Digest of papers 1989: July 2 - 5, 1989, Kobe, Japan
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Tokyo
Japan Soc. of Applied Physics
1989
|
| Schlagworte: | |
| Beschreibung: | Literaturangaben |
| Beschreibung: | XVII, 213 S. Ill., graph. Darst. |
| ISBN: | 493081331X |
Internformat
MARC
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| 245 | 1 | 0 | |a Digest of papers 1989 |b July 2 - 5, 1989, Kobe, Japan |c 2nd MicroProcess Conference |
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| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1989 |z Kobe |2 gnd-content | |
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Datensatz im Suchindex
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| author_corporate | MicroProcess Conference Kōbe |
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| author_facet | MicroProcess Conference Kōbe |
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| building | Verbundindex |
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| callnumber-first | T - Technology |
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| callnumber-search | TK7874 |
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| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4100 |
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| ctrlnum | (OCoLC)23353008 (DE-599)BVBBV005893798 |
| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1989 Kobe gnd-content |
| genre_facet | Konferenzschrift 1989 Kobe |
| id | DE-604.BV005893798 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:36:26Z |
| institution | BVB |
| institution_GND | (DE-588)5032853-0 |
| isbn | 493081331X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-003689723 |
| oclc_num | 23353008 |
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| owner | DE-91 DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM |
| physical | XVII, 213 S. Ill., graph. Darst. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | Japan Soc. of Applied Physics |
| record_format | marc |
| spelling | MicroProcess Conference 2 1989 Kōbe Verfasser (DE-588)5032853-0 aut Digest of papers 1989 July 2 - 5, 1989, Kobe, Japan 2nd MicroProcess Conference Tokyo Japan Soc. of Applied Physics 1989 XVII, 213 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben Lithography, Electron beam Congresses Microelectronics Congresses Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1989 Kobe gnd-content Halbleitertechnologie (DE-588)4158814-9 s DE-604 |
| spellingShingle | Digest of papers 1989 July 2 - 5, 1989, Kobe, Japan Lithography, Electron beam Congresses Microelectronics Congresses Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)1071861417 |
| title | Digest of papers 1989 July 2 - 5, 1989, Kobe, Japan |
| title_auth | Digest of papers 1989 July 2 - 5, 1989, Kobe, Japan |
| title_exact_search | Digest of papers 1989 July 2 - 5, 1989, Kobe, Japan |
| title_full | Digest of papers 1989 July 2 - 5, 1989, Kobe, Japan 2nd MicroProcess Conference |
| title_fullStr | Digest of papers 1989 July 2 - 5, 1989, Kobe, Japan 2nd MicroProcess Conference |
| title_full_unstemmed | Digest of papers 1989 July 2 - 5, 1989, Kobe, Japan 2nd MicroProcess Conference |
| title_short | Digest of papers 1989 |
| title_sort | digest of papers 1989 july 2 5 1989 kobe japan |
| title_sub | July 2 - 5, 1989, Kobe, Japan |
| topic | Lithography, Electron beam Congresses Microelectronics Congresses Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Lithography, Electron beam Congresses Microelectronics Congresses Halbleitertechnologie Konferenzschrift 1989 Kobe |
| work_keys_str_mv | AT microprocessconferencekobe digestofpapers1989july251989kobejapan |