Digest of papers 1988: July 4 - 6, 1988, Tokyo
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Tokyo
Japan Soc. of Applied Physics
1988
|
| Schlagworte: | |
| Beschreibung: | Literaturangaben |
| Beschreibung: | XII, 179 S. Ill., graph. Darst. |
| ISBN: | 4930813263 |
Internformat
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| genre | (DE-588)1071861417 Konferenzschrift 1988 Tokio gnd-content |
| genre_facet | Konferenzschrift 1988 Tokio |
| id | DE-604.BV005893929 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:36:26Z |
| institution | BVB |
| institution_GND | (DE-588)1400440-9 |
| isbn | 4930813263 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-003689827 |
| oclc_num | 23353017 |
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| owner | DE-91 DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM |
| physical | XII, 179 S. Ill., graph. Darst. |
| publishDate | 1988 |
| publishDateSearch | 1988 |
| publishDateSort | 1988 |
| publisher | Japan Soc. of Applied Physics |
| record_format | marc |
| spelling | MicroProcess Conference 1 1988 Tokio Verfasser (DE-588)1400440-9 aut Digest of papers 1988 July 4 - 6, 1988, Tokyo 1st MicroProcess Conference Tokyo Japan Soc. of Applied Physics 1988 XII, 179 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben Lithography, Electron beam Congresses Microelectronics Congresses Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1988 Tokio gnd-content Halbleitertechnologie (DE-588)4158814-9 s DE-604 |
| spellingShingle | Digest of papers 1988 July 4 - 6, 1988, Tokyo Lithography, Electron beam Congresses Microelectronics Congresses Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)1071861417 |
| title | Digest of papers 1988 July 4 - 6, 1988, Tokyo |
| title_auth | Digest of papers 1988 July 4 - 6, 1988, Tokyo |
| title_exact_search | Digest of papers 1988 July 4 - 6, 1988, Tokyo |
| title_full | Digest of papers 1988 July 4 - 6, 1988, Tokyo 1st MicroProcess Conference |
| title_fullStr | Digest of papers 1988 July 4 - 6, 1988, Tokyo 1st MicroProcess Conference |
| title_full_unstemmed | Digest of papers 1988 July 4 - 6, 1988, Tokyo 1st MicroProcess Conference |
| title_short | Digest of papers 1988 |
| title_sort | digest of papers 1988 july 4 6 1988 tokyo |
| title_sub | July 4 - 6, 1988, Tokyo |
| topic | Lithography, Electron beam Congresses Microelectronics Congresses Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Lithography, Electron beam Congresses Microelectronics Congresses Halbleitertechnologie Konferenzschrift 1988 Tokio |
| work_keys_str_mv | AT microprocessconferencetokio digestofpapers1988july461988tokyo |