Stress induced phenomena in metallization: first international workshop, Ithaca, NY 1991
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
New York
American Inst. of Physics
1992
|
| Schriftenreihe: | American Institute of Physics <New York, NY>: AIP conference proceedings
263 American Vacuum Society: American Vacuum Society series 13 |
| Schlagworte: | |
| Beschreibung: | VII, 280 S. Ill. |
| ISBN: | 1563960826 |
Internformat
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| 245 | 1 | 0 | |a Stress induced phenomena in metallization |b first international workshop, Ithaca, NY 1991 |c eds.: Che-Yu Li ... |
| 246 | 1 | 3 | |a Stress-induced phenomena in metallizazion |
| 264 | 1 | |a New York |b American Inst. of Physics |c 1992 | |
| 300 | |a VII, 280 S. |b Ill. | ||
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| 490 | 1 | |a American Institute of Physics <New York, NY>: AIP conference proceedings |v 263 | |
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| 650 | 4 | |a Contraintes (Mécanique) - Congrès | |
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| 650 | 4 | |a Métallisation - Congrès | |
| 650 | 4 | |a Métaux - Fracture - Congrès | |
| 650 | 4 | |a Aluminum films |x Defects |v Congresses | |
| 650 | 4 | |a Integrated circuits |x Very large scale integration |x Defects |v Congresses | |
| 650 | 4 | |a Metallic films |x Defects |v Congresses | |
| 650 | 4 | |a Metallizing |v Congresses | |
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| id | DE-604.BV006145694 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:41:02Z |
| institution | BVB |
| isbn | 1563960826 |
| language | English |
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| physical | VII, 280 S. Ill. |
| publishDate | 1992 |
| publishDateSearch | 1992 |
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| publisher | American Inst. of Physics |
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| series | American Institute of Physics <New York, NY>: AIP conference proceedings American Vacuum Society: American Vacuum Society series |
| series2 | American Institute of Physics <New York, NY>: AIP conference proceedings American Vacuum Society: American Vacuum Society series |
| spelling | Stress induced phenomena in metallization first international workshop, Ithaca, NY 1991 eds.: Che-Yu Li ... Stress-induced phenomena in metallizazion New York American Inst. of Physics 1992 VII, 280 S. Ill. txt rdacontent n rdamedia nc rdacarrier American Institute of Physics <New York, NY>: AIP conference proceedings 263 American Vacuum Society: American Vacuum Society series 13 Contraintes (Mécanique) - Congrès Couches minces métalliques - Fracture - Congrès Métallisation - Congrès Métaux - Fracture - Congrès Aluminum films Defects Congresses Integrated circuits Very large scale integration Defects Congresses Metallic films Defects Congresses Metallizing Congresses Semiconductors Defects Congresses Thin film devices Defects Congresses Metallisieren (DE-588)4169599-9 gnd rswk-swf Elektrische Spannung (DE-588)4056001-6 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1991 Ithaca NY gnd-content Metallisieren (DE-588)4169599-9 s Elektrische Spannung (DE-588)4056001-6 s DE-604 Li, Che-Yu Sonstige oth American Institute of Physics <New York, NY>: AIP conference proceedings 263 (DE-604)BV001899984 263 American Vacuum Society: American Vacuum Society series 13 (DE-604)BV001900403 13 |
| spellingShingle | Stress induced phenomena in metallization first international workshop, Ithaca, NY 1991 American Institute of Physics <New York, NY>: AIP conference proceedings American Vacuum Society: American Vacuum Society series Contraintes (Mécanique) - Congrès Couches minces métalliques - Fracture - Congrès Métallisation - Congrès Métaux - Fracture - Congrès Aluminum films Defects Congresses Integrated circuits Very large scale integration Defects Congresses Metallic films Defects Congresses Metallizing Congresses Semiconductors Defects Congresses Thin film devices Defects Congresses Metallisieren (DE-588)4169599-9 gnd Elektrische Spannung (DE-588)4056001-6 gnd |
| subject_GND | (DE-588)4169599-9 (DE-588)4056001-6 (DE-588)1071861417 |
| title | Stress induced phenomena in metallization first international workshop, Ithaca, NY 1991 |
| title_alt | Stress-induced phenomena in metallizazion |
| title_auth | Stress induced phenomena in metallization first international workshop, Ithaca, NY 1991 |
| title_exact_search | Stress induced phenomena in metallization first international workshop, Ithaca, NY 1991 |
| title_full | Stress induced phenomena in metallization first international workshop, Ithaca, NY 1991 eds.: Che-Yu Li ... |
| title_fullStr | Stress induced phenomena in metallization first international workshop, Ithaca, NY 1991 eds.: Che-Yu Li ... |
| title_full_unstemmed | Stress induced phenomena in metallization first international workshop, Ithaca, NY 1991 eds.: Che-Yu Li ... |
| title_short | Stress induced phenomena in metallization |
| title_sort | stress induced phenomena in metallization first international workshop ithaca ny 1991 |
| title_sub | first international workshop, Ithaca, NY 1991 |
| topic | Contraintes (Mécanique) - Congrès Couches minces métalliques - Fracture - Congrès Métallisation - Congrès Métaux - Fracture - Congrès Aluminum films Defects Congresses Integrated circuits Very large scale integration Defects Congresses Metallic films Defects Congresses Metallizing Congresses Semiconductors Defects Congresses Thin film devices Defects Congresses Metallisieren (DE-588)4169599-9 gnd Elektrische Spannung (DE-588)4056001-6 gnd |
| topic_facet | Contraintes (Mécanique) - Congrès Couches minces métalliques - Fracture - Congrès Métallisation - Congrès Métaux - Fracture - Congrès Aluminum films Defects Congresses Integrated circuits Very large scale integration Defects Congresses Metallic films Defects Congresses Metallizing Congresses Semiconductors Defects Congresses Thin film devices Defects Congresses Metallisieren Elektrische Spannung Konferenzschrift 1991 Ithaca NY |
| volume_link | (DE-604)BV001899984 (DE-604)BV001900403 |
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