First SIMOX Workshop: papers from the SWI-88 meeting, 7 - 8 November 1988, University of Surrey, UK
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Oxford u.a.
Pergamon Press
1991
|
| Schriftenreihe: | Vacuum
42,5/6 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Literaturangaben. - Einzelaufnahme eines Zs.-Heftes |
| Beschreibung: | S. 327 - 455 Ill., graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV005436666 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 920714s1991 ad|| |||| 10||| engod | ||
| 035 | |a (OCoLC)311574310 | ||
| 035 | |a (DE-599)BVBBV005436666 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-91 |a DE-706 | ||
| 084 | |a ELT 290f |2 stub | ||
| 111 | 2 | |a SIMOX Workshop |n 1 |d 1988 |c Guildford |j Verfasser |0 (DE-588)3005992-6 |4 aut | |
| 245 | 1 | 0 | |a First SIMOX Workshop |b papers from the SWI-88 meeting, 7 - 8 November 1988, University of Surrey, UK |c organizers: J. A. Kilner ... |
| 264 | 1 | |a Oxford u.a. |b Pergamon Press |c 1991 | |
| 300 | |a S. 327 - 455 |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Vacuum |v 42,5/6 | |
| 500 | |a Literaturangaben. - Einzelaufnahme eines Zs.-Heftes | ||
| 650 | 0 | 7 | |a SIMOX |0 (DE-588)4297492-6 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1988 |z Guildford |2 gnd-content | |
| 689 | 0 | 0 | |a SIMOX |0 (DE-588)4297492-6 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Kilner, J. A. |e Sonstige |4 oth | |
| 856 | 4 | 2 | |m Digitalisierung TU Muenchen |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=003400600&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-003400600 | ||
Datensatz im Suchindex
| _version_ | 1804119645606641664 |
|---|---|
| adam_text | VACUUM
TECHNOLOGY APPLICATIONS
AND ION PHYSICS
Volume 42/numbers
5/6/1991
Contents
FIRST
SIMOX
WORKSHOP
Papers from the SWI-88 Meeting
7-8
November
1988,
University of Surrey, UK
AUTHORS
J A Kilner, K J Reeson
and
P L F Hemment
К
Izumi
С
Jaussaud, J Stoemenos,
J Margail.
A M
Papon
and M Bruel
S J
Krause.
С О
Jung,
T
S Ravi
and D E
Burke
S Visitserngtrakul, S
J
Krause,
В
F
Cordts
and P Roi tman
J Vanhellemont, H E
Maes and
A De Veirman
A De
Veirman,
J
Van Landuyt,
J
Vanhellemont,
H E
Maes
and
K Yallup
S Cristoloveanu
R C
Newman
C E
Daniel Chen
J
Beiz,
G
Burbach,
H
Vogt
and
G
Zimmer
C J
Griffin and J A Kilner
ARTICLES
327
Preface
329
SIMOX
Workshop—SWI-88
331
List of participants
333
Historical overview of SI
МОХ
341
Defects in
SIMOX
structures: causes and solutions
349
Mechanisms of defect formation and growth during thermal
ramping and annealing in oxygen implanted silicon-on-insulator
material
353
Effect of dose and annealing conditions on the structure of
silicon-on-insulator material implanted with oxygen at high
temperature and at high current density
359
Spectroscopic ellipsometry studies of
SIMOX
structures and
correlation with cross-section
ТЕМ
367
Defects in high-dose oxygen implanted silicon:
а ТЕМ
study
371
Oxygen-related activity and other specific electrical properties
of
SIMOX
379
Oxygen in silicon: thermal donors, intrinsic defects and
contamination
383
SIMOX
devices and circuits
387
High-quality SOI-substrates for CMOS transistors
389
The evolution of
SIMOX
dislocations
EXTENDED ABSTRACT
J
A Kilner
391
Models of buried layer formation
P L F
Hemment,
K J Reeson,
J A Kilner and S J
Krause
393
SIMOX
bibliography
AUTHOR INDEX
455
Published by
PERGAMON PRESS
ISSN 0042-207X
VACUAV
42(5/6) 323-456 (1991)
|
| any_adam_object | 1 |
| author_corporate | SIMOX Workshop Guildford |
| author_corporate_role | aut |
| author_facet | SIMOX Workshop Guildford |
| author_sort | SIMOX Workshop Guildford |
| building | Verbundindex |
| bvnumber | BV005436666 |
| classification_tum | ELT 290f |
| ctrlnum | (OCoLC)311574310 (DE-599)BVBBV005436666 |
| discipline | Elektrotechnik |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01434nam a2200349 cb4500</leader><controlfield tag="001">BV005436666</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">920714s1991 ad|| |||| 10||| engod</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)311574310</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV005436666</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-706</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 290f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">SIMOX Workshop</subfield><subfield code="n">1</subfield><subfield code="d">1988</subfield><subfield code="c">Guildford</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)3005992-6</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">First SIMOX Workshop</subfield><subfield code="b">papers from the SWI-88 meeting, 7 - 8 November 1988, University of Surrey, UK</subfield><subfield code="c">organizers: J. A. Kilner ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Oxford u.a.</subfield><subfield code="b">Pergamon Press</subfield><subfield code="c">1991</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">S. 327 - 455</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Vacuum</subfield><subfield code="v">42,5/6</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben. - Einzelaufnahme eines Zs.-Heftes</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">SIMOX</subfield><subfield code="0">(DE-588)4297492-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1988</subfield><subfield code="z">Guildford</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">SIMOX</subfield><subfield code="0">(DE-588)4297492-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kilner, J. A.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">Digitalisierung TU Muenchen</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=003400600&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-003400600</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1988 Guildford gnd-content |
| genre_facet | Konferenzschrift 1988 Guildford |
| id | DE-604.BV005436666 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:29:29Z |
| institution | BVB |
| institution_GND | (DE-588)3005992-6 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-003400600 |
| oclc_num | 311574310 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-706 |
| owner_facet | DE-91 DE-BY-TUM DE-706 |
| physical | S. 327 - 455 Ill., graph. Darst. |
| publishDate | 1991 |
| publishDateSearch | 1991 |
| publishDateSort | 1991 |
| publisher | Pergamon Press |
| record_format | marc |
| series2 | Vacuum |
| spelling | SIMOX Workshop 1 1988 Guildford Verfasser (DE-588)3005992-6 aut First SIMOX Workshop papers from the SWI-88 meeting, 7 - 8 November 1988, University of Surrey, UK organizers: J. A. Kilner ... Oxford u.a. Pergamon Press 1991 S. 327 - 455 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Vacuum 42,5/6 Literaturangaben. - Einzelaufnahme eines Zs.-Heftes SIMOX (DE-588)4297492-6 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1988 Guildford gnd-content SIMOX (DE-588)4297492-6 s DE-604 Kilner, J. A. Sonstige oth Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=003400600&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | First SIMOX Workshop papers from the SWI-88 meeting, 7 - 8 November 1988, University of Surrey, UK SIMOX (DE-588)4297492-6 gnd |
| subject_GND | (DE-588)4297492-6 (DE-588)1071861417 |
| title | First SIMOX Workshop papers from the SWI-88 meeting, 7 - 8 November 1988, University of Surrey, UK |
| title_auth | First SIMOX Workshop papers from the SWI-88 meeting, 7 - 8 November 1988, University of Surrey, UK |
| title_exact_search | First SIMOX Workshop papers from the SWI-88 meeting, 7 - 8 November 1988, University of Surrey, UK |
| title_full | First SIMOX Workshop papers from the SWI-88 meeting, 7 - 8 November 1988, University of Surrey, UK organizers: J. A. Kilner ... |
| title_fullStr | First SIMOX Workshop papers from the SWI-88 meeting, 7 - 8 November 1988, University of Surrey, UK organizers: J. A. Kilner ... |
| title_full_unstemmed | First SIMOX Workshop papers from the SWI-88 meeting, 7 - 8 November 1988, University of Surrey, UK organizers: J. A. Kilner ... |
| title_short | First SIMOX Workshop |
| title_sort | first simox workshop papers from the swi 88 meeting 7 8 november 1988 university of surrey uk |
| title_sub | papers from the SWI-88 meeting, 7 - 8 November 1988, University of Surrey, UK |
| topic | SIMOX (DE-588)4297492-6 gnd |
| topic_facet | SIMOX Konferenzschrift 1988 Guildford |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=003400600&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT simoxworkshopguildford firstsimoxworkshoppapersfromtheswi88meeting78november1988universityofsurreyuk AT kilnerja firstsimoxworkshoppapersfromtheswi88meeting78november1988universityofsurreyuk |