Silicides for VLSI applications:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Orlando u.a.
Acad. Press
1983
|
| Schlagworte: | |
| Beschreibung: | Literaturverz. S. 177 - 186 |
| Beschreibung: | XI, 200 S. Ill., graph.Darst. |
| ISBN: | 0125112203 |
Internformat
MARC
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| 035 | |a (DE-599)BVBBV006009596 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | |a und | ||
| 049 | |a DE-91 |a DE-29T |a DE-384 |a DE-83 | ||
| 084 | |a UX 2350 |0 (DE-625)146952: |2 rvk | ||
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| 100 | 1 | |a Murarka, S. P. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Silicides for VLSI applications |c S. P. Murarka |
| 264 | 1 | |a Orlando u.a. |b Acad. Press |c 1983 | |
| 300 | |a XI, 200 S. |b Ill., graph.Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Literaturverz. S. 177 - 186 | ||
| 650 | 0 | 7 | |a Silicide |0 (DE-588)4268288-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a VLSI |0 (DE-588)4117388-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Siliciumverbindungen |0 (DE-588)4124194-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |2 gnd |9 rswk-swf |
| 655 | 7 | |a Silicium-Übergangsmetall-Verbindungen |2 gnd |9 rswk-swf | |
| 689 | 0 | 0 | |a Silicide |0 (DE-588)4268288-5 |D s |
| 689 | 0 | 1 | |a VLSI |0 (DE-588)4117388-0 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Silicium-Übergangsmetall-Verbindungen |A f |
| 689 | 1 | 1 | |a VLSI |0 (DE-588)4117388-0 |D s |
| 689 | 1 | |5 DE-604 | |
| 689 | 2 | 0 | |a Siliciumverbindungen |0 (DE-588)4124194-0 |D s |
| 689 | 2 | |8 1\p |5 DE-604 | |
| 689 | 3 | 0 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |D s |
| 689 | 3 | |8 2\p |5 DE-604 | |
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| 883 | 1 | |8 2\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
Datensatz im Suchindex
| _version_ | 1804120215359848448 |
|---|---|
| any_adam_object | |
| author | Murarka, S. P. |
| author_facet | Murarka, S. P. |
| author_role | aut |
| author_sort | Murarka, S. P. |
| author_variant | s p m sp spm |
| building | Verbundindex |
| bvnumber | BV006009596 |
| classification_rvk | UX 2350 ZN 4950 |
| classification_tum | ELT 355f |
| ctrlnum | (OCoLC)636483930 (DE-599)BVBBV006009596 |
| discipline | Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre | Silicium-Übergangsmetall-Verbindungen gnd |
| genre_facet | Silicium-Übergangsmetall-Verbindungen |
| id | DE-604.BV006009596 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:38:33Z |
| institution | BVB |
| isbn | 0125112203 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-003778099 |
| oclc_num | 636483930 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-29T DE-384 DE-83 |
| owner_facet | DE-91 DE-BY-TUM DE-29T DE-384 DE-83 |
| physical | XI, 200 S. Ill., graph.Darst. |
| psigel | TUB-nvmb |
| publishDate | 1983 |
| publishDateSearch | 1983 |
| publishDateSort | 1983 |
| publisher | Acad. Press |
| record_format | marc |
| spelling | Murarka, S. P. Verfasser aut Silicides for VLSI applications S. P. Murarka Orlando u.a. Acad. Press 1983 XI, 200 S. Ill., graph.Darst. txt rdacontent n rdamedia nc rdacarrier Literaturverz. S. 177 - 186 Silicide (DE-588)4268288-5 gnd rswk-swf VLSI (DE-588)4117388-0 gnd rswk-swf Siliciumverbindungen (DE-588)4124194-0 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Silicium-Übergangsmetall-Verbindungen gnd rswk-swf Silicide (DE-588)4268288-5 s VLSI (DE-588)4117388-0 s DE-604 Silicium-Übergangsmetall-Verbindungen f Siliciumverbindungen (DE-588)4124194-0 s 1\p DE-604 Halbleitertechnologie (DE-588)4158814-9 s 2\p DE-604 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Murarka, S. P. Silicides for VLSI applications Silicide (DE-588)4268288-5 gnd VLSI (DE-588)4117388-0 gnd Siliciumverbindungen (DE-588)4124194-0 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4268288-5 (DE-588)4117388-0 (DE-588)4124194-0 (DE-588)4158814-9 |
| title | Silicides for VLSI applications |
| title_auth | Silicides for VLSI applications |
| title_exact_search | Silicides for VLSI applications |
| title_full | Silicides for VLSI applications S. P. Murarka |
| title_fullStr | Silicides for VLSI applications S. P. Murarka |
| title_full_unstemmed | Silicides for VLSI applications S. P. Murarka |
| title_short | Silicides for VLSI applications |
| title_sort | silicides for vlsi applications |
| topic | Silicide (DE-588)4268288-5 gnd VLSI (DE-588)4117388-0 gnd Siliciumverbindungen (DE-588)4124194-0 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Silicide VLSI Siliciumverbindungen Halbleitertechnologie Silicium-Übergangsmetall-Verbindungen |
| work_keys_str_mv | AT murarkasp silicidesforvlsiapplications |