First SIMOX Workshop: papers from the SWI-88 meeting, 7 - 8 November 1988, University of Surrey, UK
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| Corporate Author: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Oxford u.a.
Pergamon Press
1991
|
| Series: | Vacuum
42,5/6 |
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Item Description: | Literaturangaben. - Einzelaufnahme eines Zs.-Heftes |
| Physical Description: | S. 327 - 455 Ill., graph. Darst. |
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Record in the Search Index
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| adam_text | VACUUM
TECHNOLOGY APPLICATIONS
AND ION PHYSICS
Volume 42/numbers
5/6/1991
Contents
FIRST
SIMOX
WORKSHOP
Papers from the SWI-88 Meeting
7-8
November
1988,
University of Surrey, UK
AUTHORS
J A Kilner, K J Reeson
and
P L F Hemment
К
Izumi
С
Jaussaud, J Stoemenos,
J Margail.
A M
Papon
and M Bruel
S J
Krause.
С О
Jung,
T
S Ravi
and D E
Burke
S Visitserngtrakul, S
J
Krause,
В
F
Cordts
and P Roi tman
J Vanhellemont, H E
Maes and
A De Veirman
A De
Veirman,
J
Van Landuyt,
J
Vanhellemont,
H E
Maes
and
K Yallup
S Cristoloveanu
R C
Newman
C E
Daniel Chen
J
Beiz,
G
Burbach,
H
Vogt
and
G
Zimmer
C J
Griffin and J A Kilner
ARTICLES
327
Preface
329
SIMOX
Workshop—SWI-88
331
List of participants
333
Historical overview of SI
МОХ
341
Defects in
SIMOX
structures: causes and solutions
349
Mechanisms of defect formation and growth during thermal
ramping and annealing in oxygen implanted silicon-on-insulator
material
353
Effect of dose and annealing conditions on the structure of
silicon-on-insulator material implanted with oxygen at high
temperature and at high current density
359
Spectroscopic ellipsometry studies of
SIMOX
structures and
correlation with cross-section
ТЕМ
367
Defects in high-dose oxygen implanted silicon:
а ТЕМ
study
371
Oxygen-related activity and other specific electrical properties
of
SIMOX
379
Oxygen in silicon: thermal donors, intrinsic defects and
contamination
383
SIMOX
devices and circuits
387
High-quality SOI-substrates for CMOS transistors
389
The evolution of
SIMOX
dislocations
EXTENDED ABSTRACT
J
A Kilner
391
Models of buried layer formation
P L F
Hemment,
K J Reeson,
J A Kilner and S J
Krause
393
SIMOX
bibliography
AUTHOR INDEX
455
Published by
PERGAMON PRESS
ISSN 0042-207X
VACUAV
42(5/6) 323-456 (1991)
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| spelling | SIMOX Workshop 1 1988 Guildford Verfasser (DE-588)3005992-6 aut First SIMOX Workshop papers from the SWI-88 meeting, 7 - 8 November 1988, University of Surrey, UK organizers: J. A. Kilner ... Oxford u.a. Pergamon Press 1991 S. 327 - 455 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Vacuum 42,5/6 Literaturangaben. - Einzelaufnahme eines Zs.-Heftes SIMOX (DE-588)4297492-6 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1988 Guildford gnd-content SIMOX (DE-588)4297492-6 s DE-604 Kilner, J. A. Sonstige oth Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=003400600&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | First SIMOX Workshop papers from the SWI-88 meeting, 7 - 8 November 1988, University of Surrey, UK SIMOX (DE-588)4297492-6 gnd |
| subject_GND | (DE-588)4297492-6 (DE-588)1071861417 |
| title | First SIMOX Workshop papers from the SWI-88 meeting, 7 - 8 November 1988, University of Surrey, UK |
| title_auth | First SIMOX Workshop papers from the SWI-88 meeting, 7 - 8 November 1988, University of Surrey, UK |
| title_exact_search | First SIMOX Workshop papers from the SWI-88 meeting, 7 - 8 November 1988, University of Surrey, UK |
| title_full | First SIMOX Workshop papers from the SWI-88 meeting, 7 - 8 November 1988, University of Surrey, UK organizers: J. A. Kilner ... |
| title_fullStr | First SIMOX Workshop papers from the SWI-88 meeting, 7 - 8 November 1988, University of Surrey, UK organizers: J. A. Kilner ... |
| title_full_unstemmed | First SIMOX Workshop papers from the SWI-88 meeting, 7 - 8 November 1988, University of Surrey, UK organizers: J. A. Kilner ... |
| title_short | First SIMOX Workshop |
| title_sort | first simox workshop papers from the swi 88 meeting 7 8 november 1988 university of surrey uk |
| title_sub | papers from the SWI-88 meeting, 7 - 8 November 1988, University of Surrey, UK |
| topic | SIMOX (DE-588)4297492-6 gnd |
| topic_facet | SIMOX Konferenzschrift 1988 Guildford |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=003400600&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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