APA (7th ed.) Citation

International Semiconductor Manufacturing Science Symposium Burlingame, Calif. (1991). IEEE SEMI International Semiconductor Manufacturing Science Symposium: May 19 - 22, 1991, Burlingame, CA, USA. Inst. of Electrical and Electronics Engineers.

Chicago Style (17th ed.) Citation

International Semiconductor Manufacturing Science Symposium Burlingame, Calif. IEEE SEMI International Semiconductor Manufacturing Science Symposium: May 19 - 22, 1991, Burlingame, CA, USA. New York, NY: Inst. of Electrical and Electronics Engineers, 1991.

MLA (9th ed.) Citation

International Semiconductor Manufacturing Science Symposium Burlingame, Calif. IEEE SEMI International Semiconductor Manufacturing Science Symposium: May 19 - 22, 1991, Burlingame, CA, USA. Inst. of Electrical and Electronics Engineers, 1991.