A fast ion beam pattern generator:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Dutch English |
| Veröffentlicht: |
1988
|
| Schlagworte: | |
| Beschreibung: | Delft, Techn. Univ., Diss., 1988 |
| Beschreibung: | 176 S. Ill., graph. Darst. |
| ISBN: | 909002056X |
Internformat
MARC
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| 035 | |a (OCoLC)20155604 | ||
| 035 | |a (DE-599)BVBBV006369424 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a dut |a eng | |
| 049 | |a DE-91 |a DE-83 | ||
| 082 | 0 | |a 621.3815 |b SL36f, 1988 | |
| 084 | |a ELT 285d |2 stub | ||
| 100 | 1 | |a Slingerland, Hendrik N. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a A fast ion beam pattern generator |c door Hendrik Nicolaas Slingerland |
| 264 | 1 | |c 1988 | |
| 300 | |a 176 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Delft, Techn. Univ., Diss., 1988 | ||
| 650 | 7 | |a Focussering |2 gtt | |
| 650 | 7 | |a Ionenbundels |2 gtt | |
| 650 | 7 | |a Patroongeneratie |2 gtt | |
| 650 | 4 | |a Ion beam lithography | |
| 650 | 4 | |a Semiconductor wafers | |
| 650 | 0 | 7 | |a Ionenmikrostrahl |0 (DE-588)4236717-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Fotolithografie |g Halbleitertechnologie |0 (DE-588)4174516-4 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
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| 689 | 0 | 1 | |a Ionenmikrostrahl |0 (DE-588)4236717-7 |D s |
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| 940 | 1 | |q TUB-nveb | |
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Datensatz im Suchindex
| _version_ | 1804120618156687360 |
|---|---|
| any_adam_object | |
| author | Slingerland, Hendrik N. |
| author_facet | Slingerland, Hendrik N. |
| author_role | aut |
| author_sort | Slingerland, Hendrik N. |
| author_variant | h n s hn hns |
| building | Verbundindex |
| bvnumber | BV006369424 |
| classification_tum | ELT 285d |
| ctrlnum | (OCoLC)20155604 (DE-599)BVBBV006369424 |
| dewey-full | 621.3815 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815 |
| dewey-search | 621.3815 |
| dewey-sort | 3621.3815 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV006369424 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:44:57Z |
| institution | BVB |
| isbn | 909002056X |
| language | Dutch English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-004032433 |
| oclc_num | 20155604 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-83 |
| owner_facet | DE-91 DE-BY-TUM DE-83 |
| physical | 176 S. Ill., graph. Darst. |
| psigel | TUB-nveb |
| publishDate | 1988 |
| publishDateSearch | 1988 |
| publishDateSort | 1988 |
| record_format | marc |
| spelling | Slingerland, Hendrik N. Verfasser aut A fast ion beam pattern generator door Hendrik Nicolaas Slingerland 1988 176 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Delft, Techn. Univ., Diss., 1988 Focussering gtt Ionenbundels gtt Patroongeneratie gtt Ion beam lithography Semiconductor wafers Ionenmikrostrahl (DE-588)4236717-7 gnd rswk-swf Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s Ionenmikrostrahl (DE-588)4236717-7 s DE-604 |
| spellingShingle | Slingerland, Hendrik N. A fast ion beam pattern generator Focussering gtt Ionenbundels gtt Patroongeneratie gtt Ion beam lithography Semiconductor wafers Ionenmikrostrahl (DE-588)4236717-7 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| subject_GND | (DE-588)4236717-7 (DE-588)4174516-4 (DE-588)4113937-9 |
| title | A fast ion beam pattern generator |
| title_auth | A fast ion beam pattern generator |
| title_exact_search | A fast ion beam pattern generator |
| title_full | A fast ion beam pattern generator door Hendrik Nicolaas Slingerland |
| title_fullStr | A fast ion beam pattern generator door Hendrik Nicolaas Slingerland |
| title_full_unstemmed | A fast ion beam pattern generator door Hendrik Nicolaas Slingerland |
| title_short | A fast ion beam pattern generator |
| title_sort | a fast ion beam pattern generator |
| topic | Focussering gtt Ionenbundels gtt Patroongeneratie gtt Ion beam lithography Semiconductor wafers Ionenmikrostrahl (DE-588)4236717-7 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| topic_facet | Focussering Ionenbundels Patroongeneratie Ion beam lithography Semiconductor wafers Ionenmikrostrahl Fotolithografie Halbleitertechnologie Hochschulschrift |
| work_keys_str_mv | AT slingerlandhendrikn afastionbeampatterngenerator |