Vacuum, electron and ion technologies: papers from the sixth Bulgarian Summer School, 21 - 26 September 1989, Varna, Bulgaria
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | Undetermined |
| Veröffentlicht: |
Oxford u.a.
Pergamon Press
1991
|
| Schriftenreihe: | Vacuum
42,1/2 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Literaturangaben. - Einzelaufnahme eines Zs.-Heftes |
| Beschreibung: | 176 S. Ill., graph. Darst. |
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| 245 | 1 | 0 | |a Vacuum, electron and ion technologies |b papers from the sixth Bulgarian Summer School, 21 - 26 September 1989, Varna, Bulgaria |c guest eds. D. S. Karpuzov ... |
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Datensatz im Suchindex
| _version_ | 1804119645427335168 |
|---|---|
| adam_text | VACUUM
TECHNOLOGY APPLICATIONS
AND ION PHYSICS
Volume 42/numbers
1/2/1991
Contents
VACUUM, ELECTRON AND ION TECHNOLOGIES
Papers from the Sixth Bulgarian Summer School
21-26
September
1989,
Varna, Bulgaria
AUTHORS
О
S Karpuzov,
I V Katardjiev and
S S
Tod
o rov
M Hautala and
I
Koponen
M Posselt
A F Burenkov
and F F Komárov
M Posselt and G Otto
P Petrov
and G
Mladenov
R Deltchev, M Albert, G Suchaneck
and K
Schade
L Kostadinov and D Dobrev
K
Steenbeek, E
Steinbeiß,
S
Winkler,
G
Schmidt
and G
Bruchlos
D
Czekaj,
B Goranchev, E K
Hollmann,
V A Volpyas and A G Zaytsev
T
Heberlein,
G
Krautheim
and
W
Wuttke
D N
Popov
and P I Docheva
B N Smirnov
M A
Herman
F Fujimoto
V Yu Fominskii, A M Markeev and
V N Nevolin
BXLiu
Yu E Kreindel and V V Ovchinnikov
A L Chekanov, I G Romanov and
V N Perevezentsev
ARTICLES
1
Introduction
3
Dependence of collisional mixing on recoil energy
9
Range profile calculations by direct numerical solution of
linearized Boltzmann transport equations
13
Calculation of the depth profiles associated with high energy
ion implantation
17
Energy and angular distributions of ions backscattered from
the sidewalls during the implantation into deep trenches
M J Nobes, G
Carter and I V Katardjiev
21
The determination of species distribution and deduction of
mixing and effective diffusion parameters in the altered layer of
irradiated films
29
Theoretical analysis of heat flow and structural changes during
electron beam irradiation of steel
33
Power dissipation in rf glow discharges
35
A low working pressure magnetron sputtering source
39
Low voltage magnetron discharges for thin film preparation
43
Incident ion energy spectrum and target sputtering rate in dc
planar magnetron
47
The sputter deposition process: a Monte-Carlo study
53
Deposition of copper oxide, titanium oxide and indium tin
oxide films by reactive magnetron sputtering
57
Low temperature gas plasma formation of thin films on the
surface of a substrate via holes
61
Atomic layer epitaxy
—12
years later
67
Boron nitride film formation by means of dynamic mixing
method
73
Pulsed ion beams for modification of metal surface properties
75
Study of alloy phase formation using ion beams
81
Structural transformations and long-range effects in alloys
caused by gas ion bombardment
85
Effect of low-energy ion flows on the physico-mechanical
properties and morphology of iron surfaces
К
Gamo
N
Drandarov.
Β
Nikolov
and
Tsv Valchovska
F F Komárov
Vt Stavrov,
R Varbanov,
0
Vasiliev
and D
Beröva
R
V
Gribkovskii,
F F
Komárov
and
A
P Novikov
S
Müller-Pfeiffer
and H-J Anklam
E
I
Tochitsky, E
I
Obukhov,
А І
Sharendo,
V V
Boksha and
K N
Kasparov
Yu
В
Gorbatov, V I Zinenko and
A F Vyatkin
В
Spangenberg,
К
Popova.
E Spasova,
I V
Katardjiev. G Carter
and M J Nobes
M
К
Abachev, Yu
P
Baryshev.
V
F Lukichev, A A Orlikovsky and
К
A Valiev
R K
h Makhmutov. S
N
Sidoruk,
К
A Valiev.
L
V
Velikov and
V
S Yakunin
S
P Chenakin
A A Kosyachkov
L
Frank
J L
Vignes,
J P
Langeron.
G
I Grigorov.
I
N
Martev and
M
V Stoyanova
G S Spassov
I F
Isakov. V
N
Kolodii.
M S Opekunov.
V M Matvienko, S A
Pechenkin.
G E Remnev
and Yu
P Usov
T D Radjabov
89
Focused ion beam
technology
95
Structure and emission characteristics of AuSi alloy field ion
source
101
Self-annealing in ion-implanted Si and
G a
As
107
Investigation of arsenic-implanted silicon by optical
reflectometry
111
Buried Si3N4 layers in silicon produced by high-intensity
implantation and rapid thermal annealing
113
Computer simulation of hillock growth
117
Dry patterning through masks of organic materials
121
Fast atom and beam etching assisted by a fluorine-containing
radical flow
125
Maskless etching of ion modified chromium films
129
Aperture effect in plasma etching of deep silicon trenches
133
Shadow electron beam
1 :1
scale printing with
0.1
μπ
size
elements
139
A comprehensive SIMS study of
high
-Г,.
superconductors
143
Angular and energy dependencies of secondary ion emission
from polycrystalline and single-crystal surfaces
147
Problems of scanning Auger electron microscopy
151
Quantitative Auger electron spectroscopic analysis of titanium
nitrides
155
Auger electron spectroscopic analysis of In^Ga, _,As
159
Sources of high power ion beams for technological applications
163
Modification of physico-mechanical properties of metals and
metallic coatings by ion implantation
EXTENDED ABSTRACTS
U
Littmark
К
Reichelt
and X Jiang
L llyinsky and A Lavrentyev
169
Theoretical concepts of ion implantation, recoil implantation
and ion beam mixing
171
The preparation of thin films by physical vapour depositions
173
Temperature dependence of secondary ion emission for yttrium
iron garnet
AUTHOR INDEX
175
NEW PATENTS
177
ISSN 0042-207X
VACUAV42(1/2)
1-184(1991)
Published by
PERGAMON PRESS
|
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| spelling | Vacuum, electron and ion technologies papers from the sixth Bulgarian Summer School, 21 - 26 September 1989, Varna, Bulgaria guest eds. D. S. Karpuzov ... Oxford u.a. Pergamon Press 1991 176 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Vacuum 42,1/2 Literaturangaben. - Einzelaufnahme eines Zs.-Heftes Elektronenstrahl (DE-588)4151894-9 gnd rswk-swf Technologie (DE-588)4059276-5 gnd rswk-swf Ionenstrahl (DE-588)4162347-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1989 Warna gnd-content Ionenstrahl (DE-588)4162347-2 s Technologie (DE-588)4059276-5 s DE-604 Elektronenstrahl (DE-588)4151894-9 s Karpuzov, D. S. Sonstige oth International School on Vacuum, Electron and Ion Technologies 6 1989 Warna Sonstige (DE-588)5097816-0 oth Vacuum 42,1/2 (DE-604)BV002571861 42,1/2 Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=003400482&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Vacuum, electron and ion technologies papers from the sixth Bulgarian Summer School, 21 - 26 September 1989, Varna, Bulgaria Vacuum Elektronenstrahl (DE-588)4151894-9 gnd Technologie (DE-588)4059276-5 gnd Ionenstrahl (DE-588)4162347-2 gnd |
| subject_GND | (DE-588)4151894-9 (DE-588)4059276-5 (DE-588)4162347-2 (DE-588)1071861417 |
| title | Vacuum, electron and ion technologies papers from the sixth Bulgarian Summer School, 21 - 26 September 1989, Varna, Bulgaria |
| title_auth | Vacuum, electron and ion technologies papers from the sixth Bulgarian Summer School, 21 - 26 September 1989, Varna, Bulgaria |
| title_exact_search | Vacuum, electron and ion technologies papers from the sixth Bulgarian Summer School, 21 - 26 September 1989, Varna, Bulgaria |
| title_full | Vacuum, electron and ion technologies papers from the sixth Bulgarian Summer School, 21 - 26 September 1989, Varna, Bulgaria guest eds. D. S. Karpuzov ... |
| title_fullStr | Vacuum, electron and ion technologies papers from the sixth Bulgarian Summer School, 21 - 26 September 1989, Varna, Bulgaria guest eds. D. S. Karpuzov ... |
| title_full_unstemmed | Vacuum, electron and ion technologies papers from the sixth Bulgarian Summer School, 21 - 26 September 1989, Varna, Bulgaria guest eds. D. S. Karpuzov ... |
| title_short | Vacuum, electron and ion technologies |
| title_sort | vacuum electron and ion technologies papers from the sixth bulgarian summer school 21 26 september 1989 varna bulgaria |
| title_sub | papers from the sixth Bulgarian Summer School, 21 - 26 September 1989, Varna, Bulgaria |
| topic | Elektronenstrahl (DE-588)4151894-9 gnd Technologie (DE-588)4059276-5 gnd Ionenstrahl (DE-588)4162347-2 gnd |
| topic_facet | Elektronenstrahl Technologie Ionenstrahl Konferenzschrift 1989 Warna |
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| volume_link | (DE-604)BV002571861 |
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