ULSI science and technology, 1987: Proceedings of the 1. Internat. Symposium on Ultra Large Scale Integration Science and Technology
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | Undetermined |
| Veröffentlicht: |
Pennington, NJ
Electrochemical Soc.
1987
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| Schriftenreihe: | Electrochemical Society: Proceedings
87,11 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Literaturangaben |
| Beschreibung: | XI, 840 S. Ill., graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV004664987 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 920109s1987 ad|| |||| 10||| und d | ||
| 035 | |a (OCoLC)631760138 | ||
| 035 | |a (DE-599)BVBBV004664987 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | |a und | ||
| 049 | |a DE-91 |a DE-11 | ||
| 084 | |a ELT 355f |2 stub | ||
| 245 | 1 | 0 | |a ULSI science and technology, 1987 |b Proceedings of the 1. Internat. Symposium on Ultra Large Scale Integration Science and Technology |c ed. by S. Broydo ... |
| 264 | 1 | |a Pennington, NJ |b Electrochemical Soc. |c 1987 | |
| 300 | |a XI, 840 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Electrochemical Society: Proceedings |v 87,11 | |
| 500 | |a Literaturangaben | ||
| 650 | 0 | 7 | |a ULSI |0 (DE-588)4226286-0 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1987 |z Philadelphia Pa. |2 gnd-content | |
| 689 | 0 | 0 | |a ULSI |0 (DE-588)4226286-0 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Broydo, S. |e Sonstige |4 oth | |
| 711 | 2 | |a International Symposium on Ultra Large Scale Integration Science and Technology |n 1 |d 1987 |c Philadelphia, Pa. |j Sonstige |0 (DE-588)6013044-1 |4 oth | |
| 830 | 0 | |a Electrochemical Society: Proceedings |v 87,11 |w (DE-604)BV001900941 |9 87,11 | |
| 856 | 4 | 2 | |m GBV Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=002865806&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-002865806 | ||
Datensatz im Suchindex
| _version_ | 1804118783683461120 |
|---|---|
| adam_text | IMAGE 1
PROCEEDINGS OF THE FIRST INTERNATIONAL SYMPOSIUM ON ULTRA LARGE SCALE
INTEGRATION SCIENCE AND TECHNOLOGY
ULSI SCIENCE AND TECHNOLOGY/1987
EDITED BY
S. BROYDO ZYMOS CORPORATION SUNNYVALE, CALIFORNIA
CM. OSBURN MCNC RESEARCH TRIANGLE PARK, NORTH CAROLINA
BNIVERSITATSBIBLIQTHEK HANNOVER
TECHN. SCHE
INFORMAT.ONSBIBLIOTHEK
ASSISTANT EDITORS
J.M, ANDREWS
D.A. ANTONIADIS
W.M. BULLIS G.K. CELLER
D.B. FRASER
S. GOODWIN-JOHANSSON
G.J. HU
Y. LIDA
R.J. JACCODINE
H.J. LEVINSTEIN
E, MIDDLESWORTH
Y. NISHI
L.C. PARRILLO
J.R. PFIESTER
A. REISMAN
G.C. SCHWARTZ
A. SINHA
R.B. SWAROOP J. VAN DER SPIEGEL
A.M. VOSHCHENKOV D.N.K. WANG
ELECTRONICS AND DIELECTRICS AND INSULATION DIVISIONS
PROCEEDINGS VOLUME 87-11
THE ELECTROCHEMICAL SOCIETY, INC., 10 SOUTH MAIN ST., PENNINGTON, NJ
08534-2896
IMAGE 2
P/1/ * 7 TF~
TABLE OF CONTENTS
PREFACE HI
OVERVIEW 1
SYSTEM LIMITS ON ULTRA LARGE SCALE INTEGRATION, J. D. MEINDL (INVITED) 3
THE IMPACT OF ULSI OIL FUTURE INFORMATION PROCESSING SYSTEMS, H. SASAKI
(INVITED) 18
CMOS TECHNOLOGY STATUS AND CHALLENGES, Y. NISHI (INVITED) 24
CMOS TECHNOLOGY 41
AH ADVANCED CMOS TECHNOLOGY WITH NOVEL BIPOLAR TRANSISTORS, C. YAO, J.
TZOU, R. CHEUNG, H. CHAN, J. FUNG AND P. CHUANG 42
A 1 MICRON CMOS TECHNOLOGY WITH LOW TEMPERATURF PROCESSING, D. SHARMA,
S. GOODWIN-JOHANSSON, D-S. WEN, C. K. KIN AND C. H. OSBURN 49
SELECTIVE EPITAXIAL TECHNOLOGY FOR SCALED CMOS, M. ENDO, N. KASAI, H.
KITAJAMA AND A. ISHITANI (INVITED) 64
CHARACTERIZATION AND MODELING OF DUAL ION-IMPLANTED N+/P+ POLY GATES FOR
SUBMICRON CMOS, J. R. PFLESTER AND N. HERR 73
LATCH-UP STUDIES IN A 0.5 MICRON GATE CMOS TECHNOLOGY WITH RETROGRADE
N-WELL, VI. H. CHANG, L. K. WANG AND R. A. WACHNIK 80
THIN OXIDES 85
GROWTH OF ULTRA-THIN OXIDES ON SILICON - A REVIEW OF EXPERIMENTAL DATA
AND THEORETICAL MODELS, S. P. MURARKA (1987 CALLINAN AWARD ADDRESS) 87
ON THE MECHANISM OF INTRINSIC BREAKDOWN IN THIN DIELECTRICS, D. R.
WOLTERS AND A. T. A. ZEGERS-VAN DUYNHOVEN (INVITED) 101
SOME ASPECTS OF THIN DIELECTRICS FOR ULSI, K. WADA, T. ITO AND N.
TOYOKURA (INVITED) 119
KINETICS OF RAPID THERMAL OXIDATION OF (100) SI, V. MURALY AND S. P.
MURARKA 133
RAPID THERMAL GROWTH OF THIN SILICON DIELECTRICS FOR ULSI APPLICATIONS,
J, MULMAN 141
VIL
IMAGE 3
PROCESS INDUCED DEGRADATION OF THIN OXIDES, C. Y. WONG, T. N. NGUYEN, Y.
TAUR, D. S. ZICHERMAN, D. QUINLAN AND D. MOY 155
LITHOGRAPHY 167
PROSPECTS FOR NON OPTICAL LITHOGRAPHY FOR ULSI, K. HARADA (INVITED) 169
SUBMICRON FEATURE PATTERNING USING SPIN-ON GLASS IMAGE REVERSAL (SOGIR),
H. WATANABE AND Y. TODOKORO 178
IMAGE REVERSAL - APPLICATIONS FOR MICRON AND SUBMICRON PATTERNING, S. K.
JONES, R. C. CHAPMAN AND E. K. PAVELCHEK 190
APPLICATIONS OF A RIE TRILAYER PROCESS FOR DEVICE PATTERNING, S. K.
JONES, T. LOPEZ, Y-S. HO AND R. C. CHAPMAN 211
ALIGNMENT TO KEYS SPIN-COATED WITH RESIST, L. K. WHITE, V. L. FRANTZ,
JR., N. MISZKOWSKI AND J. CORBOY 224
SUBMICRON PATTERN EVALUATION BASED OIL A SUPER-COMPUTER ANALYSIS, Y.
IIDA, S. HASEGAVA AND T. HIDAKA 233
DRY ETCHING 245
DRY ETCHING - APPLICATIONS AND TRENDS, L. M. EPHRATH (INVITED) 247
REACTIVE-SPUTTERED ETCHING-INDUCED DAMAGE IN MOS DEVICES FOR VLSI/ULSI
CIRCUITS, L. MANCHANDA, R. J. SCHUTZ AND C. W. VAN-HISE 263
REMOVAL OF ORGANIC CONTAMINANTS FROM SILICON SURFACE AFTER REACTIVE IOII
ETCHING, 0. RUZYLLO, G. T. DURANKO, J. T. KENNEDY AND C. G. PANTANO 281
NUMERICAL SIMULATION FOR GAS FLOW AND MASS TRANSFER IN A DRY ETCHING
CHAMBER, J. KOBAYASHI, N. NAKAZATO AND K. HIRATSUKA 290
FABRICATION OF SUBMICROMETER SIZE STRUCTURES IN SI USING SF6/02 REACTIVE
ION ETCHING, A. R. FORTE AND D. D. RATHMAN 304
SILICON DEEP GROOVE REACTIVE ION ETCHING USING C2C1F5 AND SF6 MIXTURE
GAS, Y. J. JEON, S. H. PARK, H. J. YOO AND S. C. PARK 312
SHALLOW JUNCTIONS 319
SHALLOW JUNCTIONS AND THEIR IMPACT ON ULSI DEVICES, K. M. CHAM (INVITED)
320
VILI
IMAGE 4
P+/N JUNCTIONS USING GALLIUM IMPLANTS AND RAPID THERMAL ANNEALING, K.
MAEX, P. LIPPENS, L. VAN DEN HOVE AND R. DE KEERSMAECKER 330
DEFECT ASSOCIATED WITH TAIL DIFFUSION OF IMPLANTED BORON IN SILICON, J.
HUANG, D. FAN AND R. J. JACCODINE 340
FORMATION OF VERY SHALLOW JUNCTIONS IN POLY-SI EMITTER SELFALIGNED
BIPOLAR TRANSISTORS USING RAPID OPTICAL ANNEALING, H. J. BOHN, H. KABZA,
T. F. MEISTER AND H. WENDT 347
LOW TEMPERATURE EQUILIBRIA OF POINT DEFECTS INDUCED BY CONVENTIONAL AND
RAPID THERMAL ANNEALING IN CZ SILICON, E. SUSI, G. LULLI, A. POGGI AND
Z. SOUREK 358
SILICIDED SHALLOW JUNCTIONS 367
VERY SHALLOW JUNCTIONS FOR SUBMICRON CMOS TECHNOLOGY USING IMPLANTED TI
FOR SILICIDATION, B. DAVARI, Y. TAUR, F. M. D HEURLE AND C. Y. TING 368
USE OF THIN TITANIUM SALICIDES FOR SUBMICRON ULSI CMOS, D. MOY, S.
BASAVAIAH, H. PROTSCHKA, L, K. WANG, F. D HEURLE, J. WETZEL, S. BRODSKY
AND R. VOLANT 381
LOW RESISTIVITY, LOONM PM JUNCTIONS FOR SUBMICRON CMOS, E. LING, P.
MAGUIRE, H. S. GAMBLE AND B. M. ARMSTRONG 393
THE EFFECTS OF TITANIUM SILICIDE FORMATION ON DOPANT REDISTRIBUTION, C.
M. OSBURN, T. BRAT, D. SHARMA, N. PARIKH, W.-K. CHU, D. GRIFFIS, S.
CORCORAN AND S. LIN 402
EFFECTS OF INERT GAS PURITY ON TI SILICIDE FILMS, H. BERGER AND S.-Y.
LIN 434
FORMATION OF SHALLOW P+/N AND N+/P JUNCTIONS WITH COSI2, R. LIU, F. A.
BAIOCCHI, L. M, HEIMBROOK, J. KOVALCHICK, D. L. MALM, D. S. WILLIAMS AND
W. T. LYNCH 446
SILICIDED GATES 463
STUDY OF IMPLANTED DOPANT DISTRIBUTION IN POLYSILICONTANTALUM SILICIDE
GATE STRUCTURES, N. LIFSHITZ, F. A. BAIOCCHI AND N. MALM 465
CHARACTERIZATION OF CVD WSI2 POLYCIDE, H. TAMURA, H. ABE, H. UCHIDA, A.
SAKAMOTO, H. OHTSUKI, H. MATSUI AND M. INO 475
LX
IMAGE 5
MULTILEVEL INTERCONNECTS 483
HIGH DENSITY INTERCONNECT FOR ADVANCED VLSI PACKAGING, A. C. ADAMS, R.
S. BENTSON, W. J. BERTRAM, H. J. LEVINSTEIN, W. Q. MCKNIGHT, J. J. RUBIN
AND B. A. TER HAAR (INVITED) 485
INTERCONNECTION METALLIZATION FOR ADVANCED BIPOLAR DEVICES A REVIEW, G.
C. SCHWARTZ (INVITED) 493
MULTILEVEL METALLIZATION WITH PILLAR INTERCONNECTS AND PLAMARIZATION, E.
D. CASTEL, V. D. KULKARNI AND P. E. RILEY 544
ETCH-BACK PLANARIZATION TECHNOLOGY FOR INTERCONNECTION OF STACKED
STRUCTURES, K. MITSUHASHI, K. SHIOZAKU, K. OHTAKE, M. KOBA AND K. AWANE
557
ALUMINUM INTERCONNECT ENCAPSULATED WITH CVD TUNGSTEN, H. P. HEY AND A.
K. SINHA 565
RF-DC COUPLED MODE BIAS SPUTTERING FOR ULSI METALLIZATION, T. OHMI, H.
KUWABARA, T. SHIBATA AND T. KIYOTA 574
DEPENDENCE OF ELECTROMIGRATION LIFETIME ON FILM THICKNESS AND LINEWIDTH
OF SUBMICRON INTERCONNECTS, T. KWOK 593
ADVANCED DEVICE STRUCTURES 603
THE IMPACT OF TRENCH TECHNOLOGY ON ULSI, M. DOUGLAS AND B. DOERING
(INVITED) 605
TRENCH ISOLATION TO ENHANCE PROGRAMMING EFFICIENCY AND ISOLATION IN HIGH
DENSITY ULSI EPROMS, A. L. ESQUIVEL, A. T. MITCHELL, J. L. PATERSON, H.
L. TIGELAAR, B. R. RIEMENSCHNEIDER, D. W. DEVOUT, P. SHAH, T. M.
COFFMAN,
M. GILL, R. LAHIRY AND D. MCELROY 616
IMPROVED DEVICE PERFORMANCE AS A RESULT OF SHALLOW PHOSPHORUS
SOURCE-DRAINS BY RAPID THERMAL ANNEALING, A. L. BUTLER, J. N. ELLIS AND
N. F. STOGDALE 624
ANALYSIS AND OPTIMIZATION OF SUBMICRON MOSFETS WITH GATE BIRD S BEAKS,
H. M. MUEHLHOFF, P. MURKIN, K. H. KUESTERS, M. ORLOWSKI AND W. MUELLER
632
SELF ALIGNED BITLINE CONTACT FOR 4 MBIT DRAM, K. H. KUESTERS, H. M.
MUEHLHOFF, G. ENDERS, E. G. MOHR AND W. MUELLER 640
MODELING AND SIMULATION 651
COMPUTER AIDED DESIGN OF ULSI PROCESSING PRIOR TO FABRICATION H. SUNAMI,
T. MATSUZAWA, M. OHGO AND S. YAMAMOTO (INVITED) 652
IMAGE 6
INCORPORATION OF THE PUNCH-THROUGH EFFECT INTO THE GUMI1ELPOON MODEL, W.
HEIMSCH 660
CAPCAL - 3D CAPACITANCE CALCULATION FOR APPLICATION IN INTEGRATED
CIRCUITS, H. KLOSE, A. SEIDL AND M. SVOBODA 671
THREE-DIMENSIONAL TECHNOLOGY 683
THREE DIMENSIONAL IC AND ITS TECHNOLOGY, T. NISHIMURA AND Y. AKASAKA
(INVITED) 684
SI-ON-INSULATOR FOR ULSI APPLICATIONS, G. K. CELLER (INVITED) 696
ADVANCED CVD TECHNOLOGY, D. N. K. WANG, S. SOMEKH AND D. MAYDAN
(INVITED) 712
FORMATION OF THIN BURIED OXIDE LAYERS BY ION IMPLANTATION, A. E. WHITE,
K. T. SHORT, L. N. PFEIFFER AND K. W. WEST 723
EPITAXIAL DIELECTRICS FOR ULTRA LARGE SCALE INTEGRATION (ULSI) AND
THREE-DIMENSIONAL IC S, F. RADPOUR, S. ANANDAKUGAN, R. SINGH, M.
RAHMATI, W. L. KRISA, S. K. KAHNG, S. P. JOSHI, J. NARAYAN AND P. K.
CHATTERJEE 732
THE ENHANCED OXIDATION AT GRAIN BOUNDARIES OF THIN POLYCRYSTALLIME
SILICON FILMS FOR ULSI APPLICATIONS, W. YANGYUAN, T. JIANG, T. SHEN, F.
SUNQI AND Z. AIZHEN 743
ADVANCED MANUFACTURING ENVIROMENT 751
ULSI MANUFACTURING IN 1995, D. H. PHILLIPS (INVITED) 752
SUPER CLEAN ROOM SYSTEM - ULTRA CLEAN TECHNOLOGY FOR SUBMICRON LSI
FABRICATION, T. OHMI, N. MIKOSHIBA AND K. TSUBOUCHI (INVITED) 761
BEHAVIOR AND DETECTION OF PARTICLES IN VACUUM PROCESSES, R. A. BOWLING
AND G. B. LARRABEE 786
ULTRAPURE PIRANHA SOLUTION FOR ULSI APPLICATIONS, J. B. DAVISON AND J.
G. HOFFMAN 798
ULTRA CLEAN GAS DELIVERY SYSTEM FOR U1SI FABRICATION AND ITS EVALUATION,
T. OHMI, J. MUROTA, Y. KANNO, Y. MITSUI, K. SUGIYAMA, T. KAWASAKI AND H.
KAWANO 805
AUTHOR INDEX 823
SUBJECT INDEX 829
XI
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| any_adam_object | 1 |
| building | Verbundindex |
| bvnumber | BV004664987 |
| classification_tum | ELT 355f |
| ctrlnum | (OCoLC)631760138 (DE-599)BVBBV004664987 |
| discipline | Elektrotechnik |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01612nam a2200361 cb4500</leader><controlfield tag="001">BV004664987</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">920109s1987 ad|| |||| 10||| und d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)631760138</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV004664987</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">und</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-11</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 355f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">ULSI science and technology, 1987</subfield><subfield code="b">Proceedings of the 1. Internat. Symposium on Ultra Large Scale Integration Science and Technology</subfield><subfield code="c">ed. by S. Broydo ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Pennington, NJ</subfield><subfield code="b">Electrochemical Soc.</subfield><subfield code="c">1987</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XI, 840 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Electrochemical Society: Proceedings</subfield><subfield code="v">87,11</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">ULSI</subfield><subfield code="0">(DE-588)4226286-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1987</subfield><subfield code="z">Philadelphia Pa.</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">ULSI</subfield><subfield code="0">(DE-588)4226286-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Broydo, S.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="711" ind1="2" ind2=" "><subfield code="a">International Symposium on Ultra Large Scale Integration Science and Technology</subfield><subfield code="n">1</subfield><subfield code="d">1987</subfield><subfield code="c">Philadelphia, Pa.</subfield><subfield code="j">Sonstige</subfield><subfield code="0">(DE-588)6013044-1</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Electrochemical Society: Proceedings</subfield><subfield code="v">87,11</subfield><subfield code="w">(DE-604)BV001900941</subfield><subfield code="9">87,11</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">GBV Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=002865806&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-002865806</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1987 Philadelphia Pa. gnd-content |
| genre_facet | Konferenzschrift 1987 Philadelphia Pa. |
| id | DE-604.BV004664987 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:15:47Z |
| institution | BVB |
| institution_GND | (DE-588)6013044-1 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-002865806 |
| oclc_num | 631760138 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-11 |
| owner_facet | DE-91 DE-BY-TUM DE-11 |
| physical | XI, 840 S. Ill., graph. Darst. |
| publishDate | 1987 |
| publishDateSearch | 1987 |
| publishDateSort | 1987 |
| publisher | Electrochemical Soc. |
| record_format | marc |
| series | Electrochemical Society: Proceedings |
| series2 | Electrochemical Society: Proceedings |
| spelling | ULSI science and technology, 1987 Proceedings of the 1. Internat. Symposium on Ultra Large Scale Integration Science and Technology ed. by S. Broydo ... Pennington, NJ Electrochemical Soc. 1987 XI, 840 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Electrochemical Society: Proceedings 87,11 Literaturangaben ULSI (DE-588)4226286-0 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1987 Philadelphia Pa. gnd-content ULSI (DE-588)4226286-0 s DE-604 Broydo, S. Sonstige oth International Symposium on Ultra Large Scale Integration Science and Technology 1 1987 Philadelphia, Pa. Sonstige (DE-588)6013044-1 oth Electrochemical Society: Proceedings 87,11 (DE-604)BV001900941 87,11 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=002865806&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | ULSI science and technology, 1987 Proceedings of the 1. Internat. Symposium on Ultra Large Scale Integration Science and Technology Electrochemical Society: Proceedings ULSI (DE-588)4226286-0 gnd |
| subject_GND | (DE-588)4226286-0 (DE-588)1071861417 |
| title | ULSI science and technology, 1987 Proceedings of the 1. Internat. Symposium on Ultra Large Scale Integration Science and Technology |
| title_auth | ULSI science and technology, 1987 Proceedings of the 1. Internat. Symposium on Ultra Large Scale Integration Science and Technology |
| title_exact_search | ULSI science and technology, 1987 Proceedings of the 1. Internat. Symposium on Ultra Large Scale Integration Science and Technology |
| title_full | ULSI science and technology, 1987 Proceedings of the 1. Internat. Symposium on Ultra Large Scale Integration Science and Technology ed. by S. Broydo ... |
| title_fullStr | ULSI science and technology, 1987 Proceedings of the 1. Internat. Symposium on Ultra Large Scale Integration Science and Technology ed. by S. Broydo ... |
| title_full_unstemmed | ULSI science and technology, 1987 Proceedings of the 1. Internat. Symposium on Ultra Large Scale Integration Science and Technology ed. by S. Broydo ... |
| title_short | ULSI science and technology, 1987 |
| title_sort | ulsi science and technology 1987 proceedings of the 1 internat symposium on ultra large scale integration science and technology |
| title_sub | Proceedings of the 1. Internat. Symposium on Ultra Large Scale Integration Science and Technology |
| topic | ULSI (DE-588)4226286-0 gnd |
| topic_facet | ULSI Konferenzschrift 1987 Philadelphia Pa. |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=002865806&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV001900941 |
| work_keys_str_mv | AT broydos ulsiscienceandtechnology1987proceedingsofthe1internatsymposiumonultralargescaleintegrationscienceandtechnology AT internationalsymposiumonultralargescaleintegrationscienceandtechnologyphiladelphiapa ulsiscienceandtechnology1987proceedingsofthe1internatsymposiumonultralargescaleintegrationscienceandtechnology |