International Conference on Metallurgical Coatings and Thin Films: San Diego, 1990 1 (1990)
Gespeichert in:
| Körperschaft: | |
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| Format: | Tagungsbericht Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Lausanne
Elsevier Sequoia
1990
|
| Schriftenreihe: | Thin solid films
...; 193/194,1/2 Thin solid films ... |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XVIII, 564 S. Ill., graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 cc4500 | ||
|---|---|---|---|
| 001 | BV004658383 | ||
| 003 | DE-604 | ||
| 005 | 19980901 | ||
| 007 | t | ||
| 008 | 911217s1990 ad|| |||| 10||| undod | ||
| 035 | |a (OCoLC)631731013 | ||
| 035 | |a (DE-599)BVBBV004658383 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | |a und | ||
| 049 | |a DE-91 |a DE-91G | ||
| 111 | 2 | |a International Conference on Metallurgical Coatings |n 17 |d 1990 |c San Diego, Calif. |j Verfasser |0 (DE-588)5048753-X |4 aut | |
| 245 | 1 | 0 | |a International Conference on Metallurgical Coatings and Thin Films |b San Diego, 1990 |n 1 (1990) |c guest eds. B. D. Sartwell ... |
| 264 | 1 | |a Lausanne |b Elsevier Sequoia |c 1990 | |
| 300 | |a XVIII, 564 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Thin solid films |v ...; 193/194,1/2 | |
| 490 | 0 | |a Thin solid films |v ... | |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 700 | 1 | |a Sartwell, Bruce D. |e Sonstige |4 oth | |
| 773 | 0 | 8 | |w (DE-604)BV004658382 |g 1 |
| 856 | 4 | 2 | |m Digitalisierung TU Muenchen |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=002861638&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-002861638 | ||
Datensatz im Suchindex
| _version_ | 1804118777191727104 |
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| adam_text | ihm Sotul
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xiii
Contents
Preface
......................................
v
In memorium
...................................
vii
Publication schedule
............................... ix
Award winning papers
.............................. xi
Basic properties of thin films
Quasi-crystalline structure formation in thin films
............... 1
P. B.
Barna, A. Csanády.
G.
Radnóczi
(Budapest, Hungary),
К.
Urban
and U.
Timmer (Jülich. F.
R.G.)
Fundamental
studies of thin film growth
Monte Carlo simulations of ion-assisted selective deposition
......... 13
С
Nender, S. Berg (Uppsala, Sweden) and J. P.
Biersack
(Berlin,
F.R.G.)
Cathode voltage-gas composition film crystallography relationships for
sputter-deposited
vanadia
(V2O5)
........................ 18
C. R.
Aita.
L.-J.
Liou.
C-K.
Kwok.
R. C.
Lee and E. Kolawa
(Milwaukee, WI, U.S.A.)
Sputtered alloy coatings by
codeposition:
effects of bias voltage
........ 27
K. J. A. Mawella and J. A. Sheward
(
Kent, U.K.)
Molecular dynamics simulations of thin film diamond
............. 34
B. Pailthorpe and P.
Mahoń
(Sydney. New South Wales, Australia)
Crystallite growth kinetics in isothermally annealed sol gel films
....... 42
G. J. Exarhos (Richland. WA. U.S.A.) and M.
Aloi
(Boca Raton, FL.
U.S.A.)
Deposition technology
Maximizing step coverage during blanket tungsten low pressure chemical
vapor deposition
................................. 51
T. S. Cale. M.
К.
Jain and
G. B. Raupp
(Tempe.
AZ.
U.S.A.)
Reactive sputtering of molybdenum
....................... 61
A. F. Jankowski and L. R. Schravvyer (Livermore. CA, U.S.A.)
x¡v
CONTENTS
Thin films of amorphous germanium-carbon and germanium-nitrogen
alloys prepared by activated reactive evaporation
............... 72
S. Kumar and H. J.Trodahl (Wellington, New Zealand)
Deposition and etching technology
Ion-beam-deposited films produced by filtered arc evaporation
........ 77
P. J. Martin, R. P. Netterfield and T. J. Kinder (Sydney, New South
Wales, Australia)
Time-dependent simulation modelling of reactive sputtering
......... 84
E.
Kusano
and D. M.
Goulart
(Tsukuba, Japan)
Formation of gold clusters in the ionized cluster beam deposition technique
. 92
F. K. Urban III and A. Bernstein (Coral Gables, FL, U.S.A.)
Highly selective SiG^/Si reactive ion beam etching with low energy fluoro-
carbon ions
.................................... 100
E. Collard,
С
Lejeune, J. P. Grandchamp, J. P.
Gilles
and P. Scheiblin
(Orsay,
France)
A.c.
effects in asymmetric discontinuous metal films
.............. 110
J. E. Morris (Binghamton, NY, U.S.A.)
Sputtering effects related to thin film growth
Effects of an unbalanced magnetron in a unique dual-cathode, high rate
reactive sputtering system
............................ 117
S. L. Rohde (Evanston,
IL,
U.S.A.),
I. Petrov (Urbana,
IL,
U.S.A.),
W.
D.
Sproul, S.
A.
Barnett.
P. J.
Rudnik
and M. E.
Graham
(Evanston, IL,
U.S.A.)
Substrate effects from an unbalanced magnetron
................ 127
R. P. Howson,
H.A.
J afer and A. G. Spencer (Loughborough, U.K.)
Hollow cathode deposition of silicon dioxide films
............... 138
M. Gross, S. O. Kong,
C. M.
Horwitz and
C. Y. Kwok
(Kensington,
New South Wales, Australia)
Measurement of sputtered atom energy by observation of
Doppler
broaden¬
ing of emission lines from plasma
........................ 146
K. Kobayashi and Y. Uehara (Atsugi, Japan)
Energy fluxes in mixed microwave-r.f. plasma
................. 155
O. M. Kiittel, J. E. Klemberg-Sapieha,
L. Martinu
and
M. R.
Wertheimer (Montreal,
Que.,
Canada)
Role of kinetic energy of sputtered particles in thin film formation
...... 164
Y.
Taga
and Y. Gotoh (Aichi-ken, Japan)
An investigation into the variation in bombardment intensity from ion plating
discharges by sputter weight loss experiments
................. ! 71
K. S.
Fancey and A. Matthews (Hull, U.K.)
CONTENTS
XV
Argon
incorporation effects on the conductivity ofmctal layers
........ 181
V. Stambouli,
O. Burat,
D.
Bouchicr,
F.
Meyer,
J.
-P.
Gilles
and
G.
Gautherin
(Orsay,
France)
Diffusion and
interdiffusion
effects
Interfacial
reactions in Ag/SnTe thin film couples
............... 189
V. Marinkovic,
A. Prodan
(Ljubljana, Yugoslavia) and
C. L.
Bauer
(Pittsburgh, PA, U.S.A.)
On the microstructure-property relationship of
W
Ti (N)
diffusion barriers.
201
A. G. Dirks,
R. A. M.
Wolters
and
A. J. M.
Nellissen
(Eindhoven. The
Netherlands)
Epitaxy and heterostructure films
Defect passivation by hydrogen in
III—V
semiconductor epitaxial films
.... 211
A. Frova
and M. Capizzi (Rome, Italy)
Growth and
microstructural
properties of cadmium telluride thin films.
. . . 220
Т. С
Kuo, P. Ghosh, P.
Kornreich
(Syracuse, NY, U.S.A.) and J.
Beasock (Rome, NY, U.S.A.)
A contact potential difference study of the epitaxial growth of aluminum on
Pd(l
11)
films
................................... 227
A. Domenicucci and R. W. Vook (Syracuse, NY, U.S.A.)
VLSI
U
LSI
metalizat
ion
Step coverage of tungsten suicide films deposited by low pressure dichloro-
silane reduction of tungsten hexafluoride
.................... 234
G. B. Raupp, T. S.
Cale
and M. K. Jain
(Tempe,
AZ.
U.S.A.).
В.
Rogers
(Mesa, AZ, U.S.A.) and D. Srinivas(Phoenix, AZ, U.S.A.)
Lattice diffusion of boron in bulk cobalt disilicide
............... 244
C. Zaring, P. Gas.
B. G. Svensson,
M.
Östling
and
H. J.
Whitlow
(Kista-
Stockholm,
Sweden)
Influenceof arsenic ion beam mixing on palladium suicide formation
.....248
N.
Bibić,
M.
Milosavjević,
D.
Peruško
(Belgrade.
Yugoslavia)
and Y.
Serruys
(Gif sur Yvette, France)
Surface
and thin films analysis
technique
Significance of sample
rotation
in Auger electron spectroscopy sputter depth
profiling of thin films
............................... 258
A. Zalar (Ljubljana, Yugoslavia)
Xvi CONTENTS
Investigation of the correlation between surface properties and surface
chemistry of electroless nickel coatings
..................... 270
R. L. Moor and L.
Salvati,
Jr., (Edison, NJ, U.S.A.)
Hydrogen in metailo-organic chemically vapor-deposited ZnS thin films
determined by nuclear resonance reaction analysis
............... 280
P. B. Smith, B. E.
Gnade
(Dallas,
TX,
U.S.A.) and D. K. Marble
(Dentón,
TX,
U.S.A.)
Structural study of thin films by extended energy loss fine structure
spectroscopy
................................... 289
M. de
Crescenzi,
N.
Motta
(Rome, Italy), L. Lozzi, M. Passacantando,
P. Picozzi and S. Santucci
(L Aquila,
Italy)
Quantitative analysis of titanium nitride by Auger electron spectroscopy
. . . 305
D. G. Watson and W. F. Stickle (Eden Prairie, MN, U.S.A.) and A. C.
Diebold (Austin,
TX,
U.S.A.)
Study of temperature-dependent ultrathin oxide growth on Si(lll) using
variable-angle
spectroscopie ellipsometry
.................... 312
B.
N.
De
and J. A. Woollam (Lincoln,
NE,
U.S.A.)
Extended fine-Auger-structure investigation of discontinuous chromium films
318
M. de
Crescenzi (Rome, Italy), L. Lozzi, M. Passacantando, P. Picozzi
and S. Santucci
(L Aquila,
Italy)
Incorporation of
—
OH radicals in anodic silicon oxide films studied by
secondary-ion mass spectroscopy. X-ray photoelectron spectroscopy and
IR
analysis
...................................... 325
I. Montero,
L.
Galán,
E. de la Cai,
J. M.
Albella (Madrid,
Spain) and
J. C. Pivin
(Orsay, France)
Influence
of elastic and plastic strain on the stress state of thin film composites
333
H. Behnken and V. Hauk (Aachen, F.R.G.)
Non-destructive characterization techniques
Defects in coatings
................................ 342
P. D. Townsend (Brighton, U.K.)
Real-time
spectroscopie
ellipsometry study of the electrochemical deposition
of polypyrrole thin films
............................. 350
Y.-T. Kim, D. L.
Aliara,
R.
W.
Collins and
К.
Vedam
(University Park,
PA, U.S.A.)
Real-time
spectroscopie
ellipsometry for determination of the optical func¬
tions of ion-beam-deposited hydrogenated amorphous carbon
........ 361
Y. Cong, I. An, R. W. Collins, K.
Vedam,
H. S.
Witham,
L. J. Pilione
and R.
Messier (University Park, PA, U.S.A.)
A surface
IR
study of inorganic film formation GaAs, silicon and germanium
by aqueous NH4F, and HF
........................... 371
V. A. Burrows and J. Yota
(Tempe, AZ,
U.S.A.)
CONTENTS
XVII
CdTe and CdMTe (M = Fe, In, Sb)
thin film studies by
Mössbauer
spectroscopy and other techniques
....................... 382
F. Sanchez-Sinencio, J. G. Mendoza-Alvarez, O. Zelaya,
A. Herrera,
F.
Larios,
О.
A. Fregoso,
J.
M.
Figueroa
and G. Contreras-Puente, A. D.
Góngora
(Mexico, Mexico),
E. Galvao
da Silva
(Belo
Horizonte,
Brazil),
R.
В.
Scorzelli (Rio de Janeiro,
Brazil),
M. H.
Farias,
L.
Cota-
Araiza and G.
Soto
(Mexico, Mexico)
X-ray standing waves in Bragg diffraction and in total reflection regions using
Langmuir -Blodgett multilayers
......................... 395
S. I. Zheludeva (Moscow, U.S.S.R.), S. Lagomarsino(Rome, Italy),
N.
N.
Novikova, M. V. Kovalchuk (Moscow, U.S.S.R.) and F. Scarinci
(Rome, Italy)
Structural analysis of TiN films by
Seemann-
Bohlin X-ray diffraction
.... 401
V. Valvoda, R.
Kužel,
Jr., R.
Černý,
D.
Rafaja,
J.
Musil,
S.
Kadlec
(Prague,
Czechoslovakia) and A. J. Perry (Troy, MI, U.S.A.)
Comparison of tungsten and nickel oxide electrochromism in single films and
in all-solid-state devices
.............................409
C. R.
Ottermann,
Α.
Temmink
and K.
Bange
(Mainz, F.R.G.)
Microstructure
and mechanical
properlies
Electron optical techniques for
microstructural
and compositional analysis of
thin films
.....................................418
D. R.
McKenzie,
D. C.
Green, P.
D.
Swift,
D. J. H.
Cockayne (Sydney,
New South Wales, Australia), P. J. Martin, R. P. Netterfield and W. G.
Sainty (Lindfield, New South Wales, Australia)
The fine-scale
microstructure
of thin hard TiN and TiC coatings on steels
. . 431
J. C
Knight and T. F. Page (Newcastle upon Tyne, U.K.)
Analytical transmission electron microscopy characterization of plasma spray
synthesized TiB2-Fe coatings
.......................... 442
G. L Espérance, G.
Bottom (Montreal,
Que..
Canada) and S. Dallaire
(Boucherville,
Que.,
Canada)
Low temperature diffusion effects on
microstructural
changes in thick gold
films on silicon
..................................453
N.
Popović.
T.
Nenadović.
Ż.
Bogdanov, M.
Milić
and R.
Petrović
(Belgrade, Yugoslavia)
A contribution to the study of Poission s ratios and elastic constants on TiN,
ZrNandHfN
................................... 463
A. J. Perry (Troy, MI, U.S.A.)
Microelectrie devices
Digital applications of superconducting niobium films
............. 472
S. Kotani, A. Inoue. T.
Imamura
and S. Hasuo
(
Atsugi, Japan)
Xviii CONTENTS
Crystallinity of emitting layer and electroluminescence characteristics in
multicolour ZnS thin film electroluminescent device with a thick dielectric
ceramic insulating layer
............................. 481
S. Takata, T.
Minami
and T. Miyata (Ishikawa, Japan)
Effects of a phosphosilicate glass layer on the electro-optical performance of
thin film electroluminescent structures
.....................489
P. J. Pokela
(Espoo,
Finland)
Sputtered tungsten for deep
submicron
complementary metal-oxide-semi¬
conductor technology
.............................. 501
L.
Dori,
A. Megdanis, S. B.
Brodsky,
M.
Arienzo and S. A. Cohen
(Yorktown
Heights, NY, U.S.A.)
Ohmic contacts to
III—V
compound semiconductors
.............. 511
A. Piotrowska and E.
Kaminska
(Warsaw, Poland)
Schottky barrier at the indium tin oxide-n-GaAs interface: effect of surface
arsenic deficiency
................................. 528
N.
Balasubramanian and A. Subrahmanyam (Madras, India)
Characterization and properties of mixed films
Characterization of <x-A 2O3, K-AI2O3,
α-κ
multioxide coatings on cemented
carbides
...................................... 536
S. Vuorinen (Fagersta, Sweden) and J. Skogsmo
(Göteborg,
Sweden)
Interrelationship between processing, coating properties and functional
properties of steered arc physically vapour deposited (Ti,Al)N and (Ti,Nb)N
coatings
...................................... 547
J. R.
Roos,
J. P. Celis,
E. Vancoille (Leuven,
Belgium), H. Veltrop, S.
Boelens,
F. Jungblut
(Venlo,
The Netherlands), J. Ebberink and H.
Homberg
(Albstadt, F.R.G.)
Structure and properties of magnetron-sputtered Ti-V-N coatings
...... 557
O. Knotek,
A. Barimani, B. Bosserhoffand
F. Löffler
(Aachen, F.R.G.)
|
| any_adam_object | 1 |
| author_corporate | International Conference on Metallurgical Coatings San Diego, Calif |
| author_corporate_role | aut |
| author_facet | International Conference on Metallurgical Coatings San Diego, Calif |
| author_sort | International Conference on Metallurgical Coatings San Diego, Calif |
| building | Verbundindex |
| bvnumber | BV004658383 |
| ctrlnum | (OCoLC)631731013 (DE-599)BVBBV004658383 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01336nam a2200313 cc4500</leader><controlfield tag="001">BV004658383</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">19980901 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">911217s1990 ad|| |||| 10||| undod</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)631731013</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV004658383</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">und</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-91G</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">International Conference on Metallurgical Coatings</subfield><subfield code="n">17</subfield><subfield code="d">1990</subfield><subfield code="c">San Diego, Calif.</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)5048753-X</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">International Conference on Metallurgical Coatings and Thin Films</subfield><subfield code="b">San Diego, 1990</subfield><subfield code="n">1 (1990)</subfield><subfield code="c">guest eds. B. D. Sartwell ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Lausanne</subfield><subfield code="b">Elsevier Sequoia</subfield><subfield code="c">1990</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XVIII, 564 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Thin solid films</subfield><subfield code="v">...; 193/194,1/2</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Thin solid films</subfield><subfield code="v">...</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Sartwell, Bruce D.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="w">(DE-604)BV004658382</subfield><subfield code="g">1</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">Digitalisierung TU Muenchen</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=002861638&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-002861638</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV004658383 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:15:41Z |
| institution | BVB |
| institution_GND | (DE-588)5048753-X |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-002861638 |
| oclc_num | 631731013 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-91G DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM DE-91G DE-BY-TUM |
| physical | XVIII, 564 S. Ill., graph. Darst. |
| publishDate | 1990 |
| publishDateSearch | 1990 |
| publishDateSort | 1990 |
| publisher | Elsevier Sequoia |
| record_format | marc |
| series2 | Thin solid films |
| spelling | International Conference on Metallurgical Coatings 17 1990 San Diego, Calif. Verfasser (DE-588)5048753-X aut International Conference on Metallurgical Coatings and Thin Films San Diego, 1990 1 (1990) guest eds. B. D. Sartwell ... Lausanne Elsevier Sequoia 1990 XVIII, 564 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Thin solid films ...; 193/194,1/2 Thin solid films ... (DE-588)1071861417 Konferenzschrift gnd-content Sartwell, Bruce D. Sonstige oth (DE-604)BV004658382 1 Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=002861638&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | International Conference on Metallurgical Coatings and Thin Films San Diego, 1990 |
| subject_GND | (DE-588)1071861417 |
| title | International Conference on Metallurgical Coatings and Thin Films San Diego, 1990 |
| title_auth | International Conference on Metallurgical Coatings and Thin Films San Diego, 1990 |
| title_exact_search | International Conference on Metallurgical Coatings and Thin Films San Diego, 1990 |
| title_full | International Conference on Metallurgical Coatings and Thin Films San Diego, 1990 1 (1990) guest eds. B. D. Sartwell ... |
| title_fullStr | International Conference on Metallurgical Coatings and Thin Films San Diego, 1990 1 (1990) guest eds. B. D. Sartwell ... |
| title_full_unstemmed | International Conference on Metallurgical Coatings and Thin Films San Diego, 1990 1 (1990) guest eds. B. D. Sartwell ... |
| title_short | International Conference on Metallurgical Coatings and Thin Films |
| title_sort | international conference on metallurgical coatings and thin films san diego 1990 |
| title_sub | San Diego, 1990 |
| topic_facet | Konferenzschrift |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=002861638&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV004658382 |
| work_keys_str_mv | AT internationalconferenceonmetallurgicalcoatingssandiegocalif internationalconferenceonmetallurgicalcoatingsandthinfilmssandiego199011990 AT sartwellbruced internationalconferenceonmetallurgicalcoatingsandthinfilmssandiego199011990 |