Laser surface processing and characterization: proceedings of Symposium E on Laser Surface Processing and Characterzation of the 1991 E-MRS Spring Conference, Strasbourg, France, May 28 - 31, 1991
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Amsterdam [u.a.]
North-Holland
1992
|
| Schriftenreihe: | European Materials Research Society: European Materials Research Society symposia proceedings
24 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XV, 535 S. Ill., graph. Darst. |
| ISBN: | 0444894195 |
Internformat
MARC
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| 245 | 1 | 0 | |a Laser surface processing and characterization |b proceedings of Symposium E on Laser Surface Processing and Characterzation of the 1991 E-MRS Spring Conference, Strasbourg, France, May 28 - 31, 1991 |c ed.: I. W. Boyd |
| 264 | 1 | |a Amsterdam [u.a.] |b North-Holland |c 1992 | |
| 300 | |a XV, 535 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a European Materials Research Society: European Materials Research Society symposia proceedings |v 24 | |
| 650 | 4 | |a Lasers in physics |v Congresses | |
| 650 | 4 | |a Photochemistry |v Congresses | |
| 650 | 4 | |a Thin films |x Surfaces |v Congresses | |
| 650 | 0 | 7 | |a Laser |0 (DE-588)4034610-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Oberflächenbehandlung |0 (DE-588)4042908-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Laserbearbeitung |0 (DE-588)4139080-5 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1991 |z Straßburg |2 gnd-content | |
| 689 | 0 | 0 | |a Oberflächenbehandlung |0 (DE-588)4042908-8 |D s |
| 689 | 0 | 1 | |a Laserbearbeitung |0 (DE-588)4139080-5 |D s |
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| 689 | 1 | 0 | |a Laser |0 (DE-588)4034610-9 |D s |
| 689 | 1 | |8 1\p |5 DE-604 | |
| 700 | 1 | |a Boyd, Ian W. |4 edt | |
| 711 | 2 | |a Symposium on Laser Surface Processing and Characterization |d 1991 |c Straßburg |j Sonstige |0 (DE-588)3010954-1 |4 oth | |
| 775 | 0 | 8 | |i Äquivalent |n Originalausgabe erschienen als |k Applied surface science ; 54 |
| 830 | 0 | |a European Materials Research Society: European Materials Research Society symposia proceedings |v 24 |w (DE-604)BV004201591 |9 24 | |
| 856 | 4 | 2 | |m Digitalisierung TU Muenchen |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=002913886&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-002913886 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
Datensatz im Suchindex
| _version_ | 1804118855712243712 |
|---|---|
| adam_text | Contents
Preface
vu
Conference organization
ix
Supporting organizations and sponsors
x
LASER CHEMICAL VAPOUR DEPOSITION
Photodecomposition of precursors for metal organic vapour phase epitaxy
W.
Richter.
P. Kurpas and M. Waschbiisch
1
Hybrid organometallic compounds of gallium: UV excimer laser photochemistry of Gair-CjHg^/CH-,),.,,
(n
=0. 1. 2,3)
W.M.
Cleaver. A.R. Barron. Y. Zhang and M. Stuke
8
Identification of the gas-phase products which occur during the deposition of A1N using the organometallic
precursor: [(CH
,ΚΑΙΝΗ,],
C.C. Amato.
J.B.
Hudson and L.V.
Interrante
18
Laser-induced deposition of one-micron-size polysilicon lines from mono and trisilane
S. Boughaba and G. Auvert
25
CW CO, laser CVD of amorphous hydrogenated silicon (a-Si:H): influence of the deposition geometry
E.
Golusda.
R.
Lange,
K.-D.
Lühmann,
G.
Mollekopf,
M.
Wacker
and H.
Stafast
30
One-step growth of polycrystalline silicon thin films at low-temperature by ArF excimer laser-induced
photo-CVD
M. Elliq. E. Fogarassy.
С
Fuchs,
J.
P. Stoquert.
S. de
Unamuno,
В.
Prévôt and E.L.
Matné
35
Theoretical and experimental studies of laser-induced chemical vapour deposition of silicon thin films
A. Fischer, G. Reisse,
F. Gänsicke
and K.
Zimmer 41
Spectroscopic investigations of gas-phase chemistry during laser-induced photolytic CVD of
W
P.
Mogyorósi.
J.
O. Carlsson and
M. Moradi
46
Modeling KrF
excimer laser
induced deposition of titanium from titanium tetrachloride
M. Meunier.
С.
Lavoie.
S.
Boivin.
R.
Izquierdo
and P. Desjardins
52
Laser-induced chemical vapor deposition of rhodium
E.B. Flint. J.
Messelhäuser
and H. Suhr
56
Laser-induced damage formation and tungsten deposition on GaAs
A. Lecours.
M. Meunier
and R.
Izquierdo
60
Laser induced CVD of gold using new precursors
J.
Messelhäuser. E.B.
Flint and H. Suhr
64
Reactive TiN deposition on alloys with laser radiation
E.W. Kreutz. M.
Krösche.
H.
Sung.
Α.
Voss
and K.
Wissenbach 69
Reactive pulsed laser deposition of TiN
D.
Crăciun
and V.
Crăciun
75
IR-iaser CVD of TiB*. TiC, and TiC,N, coatings on carbon fibres
V. Hopfe. A. Tehel. A. Baier and i. Scharsig
78
Laser-induced chemical vapour deposition of conductive and insulating thin films
G. Reisse. F. Gaensicke. R. Ebert. U. Illmann and H. Johansen
84
С
tmtents
ľ.xcimer laser
photolysis of
metalorganic
complexes of platinum and palladium in the gas phase
11. Willwohl
and J. Wolfrum
НЧ
Control of the GaAs/SiO,
interface
through sulfur passivation and a photo-CVD process
Y. Fujisaki
* 45
Art- laser induced C VD of SiO, films: a search for the best suitable precursors
D. Rieger and
F. Bachmann W
Excimer laser C VD of silicon oxide on GaAs: a comparison with deposition on c-Si
P. Gonzalez. E. Garcia, J.
Pou.
D.
Fernández,
В.
León
and M.
Pérez-Amor
108
Low-temperature silicon oxide films deposited using a CO; laser
I). Fernández.
P.
González.
J.
Pou.
В.
León
and
M.
Pérez-Amor
112
Kinetics of excimer-laser induced C VD of
W
R.L.
Krans, C.
Brands and W.C.
Sinke 117
Deposition of SiON by ArF laser CVD
A.
Löffler-Peters.
J.
Müller
and T. Ebert
121
Rapid thermal chemical vapour deposition of SiOtNv. films
F. Lebland,
С.
Licoppe,
Y. Gao,
Y.I. Nissim and S.
Rigo
125
CO, laser induced CVD of TiN
O. Conde.
M.L.G.
Ferreira,
P.
Hochholdinger.
A.J.
Silvestre
and
R.
Vilar
130
Laser-induced chemical vapor deposition of titanium diboride
J. Elders and J.D.W. van Voorst
135
Deposition of ceramics by LPVD
J.
Funken.
E.W.
Kreutz.
M.
Krösche.
H.
Sung.
A.
Voss,
G.
Erkens, O. Lemmer
and T. Leyendecker
141
LASER ABLATION
Study of laser ablation of BiSrCaCuO
R.
Pérez Casero.
F.
Kernéivé. J.P.
Enarđ.
j. Perrière and P. Régnier
147
Laser ablation deposition of PbO/BiPbSrCaCuO
A. Sajjadi. U.K. Yau.
F. Saba. F.
Beech and I.W. Boyd
154
Ablation studies of Y-Ba-Cu-oxide in oxygen using a pulsed CO2 laser
P.E.
Dyer. P.H. Key and P. Monk
160
In-situ and multilayer laser ablation deposition of
Ρο^γ,Υ,,^Οβ,,^Οι,Ο,,.,^
thin films
S.H.H. Naqvi. F. Beech and I.W. Boyd
166
Production and reactivity of ionic clusters
A. Giardini-Guidoni.
G.
Pizzella.
R. Teghil. M.
Foresti.
M. Snels and S.
Piccirillo
171
Laser
ablation
of Ge
in an oxygen environment: plasma and film properties
C.N.
Afonso.
F.
Vega.
J.
Solis.
F. Catalina.
С.
Ortega
and J. Siejka
175
Synthesis of SiOi thin films by reactive excimer laser ablation
E. Fogarassy, A. Slaoui. C.
Fuchs
and J.P. Stoquert
180
Ablation of silicate glasses by laser irradiation: modelling and experimental results
С
Buerhop. R.
Weissmann
and
N. Lutz
187
Excimer laser ablation of fused silica
J. Ihiemann
193
Laser deposition of copper oxide thin films: contrast with sputtering
С
Ortiz, C.N.
Afonso.
F.
Vega,
J.
Solis,
J.C. Cheang.
С.
Ortega
and J. Siejka
201
Thin film deposition of dielectric oxides by laser ablation
S. Amirhaghi. A. Archer. B. Taguiang. R. McMinn. P. Barnes. S. Tarling and I.W. Boyd
205
Contents
Ablation
of hydroxyapatite by pulsed laser irradiation
P. Baeri, L. Torrisi.
N.
Marino and G. Foti
210
Manufacture and characterization of soft X-ray mirrors by laser ablation
H. Mai and W.
Pompe
215
Multishot ablation of polymer and metal films at
248
nm
E. Hunger, H. Pietsch, S. Petzoldt and E. Matthias
227
Excimer laser ablation of inorganic materials
N.
Omori
and M. Inoue
232
Laser ablation of dyes
M.
Späth
and M. Stuke
237
Photoablation
of polymers
P. Lemoine and W.
Blau 240
Laser ablation processes imaged by high-speed reflection electron microscopy
F. Heinricht and O. Bostanjoglo
244
Fast time-response photoacoustic studies and modelling of KrF laser ablated YBa2Cu,O7
P.E.
Dyer. S.R. Farrar and P.H. Key
255
Analysis of the plasma expansion dynamics by optical time-of-flight measurements
W. Marine. M. Gerri. J.M.
Scotto
d Aniello.
M. Sentis,
Ph. Delaporte. B.
Forestier
and B. Fontaine
264
SURFACE MODIFICATION AND FILM MIXING
Fabrication of nanometer structures using STM
R. Wiesendanger
271
Properties of
Au
and Cu layers deposited on photoablated polyphenylquinoxaline surfaces
A. Cros.
Fi. Daliaporta.
S. Lazare. H. Hiraoka.
N. Merk
and W. Marine
278
Resistless
inverse projection
patterning of aluminum by using synchrotron radiation induced suppression of
thermal chemical vapor deposition
F. Uesugi and I. Nishiyama
284
Laser projection patterned processing of semiconductors
F. Foulon. M.
Green. R.A. Lawes. J. Baker. F.N. Goodall and G. Arthur
291
Laser desorption on Si surfaces by use of multiple excimer laser pulses
H.
Schlemm, F. Buchmann
and H.-D.
Geiler 298
Laser-induced nucleation of crystals in amorphous Ge films
0. Bostanjoglo, W. Marine and P. Thomsen-Schmidt
302
Suitable precursor/solvent systems for laser-induced surface prenucleation
S. Preuss and M. Stuke
308
Influence of laser assistance on the nucleation and growth processes occurring during the electrodeposition of
zinc
1. Zouari. M.
( alvo.
F.
Lapicque and M. Cabrera
311
Laser-induced structural phase changes in ¡-carbon films
S.
Weissmantel.
G.
Reisse and S.
Schulze 317
Potential of photon and particle beams for surface treatment of thin ceramic coatings
J.P. Celis.
M. Franck. J.R.
Rixìs, E.W.
Kreutz. A.
Gasser. M. Wehner, K. Wissenbach
and
N.
Pattyn
322
Pulse- and time-dependent
obsenation
of UV -laser-induced structures on polymer surfaces
W. Resting. D. Knittel, T.
Bahners
and E.
Schollmeyer 330
Laser-assisted engraving of HgCdTe under a liquid layer
MR. Brook and G.A. Shafeev
336
Contents
UV-laser-induced oxidation kinetics of
с
-Ge:
transient reflectivity study
F.
Vega,
C.N.
Afonso.
J.
Solis, R.
Serna
and C. Ortiz
341
Excimer laser induced surface modification of thin Ge-Se films
A. Jadin. M. Wautelet and L.D.
Laude
345
Direct carbidation of titanium as a result of multipulse UV-laser irradiation of titanium samples in an ambient
methane gas
С
Boulmer-Leborgne, J. Hermann, B. Dubreuii, P. Braull, M.L.
DeGiorgi,
G.
Leggieri,
A. Luches,
M.
Martino,
Α.
Perrone.
I.
N.
Mihailescu, I. Ursu, G. Blondiaux, J.L. Debrun, H.
Estrade
and B. Rousseau
349
Multilayer titanium nitride and suicide structures synthesized by multipulse excimer laser irradiation
E.
D Anna, G.
Leggieri,
Α.
Luches,
M.
Martino, A.
Perrone,
P. Mengucci and I.
N.
Mihailescu
353
CW-laser-induced synthesis of Sb;Se, thin films
K. Kolev and L.D.
Laude
358
Laser self-aligned synthesis of TiSi,
V.
Crăciun.
D.
Crăciun,
N.
Chitica, I.N. Mihailescu and M. Bertolotti
362
Intriguing properties of pulsed laser beam mixed Au/Te/Au/GaAs ohmic contacts
K. Wuyts, J.
Watté
and R.E.
Silverans
366
Laser boronizing of some titanium alloys
С
Badini,
M.
Bianco,
S.
Talentino.
X.B.
Guo
and C.
Gianoglio
374
Non-equilibrium epitaxial suicides
-
a special effect of suicide formation by ns-laser irradiation
B. Weber, K. Gartner, A.
Witzmann,
С.
Kaschner and
1.
Kasko
381
Comparison of laser and line-electron beam recrystallization of thin polycrystalline silicon films
M.
Pauli. G. Dähn
and J.
Müller 386
influence of hydrogen on the structure and surface morphology of pulsed ArF excimer laser crystallized
amorphous silicon thin films
E.L.
Mathé.
A. Naudon. M. Elliq. E. Fogarassy and
S. de Unamuno
392
Laser in-diffusion of
Ti in
LiNbO^ single crystals
M. Bertolotti. V.
Crăciun.
G.
De Cesare. A. Ferrari. A.
Jascow, I.
N.
Mihailescu,
G. Mikhailova,
A.
Cino and M. Rossi
401
Chemical reactions at metallic and metal/semiconductor interfaces stimulated by pulsed laser annealing
EJ.
Petit and R. Caudano
405
UV/VUV LAMPS: TECHNOLOGY AND PROCESSING
Silent-discharge driven excimer UV sources and their applications
U. Kogelschatz
410
Development of a novel large area excimer lamp for direct photo deposition of thin films
P. Bergonzo. P.
Patel.
I.W.
Boyd and U. Kogelschatz
424
VUV excimer light source for deposition of amorphous semiconductors
F. Kessler
and G.H. Bauer
430
UV annealing of low temperature photodeposited Sid films with a new powerful lamp source
C.
Debauché,
С.
Licoppe,
С.
Meriadec.
F. Sartoris
and
J. Flicstein
435
Metal deposition with a windowless VUV excimer source
H. Esrom and U. Kogelschatz
440
Surface mechanisms in the UVCVD of SiO, films
C. Licoppe.
С
Meriadec. Y.I. Nissim and J.M. Moison
445
Improvement of the SiO2 deposition by 1K5 nm photolysis of N,O and SiH4 by addition of neopentane
M. Petitjean.
N.
Proust. J.-F. Chapeaubianc and J. Perrin
453
Contents
Low temperature photo-assisted oxidation of silicon
A. Razor and I.W. Boyd
460
UV-induced decomposition of adsorbed Cu-acetylacetonate films at room temperature for electroless metal
plating
J.-Y. Zhang and H. Esrom
465
DIAGNOSTICS AND MEASUREMENTS
Ablation of thin polymer films on Si or metal substrate with the low intensity UV beam of an excimer laser or
mercury lamp: advantages of ellipsometric rate measurements
M.
Bolle
and
S. Lazare
471
Refractive indices of InAlAs and InGaAs/InP from
250
to
1900
nm determined by spectroscopic ellipsometry
H.W.
Dinges,
H.
Burkhard. R. Lösch,
H.
Nickel
and W.
Schlapp 477
Photoinduced transient reflectance investigation of process-induced near-surface defects in silicon
A. Esser, G. Maidorn and H.
Kurz 482
Laser-surface diagnostics of GaAs growth processes. I. The influence of surface contamination upon optical
second harmonic generation from GaAs
(100)
surfaces
M.E. Pemble. A. Stafford and A.G. Taylor
490
Laser-surface diagnostics of GaAs growth processes. II. Reflectance anisotropy studies of GaAs growth by
MBE
S.R. Armstrong. M.E. Pemble, A.G. Taylor, B.A. Joyce, J.H. Neave, J. Zhang and D.A.
Klug 493
Sensitivity of a modulated optical reflectance probe to process-induced lattice disorder
M. Murtagh, G.M.
Crean,
T.
Flaherty and C. Jeynes
497
Investigation of a semiconductor superlattice by use of grazing incidence X-ray diffraction
U. Pietsch. W.
Seifert.
J.-O. Fornell, H. Rhan, H.
Metzger,
S.
Rugel and J. Peisl
502
Grazing incidence X-ray diffraction on silicon after ion implantation and thermal annealing
S. Rugel. H.
Metzger,
G.
Wallner
and J. Peisl
507
Author index
511
Subject index
517
|
| any_adam_object | 1 |
| author2 | Boyd, Ian W. |
| author2_role | edt |
| author2_variant | i w b iw iwb |
| author_facet | Boyd, Ian W. |
| building | Verbundindex |
| bvnumber | BV004735915 |
| callnumber-first | Q - Science |
| callnumber-label | QC176 |
| callnumber-raw | QC176.84.S93 |
| callnumber-search | QC176.84.S93 |
| callnumber-sort | QC 3176.84 S93 |
| callnumber-subject | QC - Physics |
| classification_rvk | UH 5750 UQ 1100 UQ 2300 |
| classification_tum | FER 786f |
| ctrlnum | (OCoLC)24907598 (DE-599)BVBBV004735915 |
| dewey-full | 620/.44 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620/.44 |
| dewey-search | 620/.44 |
| dewey-sort | 3620 244 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Fertigungstechnik |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1991 Straßburg gnd-content |
| genre_facet | Konferenzschrift 1991 Straßburg |
| id | DE-604.BV004735915 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:16:56Z |
| institution | BVB |
| institution_GND | (DE-588)3010954-1 |
| isbn | 0444894195 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-002913886 |
| oclc_num | 24907598 |
| open_access_boolean | |
| owner | DE-384 DE-91 DE-BY-TUM DE-91G DE-BY-TUM DE-355 DE-BY-UBR DE-29T DE-634 DE-11 DE-188 |
| owner_facet | DE-384 DE-91 DE-BY-TUM DE-91G DE-BY-TUM DE-355 DE-BY-UBR DE-29T DE-634 DE-11 DE-188 |
| physical | XV, 535 S. Ill., graph. Darst. |
| publishDate | 1992 |
| publishDateSearch | 1992 |
| publishDateSort | 1992 |
| publisher | North-Holland |
| record_format | marc |
| series | European Materials Research Society: European Materials Research Society symposia proceedings |
| series2 | European Materials Research Society: European Materials Research Society symposia proceedings |
| spelling | Laser surface processing and characterization proceedings of Symposium E on Laser Surface Processing and Characterzation of the 1991 E-MRS Spring Conference, Strasbourg, France, May 28 - 31, 1991 ed.: I. W. Boyd Amsterdam [u.a.] North-Holland 1992 XV, 535 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier European Materials Research Society: European Materials Research Society symposia proceedings 24 Lasers in physics Congresses Photochemistry Congresses Thin films Surfaces Congresses Laser (DE-588)4034610-9 gnd rswk-swf Oberflächenbehandlung (DE-588)4042908-8 gnd rswk-swf Laserbearbeitung (DE-588)4139080-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1991 Straßburg gnd-content Oberflächenbehandlung (DE-588)4042908-8 s Laserbearbeitung (DE-588)4139080-5 s DE-604 Laser (DE-588)4034610-9 s 1\p DE-604 Boyd, Ian W. edt Symposium on Laser Surface Processing and Characterization 1991 Straßburg Sonstige (DE-588)3010954-1 oth Äquivalent Originalausgabe erschienen als Applied surface science ; 54 European Materials Research Society: European Materials Research Society symposia proceedings 24 (DE-604)BV004201591 24 Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=002913886&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Laser surface processing and characterization proceedings of Symposium E on Laser Surface Processing and Characterzation of the 1991 E-MRS Spring Conference, Strasbourg, France, May 28 - 31, 1991 European Materials Research Society: European Materials Research Society symposia proceedings Lasers in physics Congresses Photochemistry Congresses Thin films Surfaces Congresses Laser (DE-588)4034610-9 gnd Oberflächenbehandlung (DE-588)4042908-8 gnd Laserbearbeitung (DE-588)4139080-5 gnd |
| subject_GND | (DE-588)4034610-9 (DE-588)4042908-8 (DE-588)4139080-5 (DE-588)1071861417 |
| title | Laser surface processing and characterization proceedings of Symposium E on Laser Surface Processing and Characterzation of the 1991 E-MRS Spring Conference, Strasbourg, France, May 28 - 31, 1991 |
| title_auth | Laser surface processing and characterization proceedings of Symposium E on Laser Surface Processing and Characterzation of the 1991 E-MRS Spring Conference, Strasbourg, France, May 28 - 31, 1991 |
| title_exact_search | Laser surface processing and characterization proceedings of Symposium E on Laser Surface Processing and Characterzation of the 1991 E-MRS Spring Conference, Strasbourg, France, May 28 - 31, 1991 |
| title_full | Laser surface processing and characterization proceedings of Symposium E on Laser Surface Processing and Characterzation of the 1991 E-MRS Spring Conference, Strasbourg, France, May 28 - 31, 1991 ed.: I. W. Boyd |
| title_fullStr | Laser surface processing and characterization proceedings of Symposium E on Laser Surface Processing and Characterzation of the 1991 E-MRS Spring Conference, Strasbourg, France, May 28 - 31, 1991 ed.: I. W. Boyd |
| title_full_unstemmed | Laser surface processing and characterization proceedings of Symposium E on Laser Surface Processing and Characterzation of the 1991 E-MRS Spring Conference, Strasbourg, France, May 28 - 31, 1991 ed.: I. W. Boyd |
| title_short | Laser surface processing and characterization |
| title_sort | laser surface processing and characterization proceedings of symposium e on laser surface processing and characterzation of the 1991 e mrs spring conference strasbourg france may 28 31 1991 |
| title_sub | proceedings of Symposium E on Laser Surface Processing and Characterzation of the 1991 E-MRS Spring Conference, Strasbourg, France, May 28 - 31, 1991 |
| topic | Lasers in physics Congresses Photochemistry Congresses Thin films Surfaces Congresses Laser (DE-588)4034610-9 gnd Oberflächenbehandlung (DE-588)4042908-8 gnd Laserbearbeitung (DE-588)4139080-5 gnd |
| topic_facet | Lasers in physics Congresses Photochemistry Congresses Thin films Surfaces Congresses Laser Oberflächenbehandlung Laserbearbeitung Konferenzschrift 1991 Straßburg |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=002913886&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV004201591 |
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