Proceedings of the International Conference on Microlithography: September 20 - 22, 1988, Vienna, Austria
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Amsterdam u.a.
North-Holland u.a.
1989
|
| Schriftenreihe: | Microelectronic engineering
9 |
| Schlagworte: | |
| Beschreibung: | Literaturangaben. - Einzelaufnahme eines Zs.-Bandes |
| Beschreibung: | 638 S. Ill., graph. Darst. |
Internformat
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| 111 | 2 | |a International Conference on Microlithography |n 14 |d 1988 |c Wien |j Verfasser |0 (DE-588)1220225-3 |4 aut | |
| 245 | 1 | 0 | |a Proceedings of the International Conference on Microlithography |b September 20 - 22, 1988, Vienna, Austria |c Microcircuit Engineering 88. Ed. by F. Paschke ... |
| 264 | 1 | |a Amsterdam u.a. |b North-Holland u.a. |c 1989 | |
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| 490 | 0 | |a Microelectronic engineering |v 9 | |
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Datensatz im Suchindex
| _version_ | 1804118511651389440 |
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| author_corporate | International Conference on Microlithography Wien |
| author_corporate_role | aut |
| author_facet | International Conference on Microlithography Wien |
| author_sort | International Conference on Microlithography Wien |
| building | Verbundindex |
| bvnumber | BV004322793 |
| classification_tum | ELT 285f |
| ctrlnum | (OCoLC)630540314 (DE-599)BVBBV004322793 |
| discipline | Elektrotechnik |
| format | Conference Proceeding Book |
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| genre_facet | Konferenzschrift 1988 Wien |
| id | DE-604.BV004322793 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:11:28Z |
| institution | BVB |
| institution_GND | (DE-588)1220225-3 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-002688172 |
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| owner_facet | DE-91 DE-BY-TUM |
| physical | 638 S. Ill., graph. Darst. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | North-Holland u.a. |
| record_format | marc |
| series2 | Microelectronic engineering |
| spelling | International Conference on Microlithography 14 1988 Wien Verfasser (DE-588)1220225-3 aut Proceedings of the International Conference on Microlithography September 20 - 22, 1988, Vienna, Austria Microcircuit Engineering 88. Ed. by F. Paschke ... Amsterdam u.a. North-Holland u.a. 1989 638 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Microelectronic engineering 9 Literaturangaben. - Einzelaufnahme eines Zs.-Bandes Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1988 Wien gnd-content Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 Paschke, Fritz Sonstige oth |
| spellingShingle | Proceedings of the International Conference on Microlithography September 20 - 22, 1988, Vienna, Austria Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4191584-7 (DE-588)1071861417 |
| title | Proceedings of the International Conference on Microlithography September 20 - 22, 1988, Vienna, Austria |
| title_auth | Proceedings of the International Conference on Microlithography September 20 - 22, 1988, Vienna, Austria |
| title_exact_search | Proceedings of the International Conference on Microlithography September 20 - 22, 1988, Vienna, Austria |
| title_full | Proceedings of the International Conference on Microlithography September 20 - 22, 1988, Vienna, Austria Microcircuit Engineering 88. Ed. by F. Paschke ... |
| title_fullStr | Proceedings of the International Conference on Microlithography September 20 - 22, 1988, Vienna, Austria Microcircuit Engineering 88. Ed. by F. Paschke ... |
| title_full_unstemmed | Proceedings of the International Conference on Microlithography September 20 - 22, 1988, Vienna, Austria Microcircuit Engineering 88. Ed. by F. Paschke ... |
| title_short | Proceedings of the International Conference on Microlithography |
| title_sort | proceedings of the international conference on microlithography september 20 22 1988 vienna austria |
| title_sub | September 20 - 22, 1988, Vienna, Austria |
| topic | Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Lithografie Halbleitertechnologie Konferenzschrift 1988 Wien |
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