Surface science aspects of etching reactions:
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Amsterdam
North-Holland
1992
|
| Schriftenreihe: | Surface science reports
14,4/6 |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zs.-Bandes |
| Beschreibung: | S. 162 - 269 graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV006980779 | ||
| 003 | DE-604 | ||
| 005 | 19950710 | ||
| 007 | t | ||
| 008 | 930421s1992 d||| |||| 00||| eng d | ||
| 035 | |a (OCoLC)66832106 | ||
| 035 | |a (DE-599)BVBBV006980779 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-703 |a DE-29T | ||
| 100 | 1 | |a Winters, Harold F. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Surface science aspects of etching reactions |c Harold F. Winters and J. W. Coburn |
| 264 | 1 | |a Amsterdam |b North-Holland |c 1992 | |
| 300 | |a S. 162 - 269 |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Surface science reports |v 14,4/6 | |
| 500 | |a Einzelaufnahme eines Zs.-Bandes | ||
| 650 | 0 | 7 | |a Ätzen |0 (DE-588)4000648-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Oberflächenphysik |0 (DE-588)4134881-3 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Ätzen |0 (DE-588)4000648-7 |D s |
| 689 | 0 | 1 | |a Oberflächenphysik |0 (DE-588)4134881-3 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Coburn, J. W. |e Verfasser |4 aut | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-004415900 | ||
Datensatz im Suchindex
| _version_ | 1804121136725753856 |
|---|---|
| any_adam_object | |
| author | Winters, Harold F. Coburn, J. W. |
| author_facet | Winters, Harold F. Coburn, J. W. |
| author_role | aut aut |
| author_sort | Winters, Harold F. |
| author_variant | h f w hf hfw j w c jw jwc |
| building | Verbundindex |
| bvnumber | BV006980779 |
| ctrlnum | (OCoLC)66832106 (DE-599)BVBBV006980779 |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01099nam a2200337 cb4500</leader><controlfield tag="001">BV006980779</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">19950710 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">930421s1992 d||| |||| 00||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)66832106</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV006980779</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield><subfield code="a">DE-29T</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Winters, Harold F.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Surface science aspects of etching reactions</subfield><subfield code="c">Harold F. Winters and J. W. Coburn</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Amsterdam</subfield><subfield code="b">North-Holland</subfield><subfield code="c">1992</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">S. 162 - 269</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Surface science reports</subfield><subfield code="v">14,4/6</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Einzelaufnahme eines Zs.-Bandes</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ätzen</subfield><subfield code="0">(DE-588)4000648-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Oberflächenphysik</subfield><subfield code="0">(DE-588)4134881-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Ätzen</subfield><subfield code="0">(DE-588)4000648-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Oberflächenphysik</subfield><subfield code="0">(DE-588)4134881-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Coburn, J. W.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-004415900</subfield></datafield></record></collection> |
| id | DE-604.BV006980779 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:53:11Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-004415900 |
| oclc_num | 66832106 |
| open_access_boolean | |
| owner | DE-703 DE-29T |
| owner_facet | DE-703 DE-29T |
| physical | S. 162 - 269 graph. Darst. |
| publishDate | 1992 |
| publishDateSearch | 1992 |
| publishDateSort | 1992 |
| publisher | North-Holland |
| record_format | marc |
| series2 | Surface science reports |
| spelling | Winters, Harold F. Verfasser aut Surface science aspects of etching reactions Harold F. Winters and J. W. Coburn Amsterdam North-Holland 1992 S. 162 - 269 graph. Darst. txt rdacontent n rdamedia nc rdacarrier Surface science reports 14,4/6 Einzelaufnahme eines Zs.-Bandes Ätzen (DE-588)4000648-7 gnd rswk-swf Oberflächenphysik (DE-588)4134881-3 gnd rswk-swf Ätzen (DE-588)4000648-7 s Oberflächenphysik (DE-588)4134881-3 s DE-604 Coburn, J. W. Verfasser aut |
| spellingShingle | Winters, Harold F. Coburn, J. W. Surface science aspects of etching reactions Ätzen (DE-588)4000648-7 gnd Oberflächenphysik (DE-588)4134881-3 gnd |
| subject_GND | (DE-588)4000648-7 (DE-588)4134881-3 |
| title | Surface science aspects of etching reactions |
| title_auth | Surface science aspects of etching reactions |
| title_exact_search | Surface science aspects of etching reactions |
| title_full | Surface science aspects of etching reactions Harold F. Winters and J. W. Coburn |
| title_fullStr | Surface science aspects of etching reactions Harold F. Winters and J. W. Coburn |
| title_full_unstemmed | Surface science aspects of etching reactions Harold F. Winters and J. W. Coburn |
| title_short | Surface science aspects of etching reactions |
| title_sort | surface science aspects of etching reactions |
| topic | Ätzen (DE-588)4000648-7 gnd Oberflächenphysik (DE-588)4134881-3 gnd |
| topic_facet | Ätzen Oberflächenphysik |
| work_keys_str_mv | AT wintersharoldf surfacescienceaspectsofetchingreactions AT coburnjw surfacescienceaspectsofetchingreactions |