Selected papers on ellipsometry:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
SPIE Optical Engineering Press
1991
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| Schriftenreihe: | Society of Photo-Optical Instrumentation Engineers: SPIE milestone series
27 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XXI, 707 S. Ill., graph. Darst. |
| ISBN: | 081940571X |
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| 245 | 1 | 0 | |a Selected papers on ellipsometry |c a publ. of SPIE - The International Society for Optical Engineering. R. M. A. Azzam, ed. |
| 246 | 1 | 3 | |a Ellipsometry |
| 264 | 1 | |a Bellingham, Wash. |b SPIE Optical Engineering Press |c 1991 | |
| 300 | |a XXI, 707 S. |b Ill., graph. Darst. | ||
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| 490 | 1 | |a Society of Photo-Optical Instrumentation Engineers: SPIE milestone series |v 27 | |
| 650 | 4 | |a Ellipsometry | |
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| adam_text | SELECTED PAPERS ON ELLIPSOMETRY :T , - * *JS-I * **...J.;K . * * IU : .
- 4* . . *;-.; -.5. H:R; -- V-. -- SELECTED PAPERS ON ELLIPSOMETRY
CONTENTS XVII PREFACE, R. M. A. AZZAM SECTION ONE HISTORICAL BACKGROUND
SECTION TWO DEFINITIONS AND CONVENTIONS SECTION THREE FOUNDATION PAPERS
SECTION FOUR FIRST HALF OF THIS CENTURY 3 * 12 21 31 41 56 72 85 89
MEASUREMENTS OF THE THICKNESS OF THIN FILMS BY OPTICAL MEANS, FROM
RAYLEIGH AND DRUDE TO LANGMUIR, AND THE DEVELOPMENT OF THE PRESENT
ELLIPSOMETER A. ROTHEN (SYMPOSIUM PROCEEDINGS ON ELLIPSOMETRY IN THE
MEASUREMENT OF SURFACES AND THIN FILMS 1964 ) HISTORICAL REMARKS ON THE
DRUDE FORMULAE A. VAFCEK (APPLIED OPTICS 1965) A CENTURY OF
ELLIPSOMETRY A. C. HALL (SURFACE SCIENCE 1969) DEFINITIONS AND
CONVENTIONS IN ELLIPSOMETRY R. H. MUELLER (SURFACE SCIENCE 1969) A
PERSPECTIVE ON ELLIPSOMETRY R. M. A. AZZAM (SURFACE SCIENCE 1976) UEBER
OBERFLAECHENSCHICHTEN. I. THIEL P. DRUDE (ANNALEN DER PHYSIK UND CHEMIE
1889) UEBER OBERFLAECHENSCHICHTEN. II. THIEL P. DRUDE (ANNALEN DER PHYSIK
UND CHEMIE 1889) ON REFLEXION FROM LIQUID SURFACES IN THE NEIGHBOURHOOD
OF THE POLARIZING ANGLE LORD RAYLEIGH (PHILOSOPHICAL MAGAZINE 1892) THE
THICKNESS OF SPONTANEOUSLY DEPOSITED PHOTOELECTRICALLY ACTIVE RUBIDIUM
FILMS, MEASURED OPTICALLY H. E. IVES, A. L. JOHNSRUD (JOURNAL OF THE
OPTICAL SOCIETY OF AMERICA 1927) POLARISATION ELLIPTIQUE PAR REFLEXION A
LA SURFACE DES LIQUIDES APPLICATION A 1 ETUDE DES COUCHES
MONOMOLECULAIRES SUPERFICIELLES M. CH. BOUHET (ANNALES DE PHYSIQUE 1931)
90 THE INVESTIGATION OF THIN SURFACE FILMS ON METALS BY MEANS OF
REFLECTED POLARIZED LIGHT L. TRONSTAD (TRANSACTIONS OF THE FARADAY
SOCIETY 1932) 97 THE VALIDITY OF DRUDE S OPTICAL METHOD OF INVESTIGATING
TRANSPARENT FILMS ON METALS L. TRONSTAD (TRANSACTIONS OF THE FARADAY
SOCIETY 1935) 100 THE OPTICAL CONSTANTS OF SEVERAL METALS IN VACUUM H.
M. O BRYAN (JOURNAL OF THE OPTICAL SOCIETY OF AMERICA 1936) 106 AN
OPTICAL INVESTIGATION OF OXIDE FILMS ON METALS C. E. LEBERKNIGHT, B.
LUSTMAN (JOURNAL OF THE OPTICAL SOCIETY OF AMERICA 1939) 114 THE
ELLIPSOMETER, AN APPARATUS TO MEASURE THICKNESSES OF THIN SURFACE FILMS
A. ROTHEN (REVIEW OF SCIENTIFIC INSTRUMENTS 1945) 119 OPTICAL METHODS OF
STUDYING FILMS ON REFLECTING BASES DEPENDING ON POLARISATION AND
INTERFERENCE PHENOMENA A. B. WINTERBOTTOM (TRANSACTIONS OF THE FARADAY
SOCIETY 1946) 124 THICKNESS OF THE HELIUM II FILM L. * JACKSON, E. J.
BUERGE (NATURE 1949) SECTION FIVE RENAISSANCE PERIOD 127 OPTICAL
MEASUREMENTS ON THIN FILMS OF CONDENSED GASES AT LOW TEMPERATURES J.
KRUGER, W. J. AMBS (JOURNAL OF THE OPTICAL SOCIETY OF AMERICA 1959) 131
DETERMINATION OF THE PROPERTIES OF FILMS ON SILICON BY THE METHOD OF
ELLIPSOMETRY R. J. ARCHER (JOURNAL OF THE OPTICAL SOCIETY OF AMERICA
1962) 139 MEASUREMENT OF THE THICKNESS AND REFRACTIVE INDEX OF VERY THIN
FILMS AND THE OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY F. L.
MCCRACKIN, E. PASSAGLIA, R. R. STROMBERG, H. L. STEINBERG (JOURNAL OF
RESEARCH OF THE NBS*A. PHYSICS AND CHEMISTRY 1963) 154 MEASUREMENT OF
OXYGEN ADSORPTION ON SILICON BY ELLIPSOMETRY R. J. ARCHER, G. W. GOBELI
(JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS 1965) SECTION SIX THEORY OF
LIGHT REFLECTION 165 THE REFLEXION OF LIGHT AT A SURFACE COVERED BY A
MONOMOLECULAR FILM C. STRACHAN (PROCEEDINGS OF THE CAMBRIDGE
PHILOSOPHICAL SOCIETY 1933) 173 THEORY OF ELLIPTIC POLARIZATION OF LIGHT
REFLECTED FROM ISOTROPIC MEDIA D. V. SIVUKHIN (SOVIET PHYSICS JETP 1956)
179 CALCULATION OF THE ELLIPSOMETRIC PARAMETERS CHARACTERIZING A
RANDOMLY ROUGH SURFACE BY MEANS OF THE STRATTON-CHU-SILVER INTEGRAL I.
OHLIDAL, F. LUKES (OPTICS COMMUNICATIONS 1973) 183 OPTICS OF
ANISOTROPIC LAYERED MEDIA: A NEW 4X4 MATRIX ALGEBRA P. YEH (SURFACE
SCIENCE 1980) 190 ELLIPSOMETRY OF SURFACE FILMS ON A UNIFORM LAYER J.
LEKNER (JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A 1988) 194 THEORY OF
LIGHT REFLECTION FROM A SUBSTRATE SPARSELY SEEDED WITH SPHERES:
COMPARISON WITH AN ELLIPSOMETRIC EXPERIMENT P. A. BOBBERT, J. VLIEGER,
R. GREEF (THIN SOLID FILMS 1988) SECTION SEVEN MODELING, INTER-
PRETATION, AND INVERSION 199 COMPUTATIONAL TECHNIQUES FOR THE USE OF THE
EXACT DRUDE EQUATIONS IN REFLECTION PROBLEMS F. L. MCCRACKIN, J. P.
COLSON (SYMPOSIUM PROCEEDINGS ON ELLIPSOMETRY IN THE MEASUREMENT OF
SURFACES AND THIN FILMS 1964) 210 ELLIPSOMETRY FOR MEASUREMENTS AT AND
BELOW MONOLAYER COVERAGE T. SMITH (JOURNAL OF THE OPTICAL SOCIETY OF
AMERICA 1968) 221 ELLIPSOMETRIC INVESTIGATION OF CHEMISORPTION ON CLEAN
SILICON (111) AND (100) SURFACES F. MEYER, G. A. BOOTSMA (SURFACE
SCIENCE 1969) 228 ERRORS ARISING FROM SURFACE ROUGHNESS IN ELLIPSOMETRIC
MEASUREMENT OF THE REFRACTIVE INDEX OF A SURFACE C. A. FENSTERMAKER, F.
L. MCCRACKIN (SURFACE SCIENCE 1969) 234 GROWTH OF SURFACE FILMS ON
SILVER D. K. BUERGE, J. M. BENNETT, R. L. PECK, H. E. BENNETT (SURFACE
SCIENCE 1969) 243 ELLIPSOMETRY OF A TRANSPARENT FILM OVERLAID ON A
TRANSPARENT SUBSTRATE HAVING A SURFACE LAYER K. KINOSITA, M. NISHIBORI,
M. YAMAMOTO, H. YOKOTA (OPTICA ACTA 1970) 249 PARAMETER-CORRELATION AND
COMPUTATIONAL CONSIDERATIONS IN MULTIPLE-ANGLE ELLIPSOMETRY M. M.
IBRAHIM, N. M. BASHARA (JOURNAL OF THE OPTICAL SOCIETY OF AMERICA 1971)
257 ELLIPSOMETRY OF ANISOTROPIC FILMS D. DEN ENGELSEN (JOURNAL OF THE
OPTICAL SOCIETY OF AMERICA 1971) 264 GENERALIZED ELLIPSOMETRIC METHOD
FOR THE ABSORBING SUBSTRATE COVERED WITH A TRANSPARENT-FILM SYSTEM.
OPTICAL CONSTANTS OF SILICON AT 3655 A S. S. SO, K. VEDAM (JOURNAL OF
THE OPTICAL SOCIETY OF AMERICA 1972) 272 ELLIPSOMETRIC DATA ANALYSIS OF
THE OXIDATION OF THIN MOLYBDENUM FILMS R. J. LEDERICH (JOURNAL OF THE
OPTICAL SOCIETY OF AMERICA 1972) 274 ELLIPSOMETER DATA ANALYSIS WITH A
SMALL PROGRAMMABLE DESK CALCULATOR A. R. REINBERG (APPLIED OPTICS 1972)
XI 276 EUIPSOMETRIC FUNCTION OF A FILM-SUBSTRATE SYSTEM: APPLICATIONS TO
THE DESIGN OF REFLECTION-TYPE OPTICAL DEVICES AND TO ELLIPSOMETRY R. M.
A. AZZAM, A.-R. M. ZAGHLOUL, N. M. BASHARA (JOURNAL OF THE OPTICAL
SOCIETY OF AMERICA 1975) 285 ON THE PROBLEMS OF MULTIPLE OVERLAYERS IN
ELLIPSOMETRY AND A NEW LOOK AT MULTIPLE ANGLE OF INCIDENCE ELLIPSOMETRY
O. HUNDERI (SURFACE SCIENCE 1976) 288 INVESTIGATION OF EFFECTIVE-MEDIUM
MODELS OF MICROSCOPIC SURFACE ROUGHNESS BY SPECTROSCOPIC ELLIPSOMETRY D.
E. ASPNES, J. B. THEETEN, F. HOTTIER (PHYSICAL REVIEW * 1979) 299 USE OF
FILM-FORMATION MODELS FOR THE INTERPRETATION OF ELLIPSOMETER
OBSERVATIONS R. H. MUELLER, *. G. SMITH (SURFACE SCIENCE 1980) 312
MICROSTRUCTURAL INFORMATION FROM OPTICAL PROPERTIES IN SEMICONDUCTOR
TECHNOLOGY D. E. ASPNES (SPIE PROCEEDINGS 1981) 320 ELLIPSOMETRY OF
UNSUPPORTED AND EMBEDDED THIN FILMS R. M. A. AZZAM (JOURNAL DE PHYSIQUE
1983) 324 SIMULTANEOUS DETERMINATION OF REFRACTIVE INDEX, ITS DISPERSION
AND DEPTH-PROFILE OF MAGNESIUM OXIDE THIN FILM BY SPECTROSCOPIC
ELLIPSOMETRY K. VEDAM, S. Y. KIM (APPLIED OPTICS 1989) 328
NONDESTRUCTIVE CHARACTERIZATION OF OXYGEN-ION-IMPLANTED
SILICON-ON-INSULATOR USING MULTIPLE-ANGLE ELLIPSOMETRY P. DUTTA, G. A.
CANDELA, D. CHANDLER-HOROWITZ, J. F. MARCHIANDO, M. C. PECKERAR (JOURNAL
OF APPLIED PHYSICS 1988) 331 ELLIPSOMETRY STUDY OF TWO-DIMENSIONAL PHASE
TRANSITIONS TH. RASING, H. HSIUNG, Y. R. SHEN, M. W. KIM (PHYSICAL
REVIEW A 1988) SECTION EIGHT INSTRU MENTATION 337 RECENT DEVELOPMENTS
IN INSTRUMENTATION IN ELLIPSOMETRY P. S. HAUGE (SURFACE SCIENCE 1980)
354 PHOTOELECTRIC ANALYSIS OF ELLIPTICALLY POLARIZED LIGHT J. F.
ARCHARD, P. L. CLEGG, A. M. TAYLOR (PROCEEDINGS OF THE PHYSICAL SOCIETY
1952) 365 OPTICAL CONSTANTS OF METALS IN THE INFRARED*EXPERIMENTAL
METHODS J. R. BEATTIE (PHILOSOPHICAL MAGAZINE 1955) 371 AUTOMATIC
ELLIPSOMETER. AUTOMATIC POLARIMETRY BY MEANS OF AN ADP POLARIZATION
MODULATOR III H. TAKASAKI (APPLIED OPTICS 1966) 377 A COMPUTER-OPERATED
FOLLOWING ELLIPSOMETER J. L. ORD, B. L. WILLS (APPLIED OPTICS 1967) 382
OPTICAL MEASUREMENTS ON LIQUID METALS USING A NEW ELLIPSOMETER T. E.
FABER, N. V. SMITH (JOURNAL OF THE OPTICAL SOCIETY OF AMERICA 1968) 389
AN IMPROVED METHOD FOR HIGH REFLECTIVITY ELLIPSOMETRY BASED ON A NEW
POLARIZATION MODULATION TECHNIQUE S. N. JASPERSON, S. E. SCHNATTERLY
(REVIEW OF SCIENTIFIC INSTRUMENTS 1969) 396 A HIGH SPEED PRECISION
AUTOMATIC ELLIPSOMETER B. D. CAHAN, R. F. SPANIER (SURFACE SCIENCE 1969)
. 402 DESIGN AND OPERATION OF ETA, AN AUTOMATED ELLIPSOMETER P. S.
HAUGE, F. H. DILL (IBM JOURNAL OF RESEARCH AND DEVELOPMENT 1973) 420
FAST SELF-COMPENSATING ELLIPSOMETER H. J. MATHIEU, D. E. MCCLURE, R. H.
MUELLER (REVIEW OF SCIENTIFIC INSTRUMENTS 1974) 425 HIGH PRECISION
SCANNING ELLIPSOMETER D. E. ASPNES, A. A. STUDNA (APPLIED OPTICS 1975)
434 ANALYSIS OF A NOVEL ELLIPSOMETRIC TECHNIQUE WITH SPECIAL ADVANTAGES
FOR INFRARED SPECTROSCOPY R. W. STOBIE, B. RAO, M. J. DIGNAM (JOURNAL OF
THE OPTICAL SOCIETY OF AMERICA 1975) 438 A NEW ELLIPSOMETRIC METHOD FOR
MEASUREMENTS ON SURFACES AND SURFACE LAYERS M. STENBERG, T. SANDSTROEM,
L. STIBLERT (MATERIALS SCIENCE AND ENGINEERING 1980) 443 FAST
POLARIZATION MODULATED ELLIPSOMETER USING A MICROPROCESSOR SYSTEM FOR
DIGITAL FOURIER ANALYSIS B. DREVILLON, J. PERRIN, R. MARBOT, A. VIOLET,
J. L. DALBY (REVIEW OF SCIENTIFIC INSTRUMENTS 1982) 452 A RETARDATION
MODULATION ELLIPSOMETER FOR STUDYING FAST SURFACE TRANSIENTS A.
MORITANI, Y. OKUDA, J. NAKAI (JOURNAL DE PHYSIQUE 1983) 455 PERFORMANCE
OF AN AUTOMATED ROTATING-DETECTOR ELLIPSOMETER D. C. NICK, R. M. A.
AZZAM (REVIEW OF SCIENTIFIC INSTRUMENTS 1989) SECTION NINE NOVEL
TECHNIQUES 465 INTERF EROMETRIC ELLIPSOMETRY H. F. HAZEBROEK, A. A.
HOLSCHER (JOURNAL OF PHYSICS E: SCIENTIFIC INSTRUMENTS 1973) 470
INVESTIGATION OF THE METAL-ELECTROLYTE INTERFACE USING SURFACE PLASMA
WAVES WITH ELLIPSOMETRIC DETECTION F. ABELES, T. LOPEZ-RIOS, A.
TADJEDDINE (SOLID STATE COMMUNICATIONS 1975) 475 ELLIPSOMETRY AT A
SPHERICAL OBJECT AND ITS APPLICATION TO THE DETERMINATION OF THE OPTICAL
CONSTANTS OF MERCURY FROM THE MERCURY-AIR INTERFACE M. M. J. PIETERSE,
M. SLUYTERS-REHBACH, J. H. SLUYTERS (JOURNAL OF THE OPTICAL SOCIETY OF
AMERICA 1979) XUL 477 AIDER (ANGLE-OF-INCIDENCE DERIVATIVE ELLIPSOMETRY
AND REFLECTOMETRY)*IMPLEMENTATION AND APPLICATION V. M. BERMUDEZ
(SURFACE SCIENCE 1980) 483 NEW ELLIPSOMETRY REALIZED BY THE USE OF A
STABILIZED TWO- FREQUENCY LASER N. UMEDA, H. TAKASAKI (SURFACE SCIENCE
1980) 487 PERPENDICULAR-INCIDENCE NULL ELLIPSOMETRY OF SURFACES WITH
ARBITRARY ANISOTROPY R. M. A. AZZAM (OPTICAL ENGINEERING 1981) 491
DIVISION-OF-AMPLITUDE PHOTOPOLARIMETER (DOAP) FOR THE SIMULTANEOUS
MEASUREMENT OF ALL FOUR STOKES PARAMETERS OF LIGHT R. M. A. AZZAM
(OPTICA ACTA 1982) 495 ARRANGEMENT OF FOUR PHOTODETECTORS FOR MEASURING
THE STATE OF POLARIZATION OF LIGHT R. M. A. AZZAM (OPTICS LETTERS 1985)
SECTION TEN PRECISION AND * * ACCURACY CONSIDERA TIONS : * * * .
. ... SECTION ELEVEN SPATIALLY RESOLVED AND IMAGING ELLIPSOMETRY 501 508
517 529 535 544 * 549 554 569 FORMULAS FOR USING WAVE PLATES IN
ELLIPSOMETRY D. A. HOLMES, D. L. FEUCHT (JOURNAL OF THE OPTICAL SOCIETY
OF AMERICA 1967) MEASUREMENT AND CORRECTION OF FIRST-ORDER ERRORS IN
ELLIPSOMETRY D. E. ASPNES (JOURNAL OF THE OPTICAL SOCIETY OF AMERICA
1971) ELLIPSOMETRY WITH IMPERFECT COMPONENTS INCLUDING INCOHERENT
EFFECTS R. M. A. AZZAM, N. M. BASHARA (JOURNAL OF THE OPTICAL SOCIETY OF
AMERICA 1971) PRECISION BOUNDS TO ELLIPSOMETER SYSTEMS D. E. ASPNES
(APPLIED OPTICS 1975) SYSTEMATIC AND RANDOM ERRORS IN ROTATING-ANALYZER
ELLIPSOMETRY J. M. M. DE NIJS, A. VAN SILFHOUT (JOURNAL OF THE OPTICAL
SOCIETY OF AMERICA A 1988) NONLINEARITY CORRECTIONS FOR AMPLITUDE
MEASUREMENT FROM HADAMARD SUMS-APPLICATION TO A ROTATING POLARIZER
ELLIPSOMETER G. ZALCZER (REVIEW OF SCIENTIFIC INSTRUMENTS 1988)
DETECTION OF THICKNESS UNIFORMITY OF FILM LAYERS IN SEMICONDUCTOR
DEVICES BY SPATIALLY RESOLVED ELLIPSO- INTERFEROMETRY T. MISHIMA, *. *
KAO (OPTICAL ENGINEERING 1982) SPATIALLY RESOLVED ELLIPSOMETRY M. ERMAN,
J. B. THEETEN (JOURNAL OF APPLIED PHYSICS 1986) PRECISION ELLIPSOMETRY
BASED ON A FOCUSED LIGHT BEAM, PART 1 D. O. BARSUKOV, G. M. GUSAKOV, A.
A. KOMARNITSKII (OPTICS AND SPECTROSCOPY 1988) XIV SECTION TWELVE
KINETIC AND TIME- RESOLVED ELLIPSOMETRY 573 583 592 596 604 608 615
DYNAMIC IMAGING MICROELLIPSOMETRY: THEORY, SYSTEM DESIGN, AND
FEASIBILITY DEMONSTRATION R. F. COHN, J. W. WAGNER, J. KRUGER {APPLIED
OPTICS 1988) CONTINUOUS ELLIPSOMETRIC DETERMINATION OF THE OPTICAL
CONSTANTS AND THICKNESS OF A SILVER FILM DURING DEPOSITION T. YAMAGUCHI,
S. YOSHIDA, A. KINBARA (JAPANESE JOURNAL OF APPLIED PHYSICS 1969)
PICOSECOND ELLIPSOMETRY OF TRANSIENT ELECTRON-HOLE PLASMAS IN GERMANIUM
D. H. AUSTON, * V. SHANK (PHYSICAL REVIEW LETTERS 1974) ELLIPSOMETRIC
ASSESSMENT OF (GA, AL) AS/GAAS EPITAXIAL LAYERS DURING THEIR GROWTH IN
AN ORGANOMETALLIC VPE SYSTEM J. B. THEETEN, F. HOTTIER, J. HALLAIS
(JOURNAL OF CRYSTAL GROWTH 1979) TIME-RESOLVED ELLIPSOMETRY MEASUREMENTS
OF THE OPTICAL PROPERTIES OF SILICON DURING PULSED EXCIMER LASER
IRRADIATIONS G. E. JELLISON, JR., D. H. LOWNDES (APPLIED PHYSICS LETTERS
1985 ) KINETIC ELLIPSOMETRY APPLIED TO SOFT X-RAY MULTILAYER GROWTH
CONTROL PH. HOUDY (REVUE DE PHYSIQUE APPLIQUEE 1988) IN SITU
ELLIPSOMETRY AS A DIAGNOSTIC OF THIN-FILM GROWTH: STUDIES OF AMORPHOUS
CARBON R. W. COLLINS (JOURNAL OF VACUUM SCIENCE TECHNOLOGY A 1989)
SECTION THIRTEEN SPECTRO SCOPIC ELLIPSOMETRY 625 ANALYSIS OF
SEMICONDUCTOR MATERIALS AND STRUCTURES BY SPECTROELLIPSOMETRY D. E.
ASPNES (SPIE PROCEEDINGS 1988) 639 POLARIMETRIE DETERMINATION OF
ABSORPTION SPECTRA OF THIN FILMS ON METAL. I. INTERPRETATION OF OPTICAL
DATA L. S. BARTEIL, D. CHURCHILL (JOURNAL OF PHYSICAL CHEMISTRY 1961)
645 SPECTROSCOPIC ELLIPSOMETRY IN THE INFRARED A. ROSELER (INFRARED
PHYSICS 1981) 652 VARIABLE ANGLE OF INCIDENCE SPECTROSCOPIC
ELLIPSOMETRY: APPLICATION TO GAAS-AL^GAJ*XAS MULTIPLE HETEROSTRUCTURES
P. G. SNYDER, M. * ROST, G. H. BU-ABBUD, J. A. WOOLAM, S. A. ALTEROVITZ
(JOURNAL OF APPLIED PHYSICS 1986) 662 OPTICAL CONSTANTS OF (GAAS^-CALAS^
[N = 2-20] SUPERLATTICES H. ANMA, T. YAMAGUCHI, H. OKUMURA, S. YOSHIDA
(PHYSICA A 1989) 664 ELLIPSOMETRIC MEASUREMENTS OF HIGH-T C COMPOUNDS M.
GARRIGA, J. HUMLICEK, J. BARTH, R. L. JOHNSON, M. CARDONA (JOURNAL OF
THE OPTICAL SOCIETY OF AMERICA * 1989) XV SECTION FOURTEEN GENERALIZED
ELLIPSOMETRY SECTION FIFTEEN FIR, MICROWAVE, AND ELASTIC- WAVE
ELLIPSOMETRY 671 ELLIPSOMETRIC MEASUREMENT OF THE POLARIZATION TRANSFER
FUNCTION OF AN OPTICAL SYSTEM R. M. A. AZZAM, N. M. BASHARA (JOURNAL OF
THE OPTICAL SOCIETY OF AMERICA 1972) 676 PHOTOPOLARIMETRIC MEASUREMENT
OF THE MUELLER MATRIX BY FOURIER ANALYSIS OF A SINGLE DETECTED SIGNAL R.
M. A. AZZAM (OPTICS LETTERS 1978) 679 POLARIZED LIGHT-SCATTERING MATRIX
ELEMENTS FOR SELECT PERFECT AND PERTURBED OPTICAL SURFACES V. J.
IAFELICE, W. S. BICKEL (APPLIED OPTICS 1987) 687 EPITAXIAL LAYER
THICKNESS MEASUREMENT BY FAR INFRARED ELLIPSOMETRY R. O. DENICOLA, M. A.
SAIFI, R. E. FRAZEE (APPLIED OPTICS 1972) 693 MEASUREMENT OF ELECTRICAL
CONDUCTIVITY OF OXIDES AT HIGH TEMPERATURES BY MICROWAVE ELLIPSOMETRY T.
SAKURAI, S. MOCHIZUKI, M. ISHIGAME (HIGH TEMPERATURES *HIGH PRESSURES
1975) 700 AN ELASTIC-WAVE ELLIPSOMETER FOR MEASUREMENT OF MATERIAL
PROPERTY VARIATIONS R. B. THOMPSON, * F. VASILE (APPLIED PHYSICS LETTERS
1979) 703 AUTHOR INDEX 705 SUBJECT INDEX XVI
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| discipline | Physik |
| format | Book |
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| genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content |
| genre_facet | Aufsatzsammlung |
| id | DE-604.BV004648922 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:15:32Z |
| institution | BVB |
| isbn | 081940571X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-002855000 |
| oclc_num | 213830245 |
| open_access_boolean | |
| owner | DE-12 DE-355 DE-BY-UBR DE-384 DE-29T DE-83 |
| owner_facet | DE-12 DE-355 DE-BY-UBR DE-384 DE-29T DE-83 |
| physical | XXI, 707 S. Ill., graph. Darst. |
| publishDate | 1991 |
| publishDateSearch | 1991 |
| publishDateSort | 1991 |
| publisher | SPIE Optical Engineering Press |
| record_format | marc |
| series | Society of Photo-Optical Instrumentation Engineers: SPIE milestone series |
| series2 | Society of Photo-Optical Instrumentation Engineers: SPIE milestone series |
| spelling | Selected papers on ellipsometry a publ. of SPIE - The International Society for Optical Engineering. R. M. A. Azzam, ed. Ellipsometry Bellingham, Wash. SPIE Optical Engineering Press 1991 XXI, 707 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Society of Photo-Optical Instrumentation Engineers: SPIE milestone series 27 Ellipsometrie (DE-588)4152025-7 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Ellipsometrie (DE-588)4152025-7 s DE-604 Azzam, Rasheed M. Sonstige oth Society of Photo-Optical Instrumentation Engineers: SPIE milestone series 27 (DE-604)BV004154905 27 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=002855000&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Selected papers on ellipsometry Society of Photo-Optical Instrumentation Engineers: SPIE milestone series Ellipsometry Ellipsometrie (DE-588)4152025-7 gnd |
| subject_GND | (DE-588)4152025-7 (DE-588)4143413-4 |
| title | Selected papers on ellipsometry |
| title_alt | Ellipsometry |
| title_auth | Selected papers on ellipsometry |
| title_exact_search | Selected papers on ellipsometry |
| title_full | Selected papers on ellipsometry a publ. of SPIE - The International Society for Optical Engineering. R. M. A. Azzam, ed. |
| title_fullStr | Selected papers on ellipsometry a publ. of SPIE - The International Society for Optical Engineering. R. M. A. Azzam, ed. |
| title_full_unstemmed | Selected papers on ellipsometry a publ. of SPIE - The International Society for Optical Engineering. R. M. A. Azzam, ed. |
| title_short | Selected papers on ellipsometry |
| title_sort | selected papers on ellipsometry |
| topic | Ellipsometry Ellipsometrie (DE-588)4152025-7 gnd |
| topic_facet | Ellipsometry Ellipsometrie Aufsatzsammlung |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=002855000&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV004154905 |
| work_keys_str_mv | AT azzamrasheedm selectedpapersonellipsometry AT azzamrasheedm ellipsometry |