Infrarot-Untersuchungen an Wasserstoff-induzierten Defekten in Silizium:
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Abschlussarbeit Buch |
Sprache: | German |
Veröffentlicht: |
1991
|
Schlagworte: | |
Beschreibung: | 148 S. graph. Darst. |
Internformat
MARC
LEADER | 00000nam a2200000 c 4500 | ||
---|---|---|---|
001 | BV004797129 | ||
003 | DE-604 | ||
005 | 20090227 | ||
007 | t | ||
008 | 920227s1991 gw d||| m||| 00||| ger d | ||
035 | |a (OCoLC)613082579 | ||
035 | |a (DE-599)BVBBV004797129 | ||
040 | |a DE-604 |b ger |e rakddb | ||
041 | 0 | |a ger | |
044 | |a gw |c DE | ||
049 | |a DE-703 |a DE-355 |a DE-91 |a DE-29T |a DE-11 |a DE-188 | ||
084 | |a PHY 656d |2 stub | ||
084 | |a PHY 622d |2 stub | ||
100 | 1 | |a Hartung, Joachim |e Verfasser |4 aut | |
245 | 1 | 0 | |a Infrarot-Untersuchungen an Wasserstoff-induzierten Defekten in Silizium |c vorgelegt von Joachim Hartung |
264 | 1 | |c 1991 | |
300 | |a 148 S. |b graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
502 | |a Stuttgart, Univ., Diss., 1991 | ||
650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Kristall |0 (DE-588)4033209-3 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Aggregatzentrum |0 (DE-588)4217415-6 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Störstelle |0 (DE-588)4193400-3 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Infrarotspektroskopie |0 (DE-588)4135411-4 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Wasserstoff |0 (DE-588)4064784-5 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Strahlenschaden |0 (DE-588)4057825-2 |2 gnd |9 rswk-swf |
655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
655 | 7 | |a Protonenimplantation |2 gnd |9 rswk-swf | |
689 | 0 | 0 | |a Silicium |0 (DE-588)4077445-4 |D s |
689 | 0 | 1 | |a Protonenimplantation |A f |
689 | 0 | 2 | |a Störstelle |0 (DE-588)4193400-3 |D s |
689 | 0 | |5 DE-604 | |
689 | 1 | 0 | |a Silicium |0 (DE-588)4077445-4 |D s |
689 | 1 | 1 | |a Störstelle |0 (DE-588)4193400-3 |D s |
689 | 1 | 2 | |a Wasserstoff |0 (DE-588)4064784-5 |D s |
689 | 1 | 3 | |a Infrarotspektroskopie |0 (DE-588)4135411-4 |D s |
689 | 1 | |5 DE-604 | |
689 | 2 | 0 | |a Silicium |0 (DE-588)4077445-4 |D s |
689 | 2 | 1 | |a Kristall |0 (DE-588)4033209-3 |D s |
689 | 2 | 2 | |a Wasserstoff |0 (DE-588)4064784-5 |D s |
689 | 2 | 3 | |a Strahlenschaden |0 (DE-588)4057825-2 |D s |
689 | 2 | 4 | |a Aggregatzentrum |0 (DE-588)4217415-6 |D s |
689 | 2 | 5 | |a Infrarotspektroskopie |0 (DE-588)4135411-4 |D s |
689 | 2 | |5 DE-604 | |
999 | |a oai:aleph.bib-bvb.de:BVB01-002950625 |
Datensatz im Suchindex
_version_ | 1804118909475880960 |
---|---|
any_adam_object | |
author | Hartung, Joachim |
author_facet | Hartung, Joachim |
author_role | aut |
author_sort | Hartung, Joachim |
author_variant | j h jh |
building | Verbundindex |
bvnumber | BV004797129 |
classification_tum | PHY 656d PHY 622d |
ctrlnum | (OCoLC)613082579 (DE-599)BVBBV004797129 |
discipline | Physik |
format | Thesis Book |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02144nam a2200589 c 4500</leader><controlfield tag="001">BV004797129</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20090227 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">920227s1991 gw d||| m||| 00||| ger d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)613082579</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV004797129</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">ger</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">DE</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-703</subfield><subfield code="a">DE-355</subfield><subfield code="a">DE-91</subfield><subfield code="a">DE-29T</subfield><subfield code="a">DE-11</subfield><subfield code="a">DE-188</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">PHY 656d</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">PHY 622d</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Hartung, Joachim</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Infrarot-Untersuchungen an Wasserstoff-induzierten Defekten in Silizium</subfield><subfield code="c">vorgelegt von Joachim Hartung</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1991</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">148 S.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="502" ind1=" " ind2=" "><subfield code="a">Stuttgart, Univ., Diss., 1991</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Kristall</subfield><subfield code="0">(DE-588)4033209-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Aggregatzentrum</subfield><subfield code="0">(DE-588)4217415-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Störstelle</subfield><subfield code="0">(DE-588)4193400-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Infrarotspektroskopie</subfield><subfield code="0">(DE-588)4135411-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Wasserstoff</subfield><subfield code="0">(DE-588)4064784-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Strahlenschaden</subfield><subfield code="0">(DE-588)4057825-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="a">Protonenimplantation</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Protonenimplantation</subfield><subfield code="A">f</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Störstelle</subfield><subfield code="0">(DE-588)4193400-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Störstelle</subfield><subfield code="0">(DE-588)4193400-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="2"><subfield code="a">Wasserstoff</subfield><subfield code="0">(DE-588)4064784-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="3"><subfield code="a">Infrarotspektroskopie</subfield><subfield code="0">(DE-588)4135411-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="2" ind2="0"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2="1"><subfield code="a">Kristall</subfield><subfield code="0">(DE-588)4033209-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2="2"><subfield code="a">Wasserstoff</subfield><subfield code="0">(DE-588)4064784-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2="3"><subfield code="a">Strahlenschaden</subfield><subfield code="0">(DE-588)4057825-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2="4"><subfield code="a">Aggregatzentrum</subfield><subfield code="0">(DE-588)4217415-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2="5"><subfield code="a">Infrarotspektroskopie</subfield><subfield code="0">(DE-588)4135411-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-002950625</subfield></datafield></record></collection> |
genre | (DE-588)4113937-9 Hochschulschrift gnd-content Protonenimplantation gnd |
genre_facet | Hochschulschrift Protonenimplantation |
id | DE-604.BV004797129 |
illustrated | Illustrated |
indexdate | 2024-07-09T16:17:47Z |
institution | BVB |
language | German |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-002950625 |
oclc_num | 613082579 |
open_access_boolean | |
owner | DE-703 DE-355 DE-BY-UBR DE-91 DE-BY-TUM DE-29T DE-11 DE-188 |
owner_facet | DE-703 DE-355 DE-BY-UBR DE-91 DE-BY-TUM DE-29T DE-11 DE-188 |
physical | 148 S. graph. Darst. |
publishDate | 1991 |
publishDateSearch | 1991 |
publishDateSort | 1991 |
record_format | marc |
spelling | Hartung, Joachim Verfasser aut Infrarot-Untersuchungen an Wasserstoff-induzierten Defekten in Silizium vorgelegt von Joachim Hartung 1991 148 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Stuttgart, Univ., Diss., 1991 Silicium (DE-588)4077445-4 gnd rswk-swf Kristall (DE-588)4033209-3 gnd rswk-swf Aggregatzentrum (DE-588)4217415-6 gnd rswk-swf Störstelle (DE-588)4193400-3 gnd rswk-swf Infrarotspektroskopie (DE-588)4135411-4 gnd rswk-swf Wasserstoff (DE-588)4064784-5 gnd rswk-swf Strahlenschaden (DE-588)4057825-2 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Protonenimplantation gnd rswk-swf Silicium (DE-588)4077445-4 s Protonenimplantation f Störstelle (DE-588)4193400-3 s DE-604 Wasserstoff (DE-588)4064784-5 s Infrarotspektroskopie (DE-588)4135411-4 s Kristall (DE-588)4033209-3 s Strahlenschaden (DE-588)4057825-2 s Aggregatzentrum (DE-588)4217415-6 s |
spellingShingle | Hartung, Joachim Infrarot-Untersuchungen an Wasserstoff-induzierten Defekten in Silizium Silicium (DE-588)4077445-4 gnd Kristall (DE-588)4033209-3 gnd Aggregatzentrum (DE-588)4217415-6 gnd Störstelle (DE-588)4193400-3 gnd Infrarotspektroskopie (DE-588)4135411-4 gnd Wasserstoff (DE-588)4064784-5 gnd Strahlenschaden (DE-588)4057825-2 gnd |
subject_GND | (DE-588)4077445-4 (DE-588)4033209-3 (DE-588)4217415-6 (DE-588)4193400-3 (DE-588)4135411-4 (DE-588)4064784-5 (DE-588)4057825-2 (DE-588)4113937-9 |
title | Infrarot-Untersuchungen an Wasserstoff-induzierten Defekten in Silizium |
title_auth | Infrarot-Untersuchungen an Wasserstoff-induzierten Defekten in Silizium |
title_exact_search | Infrarot-Untersuchungen an Wasserstoff-induzierten Defekten in Silizium |
title_full | Infrarot-Untersuchungen an Wasserstoff-induzierten Defekten in Silizium vorgelegt von Joachim Hartung |
title_fullStr | Infrarot-Untersuchungen an Wasserstoff-induzierten Defekten in Silizium vorgelegt von Joachim Hartung |
title_full_unstemmed | Infrarot-Untersuchungen an Wasserstoff-induzierten Defekten in Silizium vorgelegt von Joachim Hartung |
title_short | Infrarot-Untersuchungen an Wasserstoff-induzierten Defekten in Silizium |
title_sort | infrarot untersuchungen an wasserstoff induzierten defekten in silizium |
topic | Silicium (DE-588)4077445-4 gnd Kristall (DE-588)4033209-3 gnd Aggregatzentrum (DE-588)4217415-6 gnd Störstelle (DE-588)4193400-3 gnd Infrarotspektroskopie (DE-588)4135411-4 gnd Wasserstoff (DE-588)4064784-5 gnd Strahlenschaden (DE-588)4057825-2 gnd |
topic_facet | Silicium Kristall Aggregatzentrum Störstelle Infrarotspektroskopie Wasserstoff Strahlenschaden Hochschulschrift Protonenimplantation |
work_keys_str_mv | AT hartungjoachim infrarotuntersuchungenanwasserstoffinduziertendefekteninsilizium |