Properties and characterization of amorphous carbon films:
Gespeichert in:
Format: | Buch |
---|---|
Sprache: | English |
Veröffentlicht: |
Zürich [u.a.]
Trans Tech Publ.
1990
|
Schriftenreihe: | Materials science forum
52/53 |
Schlagworte: | |
Online-Zugang: | Inhaltsverzeichnis |
Beschreibung: | Literaturangaben |
Beschreibung: | 701 S. Ill., graph. Darst. |
ISBN: | 0878496041 |
Internformat
MARC
LEADER | 00000nam a2200000 cb4500 | ||
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245 | 1 | 0 | |a Properties and characterization of amorphous carbon films |c ed. by John J. Pouch ... |
264 | 1 | |a Zürich [u.a.] |b Trans Tech Publ. |c 1990 | |
300 | |a 701 S. |b Ill., graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
490 | 1 | |a Materials science forum |v 52/53 | |
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Datensatz im Suchindex
_version_ | 1804118777144541184 |
---|---|
adam_text | TABLE
OF
CONTENTS
SECTION
I.
GENERAL
REVIEW
Ion
Beam and Ion-Assisted Deposition of Diamondlike Carbon Films
S. Aisenberg and F.H. Kimock
1
Plasma Deposition, Properties and Structure of Amorphous
Hydrogenated Carbon Films
P. Koidl, Ch. Wild, B. Dischler, J. Wagner and
M. Ramsteiner
41
Structure and Physical Properties of Amorphous Hydrogenated Carbon
(a-C:H) Films
H.C. Tsai
71
The
Microstructure
of Carbon Thin Films
D.C. Green, D.R.
McKenzie
and P.B. Lukins
103
Electronic Structure and Bonding of a-C:H
J. Robertson 125
The Chemical Vapor Deposition of Diamond
W.A. Yarbrough, A.
Inspektor
and R. Messier
151
SECTION II. PREPARATION METHODS
Deposition of Amorphous Hydrogenated Carbon Films in Low and High
Frequency Discharges
Y. Catherine 175
Preparation and Properties on High Density, Hydrogen Free Hard
Carbon Films with Direct Ion Beam on Arc Discharge Deposition
J-P. Hirvonen, J. Koskinen, R. Lappalainen and A. Anttila
197
Ion Beam Deposited Diamondlike Carbon Films
MJ. Mirtich 217
Carbon (sp3) Film Growth from Mass Selected Ion Beams:
Parametric Investigations and
Subplantation
Model
Y. Lifshitz, S.R.
Kasi
and J.W. Rabalais 237
Substrate Sputter Erosion Effects During a-C:H Film Formation
in a Glow Discharge 0Q1
S. Berg and B.Gelin /y
Novel Forms of Carbon From Polyiacrylonitrile): Films and Foams
CL. Renschler and A.P.
Sylwester
SECTION III. CHARACTERIZATION
Optical Properties and Local Atomic Bonding in Hydrogenated
Amorphous Carbon and Silicon-Carbon Alloys
F.W. Smith
Real Time Ellipsometry Characterization and Process Monitoring for
Amorphous Carbon Deposition
R.W. Collins
Raman Spectra of Diamondlike Amorphous Carbon Films
M.
Yoshikawa
.. . .
Nuclear Magnetic Resonance Studies of Amorphous Hydrogenated
Carbon
337
M.A. Petrich
Diamondlike Thin Films and Their Properties 4Q7
N.
Savvides
Radiation Effects in Amorphous Hydrogenated Carbon
R. Kalish and M.E.
Adel
a¿1
Diamondlike Carbon (DLC): Its Fabrication, Analysis and
Modification by Ion Beams
D.C. Ingram
Microbeam Analysis Studies of a-C:H Films
A.G. Fitzgerald and A.E. Henderson >
Characterization of Hydrogenated, Amorphous Carbon Thin Films
D.G.Thompson
Characterization of As-Prepared and Annealed Hydrogenated Carbon
Films
J. Gonzalez-Hernandez, B.S.
Chao
and D.A. Pawlik
543
SECTION IV. APPLICATIONS
Amorphous Hydrogenated Carbon (a-C:H) for Optical, Electrical and
Mechanical Applications
K.Enke
559
Diamondlike Carbon Applications in Infrared Optics and
Microelectronics
J.A. Woollam, B.N.
De, S.
Orzeszko,
N.J.
Ianno,
P.G. Snyder,
S.A.
Alterovitz, J.J. Pouch, R.L.C. Wu
and D.C. Ingram
577
Microstructure
and Physical Properties of Metal-Containing
Hydrogenated Carbon Films
C.P. Klages and R. Memming
609
Plasma-Deposited Amorphous Hydrogenated Carbon Films and Their
Tribological Properties
K. Miyoshi,
J
J. Pouch and
S.A.
Alterovitz
645
Investigation of the Mechanical Properties of
25
rnn and
90
nm,
Hard Carbon Films Residing on
Al
W.R. LaFontaine, T.W. Wu,
P.S.
Alexopoulos and D. Stone
657
Amorphous Carbon Films for Sensor Applications
F. Olcaytug, K. Pkker, R. ShaUauer, F. Kohl, G, Urban,
A. Jachimowicz, O. Prohaska, W. Fallman and K. Riedling
671
The
Photoconduction
of the a-Si:H on Carbon Graded a-SiC:H
Structure
T. Itoh and M. Nakatsugawa
689
Author Index
|
any_adam_object | 1 |
building | Verbundindex |
bvnumber | BV004658303 |
callnumber-first | Q - Science |
callnumber-label | QC176 |
callnumber-raw | QC176.84.M3 |
callnumber-search | QC176.84.M3 |
callnumber-sort | QC 3176.84 M3 |
callnumber-subject | QC - Physics |
classification_rvk | UP 7580 UQ 8100 |
ctrlnum | (OCoLC)21378971 (DE-599)BVBBV004658303 |
dewey-full | 620.112 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 620 - Engineering and allied operations |
dewey-raw | 620.112 |
dewey-search | 620.112 |
dewey-sort | 3620.112 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Physik |
format | Book |
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genre | (DE-588)1071861417 Konferenzschrift gnd-content |
genre_facet | Konferenzschrift |
id | DE-604.BV004658303 |
illustrated | Illustrated |
indexdate | 2024-07-09T16:15:41Z |
institution | BVB |
isbn | 0878496041 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-002861592 |
oclc_num | 21378971 |
open_access_boolean | |
owner | DE-91G DE-BY-TUM DE-83 DE-11 DE-188 |
owner_facet | DE-91G DE-BY-TUM DE-83 DE-11 DE-188 |
physical | 701 S. Ill., graph. Darst. |
publishDate | 1990 |
publishDateSearch | 1990 |
publishDateSort | 1990 |
publisher | Trans Tech Publ. |
record_format | marc |
series | Materials science forum |
series2 | Materials science forum |
spelling | Properties and characterization of amorphous carbon films ed. by John J. Pouch ... Zürich [u.a.] Trans Tech Publ. 1990 701 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials science forum 52/53 Literaturangaben Diamond thin films Amorpher Festkörper (DE-588)4120883-3 gnd rswk-swf Amorpher Zustand (DE-588)4306087-0 gnd rswk-swf Physikalische Chemie (DE-588)4045959-7 gnd rswk-swf Kohlenstoff (DE-588)4164538-8 gnd rswk-swf Analytische Chemie (DE-588)4129906-1 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Amorpher Festkörper (DE-588)4120883-3 s DE-604 Physikalische Chemie (DE-588)4045959-7 s Analytische Chemie (DE-588)4129906-1 s Kohlenstoff (DE-588)4164538-8 s Dünne Schicht (DE-588)4136925-7 s Amorpher Zustand (DE-588)4306087-0 s 1\p DE-604 Pouch, John J. Sonstige oth Materials science forum 52/53 (DE-604)BV001902147 52/53 Digitalisierung TU Muenchen application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=002861592&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
spellingShingle | Properties and characterization of amorphous carbon films Materials science forum Diamond thin films Amorpher Festkörper (DE-588)4120883-3 gnd Amorpher Zustand (DE-588)4306087-0 gnd Physikalische Chemie (DE-588)4045959-7 gnd Kohlenstoff (DE-588)4164538-8 gnd Analytische Chemie (DE-588)4129906-1 gnd Dünne Schicht (DE-588)4136925-7 gnd |
subject_GND | (DE-588)4120883-3 (DE-588)4306087-0 (DE-588)4045959-7 (DE-588)4164538-8 (DE-588)4129906-1 (DE-588)4136925-7 (DE-588)1071861417 |
title | Properties and characterization of amorphous carbon films |
title_auth | Properties and characterization of amorphous carbon films |
title_exact_search | Properties and characterization of amorphous carbon films |
title_full | Properties and characterization of amorphous carbon films ed. by John J. Pouch ... |
title_fullStr | Properties and characterization of amorphous carbon films ed. by John J. Pouch ... |
title_full_unstemmed | Properties and characterization of amorphous carbon films ed. by John J. Pouch ... |
title_short | Properties and characterization of amorphous carbon films |
title_sort | properties and characterization of amorphous carbon films |
topic | Diamond thin films Amorpher Festkörper (DE-588)4120883-3 gnd Amorpher Zustand (DE-588)4306087-0 gnd Physikalische Chemie (DE-588)4045959-7 gnd Kohlenstoff (DE-588)4164538-8 gnd Analytische Chemie (DE-588)4129906-1 gnd Dünne Schicht (DE-588)4136925-7 gnd |
topic_facet | Diamond thin films Amorpher Festkörper Amorpher Zustand Physikalische Chemie Kohlenstoff Analytische Chemie Dünne Schicht Konferenzschrift |
url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=002861592&sequence=000002&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
volume_link | (DE-604)BV001902147 |
work_keys_str_mv | AT pouchjohnj propertiesandcharacterizationofamorphouscarbonfilms |