Excimer-Laser-Lithographie bei nm lambda = 193 nm: Probleme und Lösungen
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | Undetermined |
| Published: |
1988
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| Subjects: | |
| Item Description: | Aachen, Techn. Hochsch., Diss., 1988 |
| Physical Description: | 144 S. Ill., graph. Darst. |
Staff View
MARC
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Record in the Search Index
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| author | Eden, Klaus |
| author_facet | Eden, Klaus |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content Laserstrahllithographie gnd |
| genre_facet | Hochschulschrift Laserstrahllithographie |
| id | DE-604.BV004295727 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:11:05Z |
| institution | BVB |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-002671944 |
| oclc_num | 630449518 |
| open_access_boolean | |
| owner | DE-384 DE-703 DE-355 DE-BY-UBR DE-706 |
| owner_facet | DE-384 DE-703 DE-355 DE-BY-UBR DE-706 |
| physical | 144 S. Ill., graph. Darst. |
| publishDate | 1988 |
| publishDateSearch | 1988 |
| publishDateSort | 1988 |
| record_format | marc |
| spelling | Eden, Klaus Verfasser aut Excimer-Laser-Lithographie bei nm lambda = 193 nm Probleme und Lösungen Excimer-Laser-Lithographie bei nm 1988 144 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Aachen, Techn. Hochsch., Diss., 1988 Excimerlaser (DE-588)4153300-8 gnd rswk-swf Laserlithografie (DE-588)4240927-5 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Laserstrahllithographie gnd rswk-swf Laserlithografie (DE-588)4240927-5 s Excimerlaser (DE-588)4153300-8 s DE-604 Laserstrahllithographie f |
| spellingShingle | Eden, Klaus Excimer-Laser-Lithographie bei nm lambda = 193 nm Probleme und Lösungen Excimerlaser (DE-588)4153300-8 gnd Laserlithografie (DE-588)4240927-5 gnd |
| subject_GND | (DE-588)4153300-8 (DE-588)4240927-5 (DE-588)4113937-9 |
| title | Excimer-Laser-Lithographie bei nm lambda = 193 nm Probleme und Lösungen |
| title_alt | Excimer-Laser-Lithographie bei nm |
| title_auth | Excimer-Laser-Lithographie bei nm lambda = 193 nm Probleme und Lösungen |
| title_exact_search | Excimer-Laser-Lithographie bei nm lambda = 193 nm Probleme und Lösungen |
| title_full | Excimer-Laser-Lithographie bei nm lambda = 193 nm Probleme und Lösungen |
| title_fullStr | Excimer-Laser-Lithographie bei nm lambda = 193 nm Probleme und Lösungen |
| title_full_unstemmed | Excimer-Laser-Lithographie bei nm lambda = 193 nm Probleme und Lösungen |
| title_short | Excimer-Laser-Lithographie bei nm lambda = 193 nm |
| title_sort | excimer laser lithographie bei nm lambda 193 nm probleme und losungen |
| title_sub | Probleme und Lösungen |
| topic | Excimerlaser (DE-588)4153300-8 gnd Laserlithografie (DE-588)4240927-5 gnd |
| topic_facet | Excimerlaser Laserlithografie Hochschulschrift Laserstrahllithographie |
| work_keys_str_mv | AT edenklaus excimerlaserlithographiebeinmlambda193nmproblemeundlosungen AT edenklaus excimerlaserlithographiebeinm |