Amorphous Mo/Si Multilayers: interdiffusion and structural relaxation ; crystallization
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
1992
|
| Schlagworte: | |
| Beschreibung: | Delft, Techn. Univ., Diss., 1992 |
| Beschreibung: | 113 S. graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV005567687 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 920929s1992 d||| m||| 00||| undod | ||
| 035 | |a (OCoLC)256209498 | ||
| 035 | |a (DE-599)BVBBV005567687 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | |a und | ||
| 049 | |a DE-91 |a DE-83 | ||
| 084 | |a PHY 659d |2 stub | ||
| 100 | 1 | |a Loopstra, Onno B. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Amorphous Mo/Si Multilayers |b interdiffusion and structural relaxation ; crystallization |c door Onno Bram Loopstra |
| 264 | 1 | |c 1992 | |
| 300 | |a 113 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Delft, Techn. Univ., Diss., 1992 | ||
| 650 | 0 | 7 | |a Amorpher Zustand |0 (DE-588)4306087-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Molybdän |0 (DE-588)4170407-1 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Relaxation |0 (DE-588)4049365-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Tempern |0 (DE-588)4184700-3 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 655 | 7 | |a Vielschichtsystem |2 gnd |9 rswk-swf | |
| 689 | 0 | 0 | |a Molybdän |0 (DE-588)4170407-1 |D s |
| 689 | 0 | 1 | |a Silicium |0 (DE-588)4077445-4 |D s |
| 689 | 0 | 2 | |a Amorpher Zustand |0 (DE-588)4306087-0 |D s |
| 689 | 0 | 3 | |a Vielschichtsystem |A f |
| 689 | 0 | 4 | |a Tempern |0 (DE-588)4184700-3 |D s |
| 689 | 0 | 5 | |a Relaxation |0 (DE-588)4049365-9 |D s |
| 689 | 0 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-003488753 | ||
Datensatz im Suchindex
| _version_ | 1804119781893210112 |
|---|---|
| any_adam_object | |
| author | Loopstra, Onno B. |
| author_facet | Loopstra, Onno B. |
| author_role | aut |
| author_sort | Loopstra, Onno B. |
| author_variant | o b l ob obl |
| building | Verbundindex |
| bvnumber | BV005567687 |
| classification_tum | PHY 659d |
| ctrlnum | (OCoLC)256209498 (DE-599)BVBBV005567687 |
| discipline | Physik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01508nam a2200433 c 4500</leader><controlfield tag="001">BV005567687</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">920929s1992 d||| m||| 00||| undod</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)256209498</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV005567687</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">und</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">PHY 659d</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Loopstra, Onno B.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Amorphous Mo/Si Multilayers</subfield><subfield code="b">interdiffusion and structural relaxation ; crystallization</subfield><subfield code="c">door Onno Bram Loopstra</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1992</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">113 S.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Delft, Techn. Univ., Diss., 1992</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Amorpher Zustand</subfield><subfield code="0">(DE-588)4306087-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Molybdän</subfield><subfield code="0">(DE-588)4170407-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Relaxation</subfield><subfield code="0">(DE-588)4049365-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Tempern</subfield><subfield code="0">(DE-588)4184700-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="a">Vielschichtsystem</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Molybdän</subfield><subfield code="0">(DE-588)4170407-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Amorpher Zustand</subfield><subfield code="0">(DE-588)4306087-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">Vielschichtsystem</subfield><subfield code="A">f</subfield></datafield><datafield tag="689" ind1="0" ind2="4"><subfield code="a">Tempern</subfield><subfield code="0">(DE-588)4184700-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="5"><subfield code="a">Relaxation</subfield><subfield code="0">(DE-588)4049365-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-003488753</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content Vielschichtsystem gnd |
| genre_facet | Hochschulschrift Vielschichtsystem |
| id | DE-604.BV005567687 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:31:39Z |
| institution | BVB |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-003488753 |
| oclc_num | 256209498 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-83 |
| owner_facet | DE-91 DE-BY-TUM DE-83 |
| physical | 113 S. graph. Darst. |
| publishDate | 1992 |
| publishDateSearch | 1992 |
| publishDateSort | 1992 |
| record_format | marc |
| spelling | Loopstra, Onno B. Verfasser aut Amorphous Mo/Si Multilayers interdiffusion and structural relaxation ; crystallization door Onno Bram Loopstra 1992 113 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Delft, Techn. Univ., Diss., 1992 Amorpher Zustand (DE-588)4306087-0 gnd rswk-swf Molybdän (DE-588)4170407-1 gnd rswk-swf Relaxation (DE-588)4049365-9 gnd rswk-swf Tempern (DE-588)4184700-3 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Vielschichtsystem gnd rswk-swf Molybdän (DE-588)4170407-1 s Silicium (DE-588)4077445-4 s Amorpher Zustand (DE-588)4306087-0 s Vielschichtsystem f Tempern (DE-588)4184700-3 s Relaxation (DE-588)4049365-9 s DE-604 |
| spellingShingle | Loopstra, Onno B. Amorphous Mo/Si Multilayers interdiffusion and structural relaxation ; crystallization Amorpher Zustand (DE-588)4306087-0 gnd Molybdän (DE-588)4170407-1 gnd Relaxation (DE-588)4049365-9 gnd Tempern (DE-588)4184700-3 gnd Silicium (DE-588)4077445-4 gnd |
| subject_GND | (DE-588)4306087-0 (DE-588)4170407-1 (DE-588)4049365-9 (DE-588)4184700-3 (DE-588)4077445-4 (DE-588)4113937-9 |
| title | Amorphous Mo/Si Multilayers interdiffusion and structural relaxation ; crystallization |
| title_auth | Amorphous Mo/Si Multilayers interdiffusion and structural relaxation ; crystallization |
| title_exact_search | Amorphous Mo/Si Multilayers interdiffusion and structural relaxation ; crystallization |
| title_full | Amorphous Mo/Si Multilayers interdiffusion and structural relaxation ; crystallization door Onno Bram Loopstra |
| title_fullStr | Amorphous Mo/Si Multilayers interdiffusion and structural relaxation ; crystallization door Onno Bram Loopstra |
| title_full_unstemmed | Amorphous Mo/Si Multilayers interdiffusion and structural relaxation ; crystallization door Onno Bram Loopstra |
| title_short | Amorphous Mo/Si Multilayers |
| title_sort | amorphous mo si multilayers interdiffusion and structural relaxation crystallization |
| title_sub | interdiffusion and structural relaxation ; crystallization |
| topic | Amorpher Zustand (DE-588)4306087-0 gnd Molybdän (DE-588)4170407-1 gnd Relaxation (DE-588)4049365-9 gnd Tempern (DE-588)4184700-3 gnd Silicium (DE-588)4077445-4 gnd |
| topic_facet | Amorpher Zustand Molybdän Relaxation Tempern Silicium Hochschulschrift Vielschichtsystem |
| work_keys_str_mv | AT loopstraonnob amorphousmosimultilayersinterdiffusionandstructuralrelaxationcrystallization |