 700
13 7 6 Low-Vacuum Evaporation 701
13 8 Sputter Coating 701
13 8 1 Diode or Direct-Current Sputtering 703
13 8 2 Plasma-Magnetron Sputtering 705
13 8 3 Ion-Beam Sputtering 707
13 8 4 Penning Sputtering 711
13 8 5 Sputtering Techniques 715
13 8 6 Choice of Target Material 716
13 8 7 Coating Thickness 716
13 8 8 Advantages of Sputter Coating 717
13 8 9 Artifacts Associated with Sputter Coating 719
13 9 Specialized Coating Methods 720
13 9 1 High-Resolution Coating 720
13 9 2 Coating Samples Maintained at Low Specimen
Temperatures 723
13 9 3 Coating Frozen-Hydrated Material Maintained at
Low Temperatures 726
13 9 4 Coating Techniques for X-Ray Microanalysis 729
13 10 Determination of Coating Thickness 732
13 10 1 Estimation of Coating Thickness 732
13 10 2 Measurement during Coating 733
13 10 3 Measurement after Coating 735
13 10 4 Removing Coating Layers 736
XVIII 13 11 Artifacts Related to Coating and Bulk-Conductivity
Procedures 737
CONTENTS 13 12 Conclusions 739
14 Data Base 741
Table 14 1 Atomic Number, Atomic Weight, and Density of Elements 741
Table 14 2 Common Oxides of the Elements 743
Table 14 3 Mass Absorption Coefficients for Ka Lines 744
Table 14 4 Mass Absorption Coefficients for La Lines 752
Table 14 5 Mass Absorption Coefficients for Ma Lines 768
Table 14 6 K Series X-Ray Wavelengths and Energies 778
Table 14 7 L Series X-Ray Wavelengths and Energies 780
Table 14 8 M Series X-Ray Wavelengths and Energies 781
Table 14 9 J and Fluorescent Yield (w) by Atomic Number 782
Table 14 10 Important Properties of Selected Coating Elements 784
References , 787
Index 807
|
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| dewey-search | 502/.8/25 |
| dewey-sort | 3502 18 225 |
| dewey-tens | 500 - Natural sciences and mathematics |
| discipline | Allgemeine Naturwissenschaft Physik Biologie |
| edition | 2. ed. |
| format | Book |
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| id | DE-604.BV007311619 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:59:41Z |
| institution | BVB |
| isbn | 0306441756 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-004703864 |
| oclc_num | 25551671 |
| open_access_boolean | |
| owner | DE-384 DE-355 DE-BY-UBR DE-703 DE-20 DE-M347 DE-29T DE-706 DE-11 DE-188 DE-B16 |
| owner_facet | DE-384 DE-355 DE-BY-UBR DE-703 DE-20 DE-M347 DE-29T DE-706 DE-11 DE-188 DE-B16 |
| physical | XVIII, 820 S. Ill., graph. Darst. |
| publishDate | 1992 |
| publishDateSearch | 1992 |
| publishDateSort | 1992 |
| publisher | Plenum Press |
| record_format | marc |
| spelling | Scanning electron microscopy and x-ray microanalysis a text for biologists, materials scientists, and geologists Joseph I. Goldstein ... 2. ed. New York u.a. Plenum Press 1992 XVIII, 820 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Microanalyse aux rayons X Microanalyse par émission X ram Microscopes électroniques à balayage ram Microscopie électronique à balayage Microscopie électronique à balayage ram Electron Probe Microanalysis Microscopy, Electron, Scanning Scanning electron microscopy X-ray microanalysis Rasterelektronenmikroskopie (DE-588)4048455-5 gnd rswk-swf Raster-Transmissions-Elektronenmikroskopie (DE-588)4320991-9 gnd rswk-swf Elektronenstrahlmikroanalyse (DE-588)4151898-6 gnd rswk-swf Röntgenstrukturanalyse (DE-588)4137203-7 gnd rswk-swf Werkstoff (DE-588)4065579-9 gnd rswk-swf Elektronenstrahlmikroanalyse (DE-588)4151898-6 s Werkstoff (DE-588)4065579-9 s DE-604 Raster-Transmissions-Elektronenmikroskopie (DE-588)4320991-9 s Rasterelektronenmikroskopie (DE-588)4048455-5 s Röntgenstrukturanalyse (DE-588)4137203-7 s 1\p DE-604 2\p DE-604 Goldstein, Joseph 1939-2015 Sonstige (DE-588)1023852381 oth HEBIS Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=004703864&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Scanning electron microscopy and x-ray microanalysis a text for biologists, materials scientists, and geologists Microanalyse aux rayons X Microanalyse par émission X ram Microscopes électroniques à balayage ram Microscopie électronique à balayage Microscopie électronique à balayage ram Electron Probe Microanalysis Microscopy, Electron, Scanning Scanning electron microscopy X-ray microanalysis Rasterelektronenmikroskopie (DE-588)4048455-5 gnd Raster-Transmissions-Elektronenmikroskopie (DE-588)4320991-9 gnd Elektronenstrahlmikroanalyse (DE-588)4151898-6 gnd Röntgenstrukturanalyse (DE-588)4137203-7 gnd Werkstoff (DE-588)4065579-9 gnd |
| subject_GND | (DE-588)4048455-5 (DE-588)4320991-9 (DE-588)4151898-6 (DE-588)4137203-7 (DE-588)4065579-9 |
| title | Scanning electron microscopy and x-ray microanalysis a text for biologists, materials scientists, and geologists |
| title_auth | Scanning electron microscopy and x-ray microanalysis a text for biologists, materials scientists, and geologists |
| title_exact_search | Scanning electron microscopy and x-ray microanalysis a text for biologists, materials scientists, and geologists |
| title_full | Scanning electron microscopy and x-ray microanalysis a text for biologists, materials scientists, and geologists Joseph I. Goldstein ... |
| title_fullStr | Scanning electron microscopy and x-ray microanalysis a text for biologists, materials scientists, and geologists Joseph I. Goldstein ... |
| title_full_unstemmed | Scanning electron microscopy and x-ray microanalysis a text for biologists, materials scientists, and geologists Joseph I. Goldstein ... |
| title_short | Scanning electron microscopy and x-ray microanalysis |
| title_sort | scanning electron microscopy and x ray microanalysis a text for biologists materials scientists and geologists |
| title_sub | a text for biologists, materials scientists, and geologists |
| topic | Microanalyse aux rayons X Microanalyse par émission X ram Microscopes électroniques à balayage ram Microscopie électronique à balayage Microscopie électronique à balayage ram Electron Probe Microanalysis Microscopy, Electron, Scanning Scanning electron microscopy X-ray microanalysis Rasterelektronenmikroskopie (DE-588)4048455-5 gnd Raster-Transmissions-Elektronenmikroskopie (DE-588)4320991-9 gnd Elektronenstrahlmikroanalyse (DE-588)4151898-6 gnd Röntgenstrukturanalyse (DE-588)4137203-7 gnd Werkstoff (DE-588)4065579-9 gnd |
| topic_facet | Microanalyse aux rayons X Microanalyse par émission X Microscopes électroniques à balayage Microscopie électronique à balayage Electron Probe Microanalysis Microscopy, Electron, Scanning Scanning electron microscopy X-ray microanalysis Rasterelektronenmikroskopie Raster-Transmissions-Elektronenmikroskopie Elektronenstrahlmikroanalyse Röntgenstrukturanalyse Werkstoff |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=004703864&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT goldsteinjoseph scanningelectronmicroscopyandxraymicroanalysisatextforbiologistsmaterialsscientistsandgeologists |