Applications of diamond films and related materials: proceedings of the First International Conference on the Applications of Diamond Films and Related Materials - ADC '91, Auburn, Alabama, U.S.A., August 17 - 22, 1991
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1991
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245 | 1 | 0 | |a Applications of diamond films and related materials |b proceedings of the First International Conference on the Applications of Diamond Films and Related Materials - ADC '91, Auburn, Alabama, U.S.A., August 17 - 22, 1991 |c ed. by Y. Tzeng ... |
264 | 1 | |a Amsterdam u.a. |b Elsevier |c 1991 | |
300 | |a XXV, 874 S. |b Ill., graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
490 | 1 | |a Materials science monographs |v 73 | |
650 | 4 | |a Couches minces de diamant - Congrès | |
650 | 4 | |a Diamants artificiels - Congrès | |
650 | 4 | |a Diamond thin films |v Congresses | |
650 | 4 | |a Diamonds, Artificial |v Congresses | |
650 | 0 | 7 | |a Dünne Schicht |0 (DE-588)4136925-7 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Diamant |0 (DE-588)4012069-7 |2 gnd |9 rswk-swf |
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TABLE OF CONTENTS
FOREWORD
............................................
v
1.
INTRODUCTION
......................................... 1
Applications of Bulk and Thin-film Diamonds
Michael Seal
............................................. 3
Studies and Development of Diamond Films and Related
Materials in the USSR
Vladimir A. Laptev
........................................ 9
Diamond CVD Researches as Patent Applied
Šatoru Hosomi
and Isao Yoshida
.............................. 15
A Chemical Perspective on the Nucleation and Growth of
Diamond from Hydrocarbons
Walter A. Yarbrough
....................................... 25
2.
DIAMOND CUTTING TOOLS
.............................. 35
Tool Application of Diamond and CBN
S. Yazu and T. Nakai
....................................... 37
Troperties and Performance of Diamond Coated Ceramic Cutting Tools
S.
Söderberg, K.
Westergren,
I.
Reineck, P.-E. Ekholm,
and
H. Shahani
.............................................. 43
Cutting Tool Performance of CVD Thick Film Diamond
Rob A. Hay and CD. Dean
.................................. 53
Diamond Coated Inserts: Characteristics and Performance
Noribumi Kikuchi, Hiroyuki
Eto,
Toshihiko Okamura,
and Hironori Yoshimura
.................................... 61
The Tool Life of Diamond Coatings in Miffing on
ΑΙ
-Si
Alloy
K. Saijo, K.
Uno,
M.
Yagi,
К.
Shibuki, and S. Takatsu
.............. 69
Diamond Coated Cutting Tools Synthesized from CO
T.
Ito et al
............................................... 77
Characterization of CVD Diamond Grinding Powder
M. Yoshikawa
............................................ 85
XIV
Determination
of Thickness in Diamond Film Used for Brazed
Cutting Inserts
M. Murakawa and S. Takeuchi
................................ 93
Effect of Wear Flat Configurations on the Temperature
Distribution in Porycrystalline Diamond Compact Cutters
During Orthogonal Rock Cutting
V. Prakash
............................................... 99
Industrial Application and Quality Control of Crystalline
Diamond Coated Tools
T. Leyendecker,
O. Lemmer,
Α.
Jürgens, S.
Esser,
and
J.
Ebberink
.......................................... 105
3.
MECHANICAL PROPERTIES AND APPLICATIONS OF DIAMOND
111
Mechanical Properties of Diamond and Diamond-Like Films
Carl J. McHargue
........................................ 113
In-situ Measuring of Stress Development in Diamond Thin Films
L.
Schäfer,
X. Jiang, and C.-P. Klages
.......................... 121
The Preparation of Diamond-coated
α
-SíC
Pins for Standardized
SEM
Tribometry of Diamond-coated Substrates
Michael
N.
Gardos,
Bruce W.
Buller,
and J. Michael Pinneo
......... 129
An Investigation of Diamond Growth on Ferrous Metals
H. Chen, M.L. Nielsen, C.J. Gold, R.O. Dillon, J.
DiGregorio,
and
T. Furtak
........................................... 137
Adhesion of Metallic Films to Diamond and cBN in the
Region of its Thermodynamic Stability
A.V. Andreyev
........................................... 143
Residual Stress in CVD Diamond Films
H. Guo and M.
Alam
...................................... 149
4.
DIAMOND OPTICS
...................................... 155
Polycrystalline Diamond for Infrared Optical Applications
Prepared by the Microwave Plasma and Hot Filament Chemical
Vapor Deposition Techniques
С
Willingham, T.
Hartnett,
С.
Robinson, and C. Klein
............. 157
CVD Diamond Coatings for the Infrared by Optical Brazing
W.D. Partlow, R.E. Witkowski, and J.P. McHugh
................. 163
XV
High Density Amorphous Carbon Films and the Preparation
of Diamond Membranes for
Х
-Ray Lithography
Jerome J. Cuomo, J.P. Doyle, David L.
Pappas,
Katherine
L.
Saenger,
CR.
Guarnieri, and
SJ. Whitehair
............................ 169
Critical Assessment of Optical Properties of CVD Diamond
Films
A. Feldman and L.H. Robins
................................ 181
High Quality Flame Deposited Diamond Films for Infrared Optical
Windows
Y. Tzeng and R. Phillips
................................... 189
Potycrystalline Diamond
Füms
for Optical Applications
С
Wild, W. Muller-Sebert, T.
Eckermann,
and P. Koidl
............ 197
Transparent Diamond Film Deposited by Optimized DC Arc
Plasma Jet
Li Rongzhi, Shi Hailiang, Yan Zhen, Tang Sen, and Zhu Hesun
...... 207
Preparation and Characterization of Optically High Quality
Diamond Film
Qi Lichang,
Pu Xin,
Yang Peichun, Xuan Zhenwu, Liu Erkai,
and
Hou Li
............................................. 213
liquid Jet Impact Measurements in Diamond Coated Ge
Substrates
M. Thomas, D. Price, M. Wilson, I. Perez, J.B. Boodey, W.R. Scott,
R. Monro, and
A.B.
Harker
................................. 217
5.
POLISHING OF DIAMOND FILMS
......................... 221
Reactive Polishing of Polycrystalline Diamond and Measured
Spectroscopie
Properties
Alan B. Harker
.......................................... 223
Smoothing of Diamond Films by Ion Beam Irradiation
Atsushi Hirata, Hitoshi Tokura, and Masanori Yoshikawa
........... 227
Anti-Reflection/Anti-Oxidation Coatings and Polishing Results
for PECVD Diamond Optics
Mark B.
Moran,
Karl A. Klemm,
and Linda F. Johnson
............ 233
Polishing of CVD Diamond Film
H. Tokura and M. Yoshikawa
............................... 241
XVI
light-induced Polishing of Diamond Films
Vladimir
N.
Tokarev, Vitaly I. Konov
.......................... 249
6.
THERMAL MANAGEMENT
............................... 257
Application of Synthetic Diamond Substrates for Thermal
Management of High Performance Electronic
Multi-Chip Modules
R.C. Eden
.............................................. 259
Critical Properties of CVD Diamond Films for Heat Sink
and Thermal Radiator Applications
S. Holly
................................................ 267
Electronic Circuits on Diamond Substrates
Paul Lux and Kent Roberts
................................. 269
Thermal Conductivity Measurement Using the Converging
Thermal Wave Technique
Grant
Lu
............................................... 273
A Study of Diamond Laminated Surfaces in Evaporative
Spray Cooling
M.S. Sehmbey, M.R.
Pais,
and L.C. Chow
...................... 275
Thermal Conductivity and Optical Transmission of CVD
Diamond
K.J.
Gray
............................................... 283
7.
DIAMOND ELECTRONICS
................................ 285
Novel Electron Devices Based on the Unique Properties
of Diamond
M.N. Yoder
............................................. 287
Fabrication and Properties of Diamond Devices
Y. Nishibayashi, H. Shiomi, and
N.
Fujimori
..................... 295
A Review of the Electrical Characteristics of Metal Contacts
on Diamond
K. Das, V. Venkatesan, K. Miyata, D.L. Dreifus, and J.T. Glass
...... 301
Diamond Cold Cathodes
M.W. Geis,
N.N.
Efremow, J.D. Woodhouse, and M.D. McAleese
.... 309
xvii
Thin Film Diamond Microstracture Applications
T. Roppel, C. Ellis, R. Ramesham, D. Jaworske, M.E. Baginski,
and S.Y. Lee
............................................ 311
Applications of Diamond-like Carbon Films to Electronic
Components
H. Kurokawa, H. Nakaue, T. Mitani, and T. Yonezawa
............ 319
Ion Beams and Diamond: Modification, Doping, Growth
and Simple Devices
Johan
F. Prins
........................................... 327
Electrical and Electronic Properties of Diamond Films
R.E. Harper, C. Johnston, P. Chalker, D. Totterdell, I.M. Buckley-Golder,
and K. Kobashi
.......................................... 335
Temperature Dependent Photoconductivity Measurements on
Type Ha Diamonds and Poh/crystalline Diamond Films
L.S. Pan, D.R.
Kania,
P. Pianetta, O.L.
Landen,
and M. Landstrass
.... 341
A Thin Film Schottky Diode Fabricated from Flame
Grown Diamond
J.W. Glesener,
A.A.
Morrish, and K.A. Snail
.................... 347
Characterization of Titanium Suicide Contacts Deposited on
Semiconducting Diamond Substrates
T.P. Humphreys, Hyeongtag Jeon, J.V. LaBrasca, K.F. Turner,
RJ.
Nemanich,
К.
Das, and
J.B. Posthill ....................... 353
Interface
Reactions of
Titanimn
on Single Crystal and Thin Film
Diamond Analyzed by
UV Photoemission
Spectroscopy
J. VanderWeide and R.J.
Nemanich........................... 359
Diamond Films for Thermionic Applications
Richard L.C. Wu, Alan Garscadden, and Patrick Kee
.............. 365
CVD Diamond Coated Cylinders for Advanced Thermionic Fuel
Element
S.F. Adams and M.I. Landstrass
.............................. 371
8.
DIAMOND NUCLEATION AND SELECTIVE DEPOSITION
..... 377
Effect of Substrate Materials on CVD Diamond Growth
F. Akatsuka and F. Shimura
................................. 379
xviu
Influence of Substrate Topography on the Nucleation of Diamond
Thin Films
Paul A. Denning and David A. Stevenson
....................... 383
Metastable Surface Recrystaffization of Diamond from the liquid
Phase: Substrate Effects
Kuruvilla A. Cherian
...................................... 389
Enhancement of Diamond Nucleation by Graphite Fibers
Local to Substrate Surfaces in H2
-
CH4
rf
Discharges
R.A. Rudder, G.C. Hudson, R.C. Hendry, R.E. Thomas,
J.B. Posthill,
and R.J. Markunas
........................................ 395
Nucleation Behavior of Hot Filament CVD Diamond
Jeoung-Woo Kim, Young-Joon Baik, and Kwang Yong Eun
......... 399
Nucleation of Diamond onto Silicon by Low Pressure
Plasma-CVD
S. Haq, J.A. Savage, and D.L. Timnicliffe
....................... 405
Selective Growth, Characterization, and
Microstructure
Fabrication
of Undoped and Doped Polycrystalline Diamond Thin Films
R. Ramesham, C. Ellis, and T. Roppel
......................... 411
Laser-assisted Selective Area Deposition of Diamond Films
N.I. Chapliev, V.I, Konov, S.M. Pimenov, A.M. Prokhorov, and
A.A.
Smolin
............................................. 417
Electrophoretic Deposition of Colloidal Diamond for Selective
CVD Growth of Diamond Films
J.L.
Valdes,
J.W.
Mitchell, J.A.
Mucha, L.
Seibles, and H. Huggins
____ 423
9.
HIGH-RATE AND LARGE-AREA DIAMOND FILM PRODUCTION
429
Growth Process of Diamond Film by Arc Discharge Plasma
Jet CVD
N.
Ohtake, M. Yoshikawa, K. Suzuki, and S. Takeuchi
............. 431
Synthesis of Large-area Diamond Films by a Low Pressure DC
Plasma Jet
R.L. Woodin, L.K. Bigelow, and G.L. Cann
..................... 439
A New Class of CVD Diamond Composite Materials for Cost-Sensitive,
Large-area Applications
J. Michael Pinneo
........................................ 445
XIX
Upscaling of the Hot-filament CVD Process for Deposition of
Diamond Films on Large-area Substrates
L.
Schäfer,
M.
Sattler,
and C.-P. Klages
........................ 453
Formation of Functionally Gradient Diamond Films
Kazuaki Kurihara, Ken-ichi Sasaki, Motonobu Kawarada, and
Yasuyuki Goto
........................................... 461
10.
DIAMOND GROWTH
.................................... 467
Fabrication Process of Diamond Materials by HTHP Methods
O. Fukunaga
............................................ 469
Combustion Flame Diamond Coating Method (Hirose Method); from
its Birth to the Present
Yoich Hirose
............................................ 471
Selected Nucleation Epitaxy (SENTAXY) and State-of-the-Art and
Future Scope of Diamond Active Devices
Akio Hiraki
............................................. 473
The State-of-the-art in Studies of Diamond Synthesis from the
Gaseous Phase and Some Unsolved Problems
B.V. Spitsyn
............................................. 475
Effects of Multiple Filament Geometry in the Hot Filament
Deposition of Diamond Films
E.N. Farabaugh, A. Feldman, and L.H. Robins
................... 483
Growth Mechanisms of CVD Diamond Films Determined
by a Novel
ТЕМ
Technique
Z.L. Wang, J.
Bentley,
R.E. Clausing, L. Heatherly, and L.L.
Horton
. 489
Oeteroepitaxy of Carbon on Copper by High Temperature Ion
Implantation
S.-T. Lee, S. Chen, G.
Braunstein,
X. Feng, I.
Bello,
and W.M.
Lau ... 495
Diamond Film Deposition Using Microwave Plasmas under Low
Pressures
Y.H. Shing, F.S. Pool, and
D.H.
Rich
.......................... 497
The Growth of Diamond Film by Flat Flame Combustion Method
Franklin Chau-Nan Hong, Hon-Ming Chang, Jing-Chuang Hsieh,
Gou-Tsau Liang, and Dawson Chang
.......................... 503
XX
Heat Transfers
for Diamond Deposition Controlling
A. Gicquel,
С
Heau, E. Anger, D. Fabre, F. Cansell,
and J.P.
Petitet
.......................................... 509
The Influence of Surface Roughness and Grain Size on
ARC Jet Diamond Applications
P.D.
Goldman and A.G. Johnson
............................. 515
Growth Shape of Diamond in C-H-O System
Young-Joon Baik and Kwang Yong Eun
........................ 521
The Orientation of Diamond Crystal Face Synthesized by
the Combustion Flame Method
SJ.
Choi and Y.S. Shin
.................................... 527
Research of the Growth and Nucleation Mechanisms of Diamond
Films by Optical Emission Spectra and Raman Spectra
Fangqing Zhang, Yafei Zhang, Yinghu Yang, Wenjun Zhang,
Guanghua Chen, and Xiangliu Jiang
........................... 533
Synthesis of Diamond Films by Using Hot Filament CVD
with Acetone Hydrogen Mixture
Zheng Zhinao and Xiang Jinzhong
............................ 537
Influence of Gas Phase Parameters on the Deposition Kinetics
and Morphology of Thin Diamond Films
R.
Beckmann,
W.
KuHsch, H.J. Frenck, and R. Kassing
............ 543
Monitoring of Crystal Defects in Natural Diamond
Guo Qizhi and Bi Yongjun
.................................. 549
CVD Diamond Growth with Hot Filament Processes
Shu-Cheng Yu and Fon-Shu Guo
............................. 555
Diamond Deposition by Hot Filament and Microwave CVD: Influence
of Deposition Parameters on Phase Purity, Surface Roughness
and Film Quality
P. Joeris, C. Benndort, S. Bohr
............................... 561
11.
HALOGEN ASSISTED DIAMOND GROWTH
................. 567
Thermocbemkal Vapor Deposition of Diamond in a Carbon-
Halogen-Qxygen and/or Sulfur Atmospheric Hot Wall Reactor
D.E.
Patterson, C.J.
Chu,
BJ.
Bai,
N.J.
Komplin,
R.H. Hauge,
and J.L. Margrave
..............,......................... 569
xxi
The Growth of Diamond Film by Halogenated Methane
Franklin Chau-Nan Hong, Gou-Tsau Liang, Dawson Chang, and
Su-Jen Yu
.............................................. 577
Dense Nucleation of PolycrystaUine Diamond Films Using
CF4
-
H2 Low Pressure rf Discharges
R.A. Rudder, G.C. Hudson, D.P. Malta, J.B.
Posthill, R.E.
Thomas,
and R.J. Markunas
........................................ 583
12.
MODELING AND STANDARDS
............................ 589
Computer Modelling of a Hot Filament Diamond Deposition
Reactor
Maria A. Kuczmarski, Paul A. Washlock, and John C. Angus
........ 591
Model for the Hydrogen Atom Flux Developed in a Microwave
Plasma Jet Under Diamond Synthesis Conditions
Steven M. Gasworth
...................................... 597
Requirements of a Standard for the Chemical Characterization of
CVD Diamond by Raman Spectroscopy
E.S. Etz
................................................ 603
Diffusion Coefficient of Electrons in Diamond
M.A.
Osman, M.
Imam, and
N.
Nintunze
....................... 611
Monte-Carlo Simulation of Electron Properties in a Magnetized
Microwave Discharge
S.C. Kuo and E.E. Kunhardt
................................ 615
13.
ECONOMIC ANALYSIS OF DIAMOND TECHNOLOGY
........ 621
Economic Assessment of HPHT Diamond Synthesis Technology
J.V.
Busch, J.P.
Dismukes, N.V. Nallicheri, and
K.R. Walton
............................................ 623
Economic Assessment of CVD Diamond Synthesis Technologies
J.P. Dismukes, J.V.
Busch,
N.V. Nallicheri, and K.R. Walton
........ 635
14.
CUBIC BORON NITRIDE (cBN) TECHNOLOGY AND
APPLICATIONS
......................................... 645
Growth and Polar Properties of Cubic Boron Nitride
O. Mishima
............................................. 647
Characterizations of Pulsed Laser Deposited Boron Nitride Films
G.L. Doll, J.A. Sell, CA. Taylor II, and R. Clarke
................ 653
xxii
A Deposition Method of c-BN Film and Potential Applications
M. Murakawa and S. Watanabe
.............................. 661
A Tribological Study on Cubic Boron Nitride Film
S. Miyake, S. Watanabe, M. Murakawa, R. Kaneko, and T. Miyamoto
. 669
Wear Resistant Boron Nitride Base Coatings
G.A. Mrotchek and B.A. Eizner
.............................. 675
15.
PROTECTIVE COATINGS AND
TRIBOLOGICAL
APPLICATIONS
OF DIAMOND-LIKE CARBON (DLC) FILMS
................. 681
Applications of Diamond-Like Carbon in Computer Technology
A. Grill,
V. Patel,
and B.S. Meyerson
.......................... 683
Micro-tribological Properties and Applications of Super-hard and
Lubricating Coatings
S. Miyake and R. Kaneko
.................................. 691
Tribological Studies of Amorphous Hydrogenated Carbon Films
in a Vacuum, Spacelike Environment
Kazuhisa Miyoshi
......................................... 699
Application of DLC Films to Optical Windows and Tools
Alan H. Lettington
........................................ 703
Application of Glow-discharge Plasma Deposited Diamond Like
Film on Prosthetic Artificial Heart Valves
Chang-qiong Zheng, Jun-guo Ran, Guang-fu Yin,
Wenhua Lei, and Wen Lei
.................................. 711
16.
MECHANICAL PROPERTIES AND APPLICATIONS OF DLC FILMS
717
An Application of DLC
Fum
to Knife for Cutting Piled
Aluminum Thin Sheets
M. Murakawa,
N.
Koga,
S.
Watanabe, and S. Miyake
.............. 719
Application of DLC Film as Protective Coating of Metallic
Film Tape
Cao Weimin,
Zhou KunMn, Zhou Ruihua, Zhang Jiren, and
Zhang Pingyu
........................................... 725
Diamondlike Thin Films as Protective Layers
T.
Ivanova,
D.
Latev,
D.
Parvanova, and D.
Dimitrov
.............. 731
ххш
Plasma
Deposited Carbon Films as a Possible Means for Divertor
Repair
J.J.
Beulens, A.J.M.
Buuron, P.
Groot,
J.
Bakker,
and
D.C. Schram
.. . 737
Adhesion and Mechanical Properties of Amorphic Diamond Films
Prepared by a Laser Plasma Discharge Source
F. Davanloo, T.J. Lee, D.R. Jander, J.H. You, H. Park,
P.D.
Stevens,
and
C.B.
Collins
.......................................... 743
Mechanical Characterization of Laser Plasma Diamond Prepared
Without Hydrogen
A.M. Jones, C.J. Bedell, G. Dearnaley,
C.B.
Collins, and F. Davanloo
. . 749
17.
DLC AND SiC ELECTRONICS
............................. 755
MIS Photosensor with a Thin Diamond-like Carbon Film as the
Insulating Layer
P.I. Perov,
V.l.
Polyakov, O.N. Ermakova, M.G. Ermakov,
V.M.
Elinson, and V.V. Sleptsov
............................. 757
Characteristics of a Reversible Memory Elements using a
Diamond-like Carbon Film as the Storing Medium
M.G. Ermakov,
V.l.
Polyakov, O.N. Ermakova, P.I. Perov,
V.M.
Elinson, and V.V. Sleptsov
............................. 761
Electric and Photoelectric Characteristics of MQW Structures
Based on Diamond-like Carbon Films
V.l.
Polyakov, M.G. Ermakov, O.N. Ermakova, P.I. Perov,
V.V. Sleptsov, and
V.M.
Elinson
............................. 765
Silicon Carbide Devices for Active Electronics and Optoelectronics
V.A. Dmitriev,
P.A.
Ivanov,
Ya.V. Morozenko, V.E. Chelnokov,
and A.E. Cherenkov
...................................... 769
18.
DLC OPTICS
........................................... 775
Study of a-C:H Material as Protective Coating for CO2 Laser
Copper Mirrors
S.
Scaglione,
L.
Caneve, and G. Salvetti
........................ 777
Magnetron Sputtered DLC Coatings for KG Optics for High
Power Industrial CO2 Laser
F.X.
Lu,
B.X.
Yang, D.G. Chen, R.Z. Ye, W.X. Yu, and J.B. Sun
..... 783
Applications of Diamond-like Carbon Films to Optical Windows
Fangqing Zhang, Yafei Zhang, and Guanghua Chen
............... 791
XXIV
Antíreflectíon,
Hard Carbon Coatings for
IR
Optics
S. Mitura, A. Sokolowska, J. Szmidt, and A. Balasinski
............. 795
Laser Induced Graphitization of Diamond-like Carbon Films:
Applications to Optical Storage
V.Yu. Armeyev, A.H. Arslanbekov, N.I. Chapliev, V.I, Konov,
V.G. Ralchenko, and V.E. Strelnitsky
.......................... 799
Luminescence in Diamond-like Carbon Thin Films
D. Das-Gupta
........................................... 805
Optical Properties and Structure of an Annealed Hydrogenated
Amorphous Silicon-carbon Alloy Film
Deeppak Kumar
Basa
..................................... 811
19.
DLC DEPOSITION TECHNOLOGY
......................... 817
Preparation and Properties of Amorphous Carbon and
Hydrocarbon Films
F. Richter,
К.
Bewilogua,
H.
Kupfer,
I. Muhling,
В.
Rau,
В.
Rother,
and D. Schumacher
....................................... 819
Large Area Deposition of Diamond-like Carbon by Ion-beam
Decomposition of Polyphenyl Ether
C.J. Bedell, A.M. Jones, and G. Dearnaley
...................... 827
Diamond-like Carbon from the Ion-beam Decomposition of
Polyphenyl Ether
C.J. Bedell, A.M, Jones, G. Dearnaley, and
С
Johnston
............ 833
The a-C:H Films Deposited by PECVD Method
Yuliang He, Shulin Gu, Zhichao Wang, and Hong Liu
............. 839
Hard Carbon Coatings by the Pulsed Arc-Discharge Method
J. Koskinen, A. Anttila, and J.-P. Hirvonen
...................... 845
Plasma Deposition and Etching of
Diamond
-Шее
Carbon Films
J. Seth, R. Padiyath, and
S.V.
Babu
........................... 851
Laser Detonation DLC Films
Stephen L. Thaler
........................................ 857
Super-Hard Diamond-Like Carbon Prepared by New Ionized
Method
Osamu Nakamura
and Akio Hirayama
......................... 863
xxv
20.
AUTHOR INDEX
....................................... 865
21.
SUBJECT INDEX
........................................ 869
|
any_adam_object | 1 |
building | Verbundindex |
bvnumber | BV005720902 |
callnumber-first | T - Technology |
callnumber-label | TP873 |
callnumber-raw | TP873.5.D3 |
callnumber-search | TP873.5.D3 |
callnumber-sort | TP 3873.5 D3 |
callnumber-subject | TP - Chemical Technology |
classification_rvk | UQ 8220 |
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dewey-full | 666/.88 |
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dewey-raw | 666/.88 |
dewey-search | 666/.88 |
dewey-sort | 3666 288 |
dewey-tens | 660 - Chemical engineering |
discipline | Chemie / Pharmazie Physik Werkstoffwissenschaften |
format | Conference Proceeding Book |
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genre | (DE-588)1071861417 Konferenzschrift 1991 Auburn Ala. gnd-content |
genre_facet | Konferenzschrift 1991 Auburn Ala. |
id | DE-604.BV005720902 |
illustrated | Illustrated |
indexdate | 2024-07-09T16:33:37Z |
institution | BVB |
institution_GND | (DE-588)5065554-1 |
isbn | 0444891625 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-003573478 |
oclc_num | 24010082 |
open_access_boolean | |
owner | DE-384 DE-91 DE-BY-TUM DE-703 DE-83 |
owner_facet | DE-384 DE-91 DE-BY-TUM DE-703 DE-83 |
physical | XXV, 874 S. Ill., graph. Darst. |
publishDate | 1991 |
publishDateSearch | 1991 |
publishDateSort | 1991 |
publisher | Elsevier |
record_format | marc |
series | Materials science monographs |
series2 | Materials science monographs |
spelling | Applications of diamond films and related materials proceedings of the First International Conference on the Applications of Diamond Films and Related Materials - ADC '91, Auburn, Alabama, U.S.A., August 17 - 22, 1991 ed. by Y. Tzeng ... Amsterdam u.a. Elsevier 1991 XXV, 874 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials science monographs 73 Couches minces de diamant - Congrès Diamants artificiels - Congrès Diamond thin films Congresses Diamonds, Artificial Congresses Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Diamant (DE-588)4012069-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1991 Auburn Ala. gnd-content Diamant (DE-588)4012069-7 s Dünne Schicht (DE-588)4136925-7 s DE-604 Tzeng, Yonhua Sonstige oth International Conference on the Applications of Diamond Films and Related Materials 1 1991 Auburn, Ala. Sonstige (DE-588)5065554-1 oth Materials science monographs 73 (DE-604)BV000008462 73 Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=003573478&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
spellingShingle | Applications of diamond films and related materials proceedings of the First International Conference on the Applications of Diamond Films and Related Materials - ADC '91, Auburn, Alabama, U.S.A., August 17 - 22, 1991 Materials science monographs Couches minces de diamant - Congrès Diamants artificiels - Congrès Diamond thin films Congresses Diamonds, Artificial Congresses Dünne Schicht (DE-588)4136925-7 gnd Diamant (DE-588)4012069-7 gnd |
subject_GND | (DE-588)4136925-7 (DE-588)4012069-7 (DE-588)1071861417 |
title | Applications of diamond films and related materials proceedings of the First International Conference on the Applications of Diamond Films and Related Materials - ADC '91, Auburn, Alabama, U.S.A., August 17 - 22, 1991 |
title_auth | Applications of diamond films and related materials proceedings of the First International Conference on the Applications of Diamond Films and Related Materials - ADC '91, Auburn, Alabama, U.S.A., August 17 - 22, 1991 |
title_exact_search | Applications of diamond films and related materials proceedings of the First International Conference on the Applications of Diamond Films and Related Materials - ADC '91, Auburn, Alabama, U.S.A., August 17 - 22, 1991 |
title_full | Applications of diamond films and related materials proceedings of the First International Conference on the Applications of Diamond Films and Related Materials - ADC '91, Auburn, Alabama, U.S.A., August 17 - 22, 1991 ed. by Y. Tzeng ... |
title_fullStr | Applications of diamond films and related materials proceedings of the First International Conference on the Applications of Diamond Films and Related Materials - ADC '91, Auburn, Alabama, U.S.A., August 17 - 22, 1991 ed. by Y. Tzeng ... |
title_full_unstemmed | Applications of diamond films and related materials proceedings of the First International Conference on the Applications of Diamond Films and Related Materials - ADC '91, Auburn, Alabama, U.S.A., August 17 - 22, 1991 ed. by Y. Tzeng ... |
title_short | Applications of diamond films and related materials |
title_sort | applications of diamond films and related materials proceedings of the first international conference on the applications of diamond films and related materials adc 91 auburn alabama u s a august 17 22 1991 |
title_sub | proceedings of the First International Conference on the Applications of Diamond Films and Related Materials - ADC '91, Auburn, Alabama, U.S.A., August 17 - 22, 1991 |
topic | Couches minces de diamant - Congrès Diamants artificiels - Congrès Diamond thin films Congresses Diamonds, Artificial Congresses Dünne Schicht (DE-588)4136925-7 gnd Diamant (DE-588)4012069-7 gnd |
topic_facet | Couches minces de diamant - Congrès Diamants artificiels - Congrès Diamond thin films Congresses Diamonds, Artificial Congresses Dünne Schicht Diamant Konferenzschrift 1991 Auburn Ala. |
url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=003573478&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
volume_link | (DE-604)BV000008462 |
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