Infrared spectroscopic ellipsometry:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Berlin
Akad.-Verl.
1990
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | 160 S. graph. Darst. |
| ISBN: | 3055006232 |
Internformat
MARC
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| 100 | 1 | |a Röseler, Arnulf |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Infrared spectroscopic ellipsometry |c by Arnulf Röseler |
| 264 | 1 | |a Berlin |b Akad.-Verl. |c 1990 | |
| 300 | |a 160 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 650 | 4 | |a Ellipsometry | |
| 650 | 4 | |a Fourier transform infrared spectroscopy | |
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Datensatz im Suchindex
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| adam_text | INFRARED SPECTROSCOPIC ELLIPSOMETRY BY ARNULF ROESELER WITH 65 FIGURES
AKADEMIE-VERLAG BERLIN CONTENTS INTRODUCTION 9 1. FUNDAMENTALS OF THE
ELLIPSOMETRY 11 1.1. PROPERTIES OF THE ELECTROMAGNETIC FIELD 11 1.1.1.
THE MAXWELL EQUATIONS 11 1.1.2. THE DIELECTRIC FUNCTION OF AN ABSORBING
MEDIUM 12 1.2. THE LAWS OF REFLECTION AND REFRACTION 16 1.2.1. SNELL S
LAW OF REFRACTION OF LIGHT 16 1.2.2. THE FRESNEL FORMULAE 18 1.2.3.
REFLECTIVITY AND TRANSMISSIVITY OF LIGHT 19 1.2.4. TOTAL REFLECTION 22
1.2.5. REFLECTION OF AN UNIAXIALLY ANISOTROPIC MEDIUM WITH AN ISOTROPIC
AMBIENT 24 1.2.6. OPTICS OF ABSORBING ISOTROPIC MEDIA 25 1.2.6.1. THE
LAW OF REFRACTION FOR AN ABSORBING MEDIUM 25 1.2.6.2. THE FRESNEL
FORMULAE FOR AN ABSORBING MEDIUM 28 1.3. STRATIFIED MEDIA 30 1.3.1.
REFLECTION AND TRANSMISSION OF A SINGLE FILM AND THE PROPERTIES OF THE
FIELD STRENGTH 30 1.3.2. REFLECTIVITY AND TRANSMISSIVITY OF A
FILM*SUBSTRATE SYSTEM 34 1.3.2.1. REFLECTIVITY AND TRANSMISSIVITY IN THE
CASE OF COHERENT SUPERPOSITION OF THE PARTIAL WAVES 34 1.3.2.2.
REFLECTIVITY AND TRANSMISSIVITY IN THE CASE OF INCOHERENT SUPERPOSITION
OF THE PARTIAL WAVES 34 1.3.3. REFLECTION AND TRANSMISSION OF STRATIFIED
MEDIA. THE MATRIX METHOD . . 35 1.3.4. INVERSION OF ELLIPSOMETRIC
EQUATION 37 1.4. THE MEDIUM WITH SPECTRAL-SELECTIVE ABSORPTION 38 1.4.1.
PROPERTIES OF THE ABSORBING MEDIUM 38 1.4.1.1. THE MODEL OSCILLATOR 38
1.4.1.2. THE PROPERTIES OF A STRONG ABSORBING MEDIUM 39 1.4.2. THE
ABSORBING FILM 40 1.4.2.1. THE STRONG ABSORBING FILM ON A METAL 40
1.4.2.1.1. SURFACE POLARITONS 40 1.4.2.1.2. EXCITATION OF LEAKY WAVE
GUIDE IN AN ABSORBING FILM ON A METAL . . . . 45 1.4.2.2. THE ABSORBING
FILM ON A DIELECTRIC SUBSTRATE 49 1.5. THE EFFECTIVE MEDIUM THEORY 49
1.6. REPRESENTATION OF POLARIZED LIGHT 52 1.6.1. THE HARMONIC
ELECTROMAGNETIC PLANE WAVE 52 6 CONTENTS 1.6.2. THE STOKES PARAMETERS 55
1.6.3. PARTIALLY POLARIZED LIGHT 56 1.6.4. THE MATRIX FORMALISMS 60
1.6.4.1. THE JONES-MATRIX FORMALISM 60 1.6.4.2. TRANSFORMATION OF THE
JONES MATRIX BY OPTICAL DEVICES 62 1.6.4.3. THE MUELLER-MATRIX FORMALISM
63 1.7. THE ELLIPSOMETRIC PARAMETERS OF THE CLEAN ISOTROPIC SURFACE 67
2. THEORY AND TECHNIQUES OF SPECTROSCOPIC ELLIPSOMETRY IN THE INFRARED
REGION . 72 2.1. THE PRINCIPLES OF ELLIPSOMETER SYSTEMS 72 2.1.1.
PROPERTIES OF THE NULL-AND PHOTOMETRIE ELLIPSOMETER 72 2.1.2. THE THEORY
OF PHOTOMETRIE ELLIPSOMETER 73 2.2. THE PRINCIPLES OF FOURIER TRANSFORM
SPECTROSCOPY 76 2.2.1. THE BASIC EQUATIONS, RESOLUTION AND FIELD STOP 76
2.2.2. SIGNAL-TO-NOISE PROBLEMS 80 2.2.2.1. NOISE PROBLEMS FOR DIFFERENT
MEASUREMENT MODES 80 2.2.2.2. THE SIGNAL-TO-NOISE RATIO OF A FOURIER
TRANSFORM SPECTROMETER IN THE INFRA- RED 83 2.3. THE POLARIZING
PROPERTIES OF THE INTERFEROMETER 85 2.3.1. THE W-OUTPUT 86 2.3.2.
THEG-OUTPUT 88 2.3.3. SPECIAL CASES FOR THE INTERFEROMETER 89 2.3.4. THE
COMBINATION FOURIER TRANSFORM SPECTROMETER AND PHOTOMETRIE ELLIPSO-
METER 93 2.3.4.1. CALCULATION IN MODE A 94 2.3.4.2. CALCULATION IN MODE
B . 96 2.3.4.3. CALCULATION IN MODE C 96 2.3.4.4. CALCULATION IN MODE D
101 2.4. METHOD OF MEASUREMENT 103 2.4.1. THE CALIBRATION PROCEDURE 103
2.4.2. MEASUREMENT OF THE FOUR STOKES PARAMETERS AND THE POLARIZING
CORRECTION 105 2.4.3. MEASUREMENT OF STOKES PARAMETERS BY MEANS OF FOUR
POLARIZER POSITIONS . 106 2.5. THE POLARIZATION-OPTICAL ELEMENTS IN THE
INFRARED RAENGE 107 2.5.1. THE POLARIZERS 108 2.5.1.1. THE POLARIZER OF
BREWSTER-ANGLE TYPE 108 2.5.1.2. THE POLARIZER OF GRATING TYPE 108
2.5.2. THE INFRARED RETARDERS 109 2.5.2.1. THE TOTAL-REFLECTION RETARDER
109 2.5.2.2. THE RETARDER OF LAYER SYSTEM TYPE 110 3. RESULTS OF THE
SPECTROSCOPIC INFRARED ELLIPSOMETRY BY MEANS OF FOURIER TRANSFORM
SPECTROSCOPY 112 3.1. MEASUREMENTS ON DIELECTRIC MEDIA .112 3.1.1.
MEASUREMENTS ON QUARTZ GLASS, GLASS AND GEOLOGICAL SAMPLES 113 3.1.2.
ATE, ELLIPSOMETRY 120 3.1.3. OPTICAL CONSTANTS OF METALS 121 CONTENTS 7
3.2. INVESTIGATION OF FILM-COVERED SUBSTRATES 124 3.2.1. FILMS ON
TRANSPARENT SUBSTRATES 125 3.2.2. FILMS ON SELECTIVE ABSORBING
DIELECTRIC SUBSTRATES 127 3.2.3. FILMS ON AN ABSORBING SUBSTRATE 128
3.3. ELLIPSOMETRIC OBSERVATION OF SURFACE POLARITONS IN THE INFRARED
REGION . . 130 3.3.1. SURFACE POLARITONS ON THE QUARTZ GLASS 130 3.3.2.
SURFACE POLARITONS ON A METAL SURFACE EXCITED BY MEANS OF A DIELECTRIC
COATING 132 3.4. ELLIPSOMETRIC MEASUREMENT OF LEAKY WAVE GUIDE 133
3.4.1. WAVE GUIDE IN A GE FILM ON A METAL SURFACE 133 3.4.2. THE
ELLIPSOMETRICALLY DETECTED BERREMAN EFFECT 135 3.5. THE DEGREE OF
POLARIZATION IN THE REFLECTED BEAM OF THE PHOTOMETRIE ELLIPSO- METER 135
4. APPENDIX: SPECIAL PROBLEMS OL IR-ELLIPSOMETRY 141 4.1. ELLIPSOMETRIC
MEASUREMENTS BY MEANS OF COMMERCIAL REFLECTION ATTACH- MENTS IN THE
FOURIER TRANSFORM SPECTROMETER 141 4.2. ALIGNMENT OF THE ELLIPSOMETER
142 4.3. MEASUREMENT BY MEANS OF REAL POLARIZERS 145 4.4. THE MUELLER
MATRIX OF THE POLARIZING INTERFEROMETER 147 REFERENCES 150 INDEX 155
|
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| illustrated | Illustrated |
| indexdate | 2024-07-09T16:11:24Z |
| institution | BVB |
| isbn | 3055006232 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-002685316 |
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| physical | 160 S. graph. Darst. |
| publishDate | 1990 |
| publishDateSearch | 1990 |
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| publisher | Akad.-Verl. |
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| spelling | Röseler, Arnulf Verfasser aut Infrared spectroscopic ellipsometry by Arnulf Röseler Berlin Akad.-Verl. 1990 160 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Ellipsometry Fourier transform infrared spectroscopy Infrarot (DE-588)4161686-8 gnd rswk-swf Fourier-Spektroskopie (DE-588)4135413-8 gnd rswk-swf Ellipsometrie (DE-588)4152025-7 gnd rswk-swf Infrarotspektroskopie (DE-588)4135411-4 gnd rswk-swf Fourier-Spektrometer (DE-588)4155110-2 gnd rswk-swf Infrarotspektroskopie (DE-588)4135411-4 s Ellipsometrie (DE-588)4152025-7 s Fourier-Spektrometer (DE-588)4155110-2 s DE-604 Fourier-Spektroskopie (DE-588)4135413-8 s Infrarot (DE-588)4161686-8 s GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=002685316&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Röseler, Arnulf Infrared spectroscopic ellipsometry Ellipsometry Fourier transform infrared spectroscopy Infrarot (DE-588)4161686-8 gnd Fourier-Spektroskopie (DE-588)4135413-8 gnd Ellipsometrie (DE-588)4152025-7 gnd Infrarotspektroskopie (DE-588)4135411-4 gnd Fourier-Spektrometer (DE-588)4155110-2 gnd |
| subject_GND | (DE-588)4161686-8 (DE-588)4135413-8 (DE-588)4152025-7 (DE-588)4135411-4 (DE-588)4155110-2 |
| title | Infrared spectroscopic ellipsometry |
| title_auth | Infrared spectroscopic ellipsometry |
| title_exact_search | Infrared spectroscopic ellipsometry |
| title_full | Infrared spectroscopic ellipsometry by Arnulf Röseler |
| title_fullStr | Infrared spectroscopic ellipsometry by Arnulf Röseler |
| title_full_unstemmed | Infrared spectroscopic ellipsometry by Arnulf Röseler |
| title_short | Infrared spectroscopic ellipsometry |
| title_sort | infrared spectroscopic ellipsometry |
| topic | Ellipsometry Fourier transform infrared spectroscopy Infrarot (DE-588)4161686-8 gnd Fourier-Spektroskopie (DE-588)4135413-8 gnd Ellipsometrie (DE-588)4152025-7 gnd Infrarotspektroskopie (DE-588)4135411-4 gnd Fourier-Spektrometer (DE-588)4155110-2 gnd |
| topic_facet | Ellipsometry Fourier transform infrared spectroscopy Infrarot Fourier-Spektroskopie Ellipsometrie Infrarotspektroskopie Fourier-Spektrometer |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=002685316&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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