Sputtering by particle bombardment: 3 Characteristics of sputtered particles : technical applications
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Berlin
Springer
1991
|
| Schriftenreihe: | Topics in Applied Physics
64 |
| Schlagworte: | |
| Beschreibung: | XIII, 410 S. Ill., graph. Darst. |
| ISBN: | 3540534288 0387534288 9783662311042 |
Internformat
MARC
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| 245 | 1 | 0 | |a Sputtering by particle bombardment |n 3 |p Characteristics of sputtered particles : technical applications |c ed. by R. Behrisch ... |
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Datensatz im Suchindex
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| author_GND | (DE-588)1031698396 |
| building | Verbundindex |
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| classification_rvk | UP 9350 |
| ctrlnum | (OCoLC)490230450 (DE-599)BVBBV004589729 |
| discipline | Physik |
| format | Book |
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| id | DE-604.BV004589729 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:14:42Z |
| institution | BVB |
| isbn | 3540534288 0387534288 9783662311042 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-002821895 |
| oclc_num | 490230450 |
| open_access_boolean | |
| owner | DE-12 DE-91G DE-BY-TUM DE-703 DE-355 DE-BY-UBR DE-29T DE-19 DE-BY-UBM DE-83 DE-188 DE-384 |
| owner_facet | DE-12 DE-91G DE-BY-TUM DE-703 DE-355 DE-BY-UBR DE-29T DE-19 DE-BY-UBM DE-83 DE-188 DE-384 |
| physical | XIII, 410 S. Ill., graph. Darst. |
| publishDate | 1991 |
| publishDateSearch | 1991 |
| publishDateSort | 1991 |
| publisher | Springer |
| record_format | marc |
| series | Topics in Applied Physics |
| series2 | Topics in Applied Physics Topics in applied physics |
| spelling | Sputtering by particle bombardment 3 Characteristics of sputtered particles : technical applications ed. by R. Behrisch ... Berlin Springer 1991 XIII, 410 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Topics in Applied Physics 64 Topics in applied physics Pulvérisation cathodique ram Behrisch, Rainer 1934-2011 Sonstige (DE-588)1031698396 oth (DE-604)BV002356009 3 Erscheint auch als Online-Ausgabe 978-3-540-46881-3 Topics in Applied Physics 64 (DE-604)BV008007504 64 |
| spellingShingle | Sputtering by particle bombardment Topics in Applied Physics Pulvérisation cathodique ram |
| title | Sputtering by particle bombardment |
| title_auth | Sputtering by particle bombardment |
| title_exact_search | Sputtering by particle bombardment |
| title_full | Sputtering by particle bombardment 3 Characteristics of sputtered particles : technical applications ed. by R. Behrisch ... |
| title_fullStr | Sputtering by particle bombardment 3 Characteristics of sputtered particles : technical applications ed. by R. Behrisch ... |
| title_full_unstemmed | Sputtering by particle bombardment 3 Characteristics of sputtered particles : technical applications ed. by R. Behrisch ... |
| title_short | Sputtering by particle bombardment |
| title_sort | sputtering by particle bombardment characteristics of sputtered particles technical applications |
| topic | Pulvérisation cathodique ram |
| topic_facet | Pulvérisation cathodique |
| volume_link | (DE-604)BV002356009 (DE-604)BV008007504 |
| work_keys_str_mv | AT behrischrainer sputteringbyparticlebombardment3 |