Capture pumping technology: an introduction
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Oxford u. a.
Pergamon Press
1991
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| Ausgabe: | 1. ed. |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XIV, 359 S. graph. Darst. |
| ISBN: | 008040197X |
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| adam_text | CAPTURE PUMPING TECHNOLOGY AN INTRODUCTION KIMO M. WELCH BROOKHAVEN
NATIONAL LABORATORY, UPTON, NY, USA PERGAMON OXFORD * NEW YORK * PRESS
SEOUL * TOKYO TABLE OF CONTENTS PREFACE XII ABOUT THE AUTHOR XIII
ACKNOWLEDGEMENTS XIV 1 BASIC THEORY 1 1.0 INTRODUCTION, PUMP
CLASSIFICATION 1 1.1 PUMP CAPACITY 1 1.2 UNDERSTANDING PUMP BEHAVIOR 1
1.3 THE IDEAL GAS ASSUMPTIONS 2 1.4 DEFINITIONS OF TEMPERATURE AND
PRESSURE 3 THE IDEAL GAS LAW, 3 1.5 COUNTING MOLECULES (OR ATOMS) 5 1.6
DENSITY, PRESSURE AND MOLECULAR VELOCITIES 6 1.7 VAPOR PRESSURE 8
SURFACE PUMPING, 10 PUMPING ON A LIQUID CRYOGEN, 11 1.8 MEAN FREE PATH
14 1.9 THERMAL CONDUCTIVITY OF GASES 16 GAS FLUX INCIDENT ON A SURFACE,
17 1.10 PUMPING SPEED, A CONVENIENT ABSTRACTION 19 1.11 THROUGHPUT 21
1.12 CONDUCTANCE, ANOTHER CONVENIENT ABSTRACTION 22 1.12.1 CONDUCTANCE
MODEL APPLICATIONS, 24 SPECIES AND TEMPERATURE DEPENDENCE, 24 PRESSURE
DEPENDENCE OF CONDUCTANCE, 25 SYSTEM GEOMETRY DEPENDENCE FOR MOLECULAR
FLOW, 26 MOLECULAR CONDUCTANCE FOR DIFFERENT GASES, 27 1.13 VOLTAGE,
CURRENT AND IMPEDANCE ANALOGIES 28 1.14 DALTON S LAW AND LINEAR
SUPERPOSITION 31 1.15 SELECTIVE AND VARIABLE PUMPING SPEED 35 1.16
MEASURING PUMP SPEED 36 1.16.1 RATE OF PUMPDOWN, 37 1.16.2 SINGLE GAUGE
DOME METHOD, 40 1.16.3 THREE GAUGE METHOD, 41 VI I TABLE OF CONTENTS
1.16.4 FISCHER-MOMMSEN DOME, 43 THREE GAUGE VERSUS FISCHER-MOMMSEN
RESULTS, 45 1.17 SYSTEM DIAGNOSTICS WITH ANY PUMP 45 MEASURING
THROUGHPUT BY RATE-OF-PRESSURE-RISE, 47 1.18 ELECTRICAL DISCHARGES IN
GASES 48 IONIZING GASES, 50 HIGH PRESSURE ELECTRICAL DISCHARGES, 50 LOW
PRESSURE IONIZATION PROCESSES, 55 IONIZATION GAUGE SENSITIVITIES, 57
PROBLEM SET 59 REFERENCES 61 2 SPUTTER-ION PUMPING 65 2.0 INTRODUCTION
65 2.1 THE PENNING CELL 66 2.2 I + IP CHARACTERISTICS IN PENNING CELLS
69 QUALITATIVE PUMP IIP CHARACTERISTICS, 73 2.3 PUMPING SPEED
ABSTRACTION 77 2.4 THE MAKING OF SPUTTER-ION PUMPS 78 2.4.1 PUMPING
MECHANISMS AND MATERIALS 78 SPUTTERING AND SPUTTER-YIELD, 78
PHYSISORPTION AND BINDING ENERGIES 81 CHEMISORPTION, 84 2.4.2 DIODE
PUMPS 88 THE NEED FOR CLEAN PUMPING , 88 2.4.3 NOBLE GAS INSTABILITIES
91 SLAC PUMP INSTABILITY PROBLEM, 93 DIODES WITH SLOTTED CATHODES, 95
2.4.4 THE TRIODE PUMP 96 MAGNETIC FIELDS IN DIODE AND TRIODE PUMPS, 99
FIELD EMISSION IN TRIODE PUMPS, 100 2.4.5 THE DIFFERENTIAL SPUTTERING
PUMP 101 THE HIGH ENERGY NEUTRAL THEORY, 102 BEWARE OF SHORTCUTS, 106
2.5 HYDROGEN PUMPING 106 2.5.1 HYDROGEN PUMPING IN DIODE PUMPS 109
DIFFUSION IN THE CATHODES, 115 TITANIUM CATHODE MATERIAL, A MODEL, 119
TI-6A4 -4V CATHODE MATERIAL, 122 BETA-STABILIZED CATHODE MATERIALS, 123
2.6 TRIODE PUMPING 125 VIM TABLE OF CONTENTS 2.7 TRANSIENT SPEED EFFECTS
130 2.8 PUMPING GAS MIXTURES 131 2.9 HIGH PRESSURE OPERATION 134
ADVANTAGES IN LOW PRESSURE OPERATION, 138 2.10 PUMPING ELEMENTS LOCATED
IN ANTECHAMBERS OR POCKETS 138 DISTRIBUTED SPUTTER-ION PUMPS (DIPS), 141
2.11 PUMP POWER SUPPLIES 143 2.12 MAGNET DESIGNS 144 2.13 MORE ON THE
NATURE OF PENNING DISCHARGES 148 2.13.1 SPACE CHARGE DISTRIBUTION IN
PENNING CELLS 148 DISCHARGE MODES, 149 THE STARK EFFECT, 150 FREQUENCY
SHIFT IN RF CAVITY, 150 ION SPUTTERING PATTERNS, 151 ION CURRENTS AND
RETARDING POTENTIAL PROBES, 153 ELECTRON BEAM PROBES, 154 SMOOTH-BORE,
MAGNETRON MODEL, 154 2.13.2 MORE ON SPUTTERING PATTERNS ON PUMP CATHODES
155 NOISE IN SPUTTER-ION PUMPS, 156 2.13.3 STRIKING CHARACTERISTICS 157
2.13.4 USE OF VERY HIGH MAGNETIC FIELDS 158 2.14 OTHER CONSIDERATIONS
159 MAINTENANCE AND TROUBLE SHOOTING, 159 2.15 A SUMMARY OF ADVANTAGES
AND DISADVANTAGES 161 APPENDIX 2A - ELECTROSTATIC GETTER-ION PUMPS 164
PROBLEM SET 166 REFERENCES 168 3 TITANIUM SUBLIMATION PUMPING 185 3.0
INTRODUCTION 185 3.1 STICKING COEFFICIENTS 186 3.2 PUMP SPEED VS.
STICKING COEFFICIENT, A 191 TITANIUM AND CONDUCTANCE LIMITED OPERATION,
194 DEPENDENCY OF A ON GAS, FILM THICKNESS AND TEMP., 196 3.3 SYNTHESIS,
DISPLACEMENT AND DISSOCIATION OF GASES 201 3.4 SUBLIMATION SOURCES 203
FILAMENTARY SOURCES, 203 CONSTANT CURRENT OPERATION, 205 CONSTANT
VOLTAGE OPERATION, 208 RADIANTLY HEATED SOURCES, 210 E-GUN SOURCES, 213
IX TABLE OF CONTENTS 3.5 COMBINATION PUMPING 215 PEELING OF TITANIUM
FILMS, 216 3.6 ADVANTAGES AND DISADVANTAGES OF TSP PUMPING 217 PROBLEM
SET 218 REFERENCES 220 4 NONEVAPORABLE GETTERS (NEG) 225 4.0
INTRODUCTION 225 4.1 MECHANICAL FEATURES 226 4.2 NEG PUMPING MECHANISMS
229 THE PUMPING OF CO, CO 2, N2,0 2,229 HYDROGEN PUMPING, 232 THE
PUMPING OF HYDROCARBONS, 237 PUMPING SPEEDS FOR GASES AND GAS MIXTURES,
238 4.3 ADVANTAGES AND DISADVANTAGES OF NEGS 244 PROBLEM SET 246
REFERENCES 248 5 CRYOPUMPING 251 5.0 INTRODUCTION 251 5.1
CRYOCONDENSATION VS. CRYOSORPTION 252 5.1.1 CRYOCONDENSATION PUMPING 253
5.1.2 THE CLAUSIUS-CLAPEYRON EQUATION 255 CONDENSATION AT HIGHER
PRESSURES, 256 5.1.3 THERMAL TRANSPIRATION 258 5.1.4 ADSORPTION
ISOTHERMS 262 CLASSIFICATIONS OF ADSORPTION ISOTHERMS, 266 5.1.5 SPEED
AND CAPACITY OF CRYOPUMPS 271 5.1.6 CRYOTRAPPING 273 5.1.7 SIEVE
MATERIALS 275 PLUGGING OF SIEVE MATERIALS, 278 SURFACE BONDING OF SIEVE
MATERIALS, 281 5.2 SORPTION ROUGHING PUMPS 282 5.2.1 STAGING OF SORPTION
PUMPS 286 EFFECTS OF NEON WHEN ROUGH PUMPING, 290 5.2.2 DEWARS AND
BAKEOUT REGENERATION HEATERS 292 5.2.3 SAFETY CONSIDERATIONS 293 5.3
LIQUID HELIUM CRYOPUMPS 295 5.3.1 CLASSIFICATION OF LHE CRYOPUMPS 295
5.3.2 CHEVRON DESIGN 300 X TABLE OF CONTENTS 5.4 CLOSED-LOOP, GASEOUS
HELIUM CRYOPUMPS 303 CHEVRON DESIGN, 304 STICKING COEFFICIENTS, 308
THERMAL LOADING OF CRYOPUMPS, 308 SPUTTERING APPLICATIONS, 311 CRYOPUMP
APPLICATIONS, 314 SYSTEM CONFIGURATION, 315 REGENERATION OF CRYOPUMPS,
317 5.5 CLOSED-LOOP, GASEOUS HELIUM REFRIGERATORS 320 SOME OF THE
HISTORY, 320 THE GM-CYCLE REFRIGERATOR, 323 THE EXPANDER, 323 THE
COMPRESSOR, 326 REFRIGERATOR CAPACITY, 329 PROBLEM SET 330 REFERENCES
333 SUBJECT INDEX 343 AUTHOR INDEX 351 XI
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| isbn | 008040197X |
| language | English |
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| spelling | Welch, Kimo M. Verfasser aut Capture pumping technology an introduction Kimo M. Welch 1. ed. Oxford u. a. Pergamon Press 1991 XIV, 359 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Pompen gtt Pumping machinery Getterpumpe (DE-588)4285928-1 gnd rswk-swf Kryopumpe (DE-588)4165828-0 gnd rswk-swf Vakuumpumpe (DE-588)4127061-7 gnd rswk-swf Vakuumpumpe (DE-588)4127061-7 s DE-604 Getterpumpe (DE-588)4285928-1 s Kryopumpe (DE-588)4165828-0 s GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=003845788&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Welch, Kimo M. Capture pumping technology an introduction Pompen gtt Pumping machinery Getterpumpe (DE-588)4285928-1 gnd Kryopumpe (DE-588)4165828-0 gnd Vakuumpumpe (DE-588)4127061-7 gnd |
| subject_GND | (DE-588)4285928-1 (DE-588)4165828-0 (DE-588)4127061-7 |
| title | Capture pumping technology an introduction |
| title_auth | Capture pumping technology an introduction |
| title_exact_search | Capture pumping technology an introduction |
| title_full | Capture pumping technology an introduction Kimo M. Welch |
| title_fullStr | Capture pumping technology an introduction Kimo M. Welch |
| title_full_unstemmed | Capture pumping technology an introduction Kimo M. Welch |
| title_short | Capture pumping technology |
| title_sort | capture pumping technology an introduction |
| title_sub | an introduction |
| topic | Pompen gtt Pumping machinery Getterpumpe (DE-588)4285928-1 gnd Kryopumpe (DE-588)4165828-0 gnd Vakuumpumpe (DE-588)4127061-7 gnd |
| topic_facet | Pompen Pumping machinery Getterpumpe Kryopumpe Vakuumpumpe |
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