On the throughput optimization of electron beam lithography systems:
Saved in:
| Main Author: | |
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| Format: | Book |
| Language: | Undetermined |
| Published: |
1991
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| Subjects: | |
| Item Description: | Delft, Techn. Univ., Diss., 1991 |
| Physical Description: | Getr. Zählung Ill., graph. Darst. |
Staff View
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV005848954 | ||
| 003 | DE-604 | ||
| 005 | 19960508 | ||
| 007 | t | ||
| 008 | 921117s1991 ad|| m||| 00||| undod | ||
| 035 | |a (OCoLC)256043658 | ||
| 035 | |a (DE-599)BVBBV005848954 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | |a und | ||
| 049 | |a DE-91 |a DE-83 | ||
| 084 | |a ELT 286d |2 stub | ||
| 100 | 1 | |a Mulder, Elvira H. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a On the throughput optimization of electron beam lithography systems |c door Elvira Hendrika Mulder |
| 264 | 1 | |c 1991 | |
| 300 | |a Getr. Zählung |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Delft, Techn. Univ., Diss., 1991 | ||
| 650 | 0 | 7 | |a Elektronenstrahllithografie |0 (DE-588)4151897-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Fertigungszeit |0 (DE-588)4154155-8 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Elektronenstrahllithografie |0 (DE-588)4151897-4 |D s |
| 689 | 0 | 1 | |a Fertigungszeit |0 (DE-588)4154155-8 |D s |
| 689 | 0 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-003662767 | ||
Record in the Search Index
| _version_ | 1804120039581810688 |
|---|---|
| any_adam_object | |
| author | Mulder, Elvira H. |
| author_facet | Mulder, Elvira H. |
| author_role | aut |
| author_sort | Mulder, Elvira H. |
| author_variant | e h m eh ehm |
| building | Verbundindex |
| bvnumber | BV005848954 |
| classification_tum | ELT 286d |
| ctrlnum | (OCoLC)256043658 (DE-599)BVBBV005848954 |
| discipline | Elektrotechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01132nam a2200337 c 4500</leader><controlfield tag="001">BV005848954</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">19960508 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">921117s1991 ad|| m||| 00||| undod</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)256043658</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV005848954</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">und</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 286d</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Mulder, Elvira H.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">On the throughput optimization of electron beam lithography systems</subfield><subfield code="c">door Elvira Hendrika Mulder</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1991</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">Getr. Zählung</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Delft, Techn. Univ., Diss., 1991</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Elektronenstrahllithografie</subfield><subfield code="0">(DE-588)4151897-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Fertigungszeit</subfield><subfield code="0">(DE-588)4154155-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Elektronenstrahllithografie</subfield><subfield code="0">(DE-588)4151897-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Fertigungszeit</subfield><subfield code="0">(DE-588)4154155-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-003662767</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV005848954 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:35:45Z |
| institution | BVB |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-003662767 |
| oclc_num | 256043658 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-83 |
| owner_facet | DE-91 DE-BY-TUM DE-83 |
| physical | Getr. Zählung Ill., graph. Darst. |
| publishDate | 1991 |
| publishDateSearch | 1991 |
| publishDateSort | 1991 |
| record_format | marc |
| spelling | Mulder, Elvira H. Verfasser aut On the throughput optimization of electron beam lithography systems door Elvira Hendrika Mulder 1991 Getr. Zählung Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Delft, Techn. Univ., Diss., 1991 Elektronenstrahllithografie (DE-588)4151897-4 gnd rswk-swf Fertigungszeit (DE-588)4154155-8 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Elektronenstrahllithografie (DE-588)4151897-4 s Fertigungszeit (DE-588)4154155-8 s DE-604 |
| spellingShingle | Mulder, Elvira H. On the throughput optimization of electron beam lithography systems Elektronenstrahllithografie (DE-588)4151897-4 gnd Fertigungszeit (DE-588)4154155-8 gnd |
| subject_GND | (DE-588)4151897-4 (DE-588)4154155-8 (DE-588)4113937-9 |
| title | On the throughput optimization of electron beam lithography systems |
| title_auth | On the throughput optimization of electron beam lithography systems |
| title_exact_search | On the throughput optimization of electron beam lithography systems |
| title_full | On the throughput optimization of electron beam lithography systems door Elvira Hendrika Mulder |
| title_fullStr | On the throughput optimization of electron beam lithography systems door Elvira Hendrika Mulder |
| title_full_unstemmed | On the throughput optimization of electron beam lithography systems door Elvira Hendrika Mulder |
| title_short | On the throughput optimization of electron beam lithography systems |
| title_sort | on the throughput optimization of electron beam lithography systems |
| topic | Elektronenstrahllithografie (DE-588)4151897-4 gnd Fertigungszeit (DE-588)4154155-8 gnd |
| topic_facet | Elektronenstrahllithografie Fertigungszeit Hochschulschrift |
| work_keys_str_mv | AT mulderelvirah onthethroughputoptimizationofelectronbeamlithographysystems |