A fast ion beam pattern generator:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | Dutch English |
| Published: |
1988
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| Subjects: | |
| Item Description: | Delft, Techn. Univ., Diss., 1988 |
| Physical Description: | 176 S. Ill., graph. Darst. |
| ISBN: | 909002056X |
Staff View
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV006369424 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 930303s1988 ad|| m||| 00||| dutod | ||
| 020 | |a 909002056X |9 90-900-2056-X | ||
| 035 | |a (OCoLC)20155604 | ||
| 035 | |a (DE-599)BVBBV006369424 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a dut |a eng | |
| 049 | |a DE-91 |a DE-83 | ||
| 082 | 0 | |a 621.3815 |b SL36f, 1988 | |
| 084 | |a ELT 285d |2 stub | ||
| 100 | 1 | |a Slingerland, Hendrik N. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a A fast ion beam pattern generator |c door Hendrik Nicolaas Slingerland |
| 264 | 1 | |c 1988 | |
| 300 | |a 176 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Delft, Techn. Univ., Diss., 1988 | ||
| 650 | 7 | |a Focussering |2 gtt | |
| 650 | 7 | |a Ionenbundels |2 gtt | |
| 650 | 7 | |a Patroongeneratie |2 gtt | |
| 650 | 4 | |a Ion beam lithography | |
| 650 | 4 | |a Semiconductor wafers | |
| 650 | 0 | 7 | |a Ionenmikrostrahl |0 (DE-588)4236717-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Fotolithografie |g Halbleitertechnologie |0 (DE-588)4174516-4 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Fotolithografie |g Halbleitertechnologie |0 (DE-588)4174516-4 |D s |
| 689 | 0 | 1 | |a Ionenmikrostrahl |0 (DE-588)4236717-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 940 | 1 | |q TUB-nveb | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-004032433 | ||
Record in the Search Index
| _version_ | 1804120618156687360 |
|---|---|
| any_adam_object | |
| author | Slingerland, Hendrik N. |
| author_facet | Slingerland, Hendrik N. |
| author_role | aut |
| author_sort | Slingerland, Hendrik N. |
| author_variant | h n s hn hns |
| building | Verbundindex |
| bvnumber | BV006369424 |
| classification_tum | ELT 285d |
| ctrlnum | (OCoLC)20155604 (DE-599)BVBBV006369424 |
| dewey-full | 621.3815 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815 |
| dewey-search | 621.3815 |
| dewey-sort | 3621.3815 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01420nam a2200433 c 4500</leader><controlfield tag="001">BV006369424</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">930303s1988 ad|| m||| 00||| dutod</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">909002056X</subfield><subfield code="9">90-900-2056-X</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)20155604</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV006369424</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">dut</subfield><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815</subfield><subfield code="b">SL36f, 1988</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 285d</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Slingerland, Hendrik N.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">A fast ion beam pattern generator</subfield><subfield code="c">door Hendrik Nicolaas Slingerland</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1988</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">176 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Delft, Techn. Univ., Diss., 1988</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Focussering</subfield><subfield code="2">gtt</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Ionenbundels</subfield><subfield code="2">gtt</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Patroongeneratie</subfield><subfield code="2">gtt</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Ion beam lithography</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductor wafers</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ionenmikrostrahl</subfield><subfield code="0">(DE-588)4236717-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Fotolithografie</subfield><subfield code="g">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4174516-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Fotolithografie</subfield><subfield code="g">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4174516-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Ionenmikrostrahl</subfield><subfield code="0">(DE-588)4236717-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">TUB-nveb</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-004032433</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV006369424 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:44:57Z |
| institution | BVB |
| isbn | 909002056X |
| language | Dutch English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-004032433 |
| oclc_num | 20155604 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-83 |
| owner_facet | DE-91 DE-BY-TUM DE-83 |
| physical | 176 S. Ill., graph. Darst. |
| psigel | TUB-nveb |
| publishDate | 1988 |
| publishDateSearch | 1988 |
| publishDateSort | 1988 |
| record_format | marc |
| spelling | Slingerland, Hendrik N. Verfasser aut A fast ion beam pattern generator door Hendrik Nicolaas Slingerland 1988 176 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Delft, Techn. Univ., Diss., 1988 Focussering gtt Ionenbundels gtt Patroongeneratie gtt Ion beam lithography Semiconductor wafers Ionenmikrostrahl (DE-588)4236717-7 gnd rswk-swf Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s Ionenmikrostrahl (DE-588)4236717-7 s DE-604 |
| spellingShingle | Slingerland, Hendrik N. A fast ion beam pattern generator Focussering gtt Ionenbundels gtt Patroongeneratie gtt Ion beam lithography Semiconductor wafers Ionenmikrostrahl (DE-588)4236717-7 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| subject_GND | (DE-588)4236717-7 (DE-588)4174516-4 (DE-588)4113937-9 |
| title | A fast ion beam pattern generator |
| title_auth | A fast ion beam pattern generator |
| title_exact_search | A fast ion beam pattern generator |
| title_full | A fast ion beam pattern generator door Hendrik Nicolaas Slingerland |
| title_fullStr | A fast ion beam pattern generator door Hendrik Nicolaas Slingerland |
| title_full_unstemmed | A fast ion beam pattern generator door Hendrik Nicolaas Slingerland |
| title_short | A fast ion beam pattern generator |
| title_sort | a fast ion beam pattern generator |
| topic | Focussering gtt Ionenbundels gtt Patroongeneratie gtt Ion beam lithography Semiconductor wafers Ionenmikrostrahl (DE-588)4236717-7 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| topic_facet | Focussering Ionenbundels Patroongeneratie Ion beam lithography Semiconductor wafers Ionenmikrostrahl Fotolithografie Halbleitertechnologie Hochschulschrift |
| work_keys_str_mv | AT slingerlandhendrikn afastionbeampatterngenerator |