MBB: 453 Stress compensation techniques in thin layers applied to silicon micromachining
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Mikrofilm Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
München
1992
|
| Beschreibung: | 1 Mikrofiche |
Internformat
MARC
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Datensatz im Suchindex
| _version_ | 1804121136948051968 |
|---|---|
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| author_corporate | Messerschmitt-Bölkow-Blohm GmbH (Ottobrunn) |
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| author_sort | Messerschmitt-Bölkow-Blohm GmbH (Ottobrunn) |
| building | Verbundindex |
| bvnumber | BV006980920 |
| ctrlnum | (OCoLC)165481797 (DE-599)BVBBV006980920 |
| format | Microfilm Book |
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| id | DE-604.BV006980920 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T16:53:11Z |
| institution | BVB |
| institution_GND | (DE-588)2019542-4 |
| language | Undetermined |
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| physical | 1 Mikrofiche |
| publishDate | 1992 |
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| publishDateSort | 1992 |
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| spelling | Messerschmitt-Bölkow-Blohm GmbH (Ottobrunn) Verfasser (DE-588)2019542-4 aut MBB 453 Stress compensation techniques in thin layers applied to silicon micromachining G. Mück ... 1992 München 1 Mikrofiche h rdamedia he rdacarrier (DE-604)BV000033551 453 |
| spellingShingle | MBB |
| title | MBB |
| title_auth | MBB |
| title_exact_search | MBB |
| title_full | MBB 453 Stress compensation techniques in thin layers applied to silicon micromachining G. Mück ... |
| title_fullStr | MBB 453 Stress compensation techniques in thin layers applied to silicon micromachining G. Mück ... |
| title_full_unstemmed | MBB 453 Stress compensation techniques in thin layers applied to silicon micromachining G. Mück ... |
| title_short | MBB |
| title_sort | mbb stress compensation techniques in thin layers applied to silicon micromachining |
| volume_link | (DE-604)BV000033551 |
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