Advanced processing of semiconductor devices: 23 - 25 March 1987, Bay Point, Florida
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Washington, USA
SPIE
1987
|
| Schriftenreihe: | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE
797 |
| Schlagworte: | |
| Beschreibung: | Literaturangaben |
| Beschreibung: | X, 366 S. Ill., graph. Darst. |
| ISBN: | 089252832X |
Internformat
MARC
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Datensatz im Suchindex
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| discipline | Elektrotechnik |
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| genre | (DE-588)1071861417 Konferenzschrift 23.03.1987-25.03.1987 Bay Point, Fla. gnd-content |
| genre_facet | Konferenzschrift 23.03.1987-25.03.1987 Bay Point, Fla. |
| id | DE-604.BV005770391 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:34:24Z |
| institution | BVB |
| isbn | 089252832X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-003605019 |
| oclc_num | 630902261 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-83 |
| owner_facet | DE-91 DE-BY-TUM DE-83 |
| physical | X, 366 S. Ill., graph. Darst. |
| publishDate | 1987 |
| publishDateSearch | 1987 |
| publishDateSort | 1987 |
| publisher | SPIE |
| record_format | marc |
| series | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |
| series2 | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |
| spelling | Advanced processing of semiconductor devices 23 - 25 March 1987, Bay Point, Florida Sayan D. Mukherjee, ed. Bellingham, Washington, USA SPIE 1987 X, 366 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE 797 Literaturangaben Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 23.03.1987-25.03.1987 Bay Point, Fla. gnd-content Halbleitertechnologie (DE-588)4158814-9 s DE-604 Mukherjee, Sayan D. Sonstige oth Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE 797 (DE-604)BV000010887 797 |
| spellingShingle | Advanced processing of semiconductor devices 23 - 25 March 1987, Bay Point, Florida Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)1071861417 |
| title | Advanced processing of semiconductor devices 23 - 25 March 1987, Bay Point, Florida |
| title_auth | Advanced processing of semiconductor devices 23 - 25 March 1987, Bay Point, Florida |
| title_exact_search | Advanced processing of semiconductor devices 23 - 25 March 1987, Bay Point, Florida |
| title_full | Advanced processing of semiconductor devices 23 - 25 March 1987, Bay Point, Florida Sayan D. Mukherjee, ed. |
| title_fullStr | Advanced processing of semiconductor devices 23 - 25 March 1987, Bay Point, Florida Sayan D. Mukherjee, ed. |
| title_full_unstemmed | Advanced processing of semiconductor devices 23 - 25 March 1987, Bay Point, Florida Sayan D. Mukherjee, ed. |
| title_short | Advanced processing of semiconductor devices |
| title_sort | advanced processing of semiconductor devices 23 25 march 1987 bay point florida |
| title_sub | 23 - 25 March 1987, Bay Point, Florida |
| topic | Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Halbleitertechnologie Konferenzschrift 23.03.1987-25.03.1987 Bay Point, Fla. |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT mukherjeesayand advancedprocessingofsemiconductordevices2325march1987baypointflorida |