On the throughput optimization of electron beam lithography systems:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
1991
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| Schlagworte: | |
| Beschreibung: | Delft, Techn. Univ., Diss., 1991 |
| Beschreibung: | Getr. Zählung Ill., graph. Darst. |
Internformat
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| 100 | 1 | |a Mulder, Elvira H. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a On the throughput optimization of electron beam lithography systems |c door Elvira Hendrika Mulder |
| 264 | 1 | |c 1991 | |
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| 336 | |b txt |2 rdacontent | ||
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| 500 | |a Delft, Techn. Univ., Diss., 1991 | ||
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Datensatz im Suchindex
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|---|---|
| any_adam_object | |
| author | Mulder, Elvira H. |
| author_facet | Mulder, Elvira H. |
| author_role | aut |
| author_sort | Mulder, Elvira H. |
| author_variant | e h m eh ehm |
| building | Verbundindex |
| bvnumber | BV005848954 |
| classification_tum | ELT 286d |
| ctrlnum | (OCoLC)256043658 (DE-599)BVBBV005848954 |
| discipline | Elektrotechnik |
| format | Book |
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| illustrated | Illustrated |
| indexdate | 2024-07-09T16:35:45Z |
| institution | BVB |
| language | Undetermined |
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| physical | Getr. Zählung Ill., graph. Darst. |
| publishDate | 1991 |
| publishDateSearch | 1991 |
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| spelling | Mulder, Elvira H. Verfasser aut On the throughput optimization of electron beam lithography systems door Elvira Hendrika Mulder 1991 Getr. Zählung Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Delft, Techn. Univ., Diss., 1991 Elektronenstrahllithografie (DE-588)4151897-4 gnd rswk-swf Fertigungszeit (DE-588)4154155-8 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Elektronenstrahllithografie (DE-588)4151897-4 s Fertigungszeit (DE-588)4154155-8 s DE-604 |
| spellingShingle | Mulder, Elvira H. On the throughput optimization of electron beam lithography systems Elektronenstrahllithografie (DE-588)4151897-4 gnd Fertigungszeit (DE-588)4154155-8 gnd |
| subject_GND | (DE-588)4151897-4 (DE-588)4154155-8 (DE-588)4113937-9 |
| title | On the throughput optimization of electron beam lithography systems |
| title_auth | On the throughput optimization of electron beam lithography systems |
| title_exact_search | On the throughput optimization of electron beam lithography systems |
| title_full | On the throughput optimization of electron beam lithography systems door Elvira Hendrika Mulder |
| title_fullStr | On the throughput optimization of electron beam lithography systems door Elvira Hendrika Mulder |
| title_full_unstemmed | On the throughput optimization of electron beam lithography systems door Elvira Hendrika Mulder |
| title_short | On the throughput optimization of electron beam lithography systems |
| title_sort | on the throughput optimization of electron beam lithography systems |
| topic | Elektronenstrahllithografie (DE-588)4151897-4 gnd Fertigungszeit (DE-588)4154155-8 gnd |
| topic_facet | Elektronenstrahllithografie Fertigungszeit Hochschulschrift |
| work_keys_str_mv | AT mulderelvirah onthethroughputoptimizationofelectronbeamlithographysystems |