Excimer-Laser-Lithographie bei nm lambda = 193 nm: Probleme und Lösungen
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
1988
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| Schlagworte: | |
| Beschreibung: | Aachen, Techn. Hochsch., Diss., 1988 |
| Beschreibung: | 144 S. Ill., graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV004295727 | ||
| 003 | DE-604 | ||
| 005 | 20070723 | ||
| 007 | t | ||
| 008 | 910313s1988 ad|| m||| 00||| und d | ||
| 035 | |a (OCoLC)630449518 | ||
| 035 | |a (DE-599)BVBBV004295727 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | |a und | ||
| 049 | |a DE-384 |a DE-703 |a DE-355 |a DE-706 | ||
| 100 | 1 | |a Eden, Klaus |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Excimer-Laser-Lithographie bei nm lambda = 193 nm |b Probleme und Lösungen |
| 246 | 1 | 3 | |a Excimer-Laser-Lithographie bei nm |
| 264 | 1 | |c 1988 | |
| 300 | |a 144 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Aachen, Techn. Hochsch., Diss., 1988 | ||
| 650 | 0 | 7 | |a Excimerlaser |0 (DE-588)4153300-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Laserlithografie |0 (DE-588)4240927-5 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 655 | 7 | |a Laserstrahllithographie |2 gnd |9 rswk-swf | |
| 689 | 0 | 0 | |a Laserlithografie |0 (DE-588)4240927-5 |D s |
| 689 | 0 | 1 | |a Excimerlaser |0 (DE-588)4153300-8 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Laserstrahllithographie |A f |
| 689 | 1 | 1 | |a Excimerlaser |0 (DE-588)4153300-8 |D s |
| 689 | 1 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-002671944 | ||
Datensatz im Suchindex
| _version_ | 1804118487616978944 |
|---|---|
| any_adam_object | |
| author | Eden, Klaus |
| author_facet | Eden, Klaus |
| author_role | aut |
| author_sort | Eden, Klaus |
| author_variant | k e ke |
| building | Verbundindex |
| bvnumber | BV004295727 |
| ctrlnum | (OCoLC)630449518 (DE-599)BVBBV004295727 |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01286nam a2200385 c 4500</leader><controlfield tag="001">BV004295727</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20070723 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">910313s1988 ad|| m||| 00||| und d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)630449518</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV004295727</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">und</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-384</subfield><subfield code="a">DE-703</subfield><subfield code="a">DE-355</subfield><subfield code="a">DE-706</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Eden, Klaus</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Excimer-Laser-Lithographie bei nm lambda = 193 nm</subfield><subfield code="b">Probleme und Lösungen</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">Excimer-Laser-Lithographie bei nm</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="c">1988</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">144 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Aachen, Techn. Hochsch., Diss., 1988</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Excimerlaser</subfield><subfield code="0">(DE-588)4153300-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Laserlithografie</subfield><subfield code="0">(DE-588)4240927-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="a">Laserstrahllithographie</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Laserlithografie</subfield><subfield code="0">(DE-588)4240927-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Excimerlaser</subfield><subfield code="0">(DE-588)4153300-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Laserstrahllithographie</subfield><subfield code="A">f</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Excimerlaser</subfield><subfield code="0">(DE-588)4153300-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-002671944</subfield></datafield></record></collection> |
| genre | (DE-588)4113937-9 Hochschulschrift gnd-content Laserstrahllithographie gnd |
| genre_facet | Hochschulschrift Laserstrahllithographie |
| id | DE-604.BV004295727 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:11:05Z |
| institution | BVB |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-002671944 |
| oclc_num | 630449518 |
| open_access_boolean | |
| owner | DE-384 DE-703 DE-355 DE-BY-UBR DE-706 |
| owner_facet | DE-384 DE-703 DE-355 DE-BY-UBR DE-706 |
| physical | 144 S. Ill., graph. Darst. |
| publishDate | 1988 |
| publishDateSearch | 1988 |
| publishDateSort | 1988 |
| record_format | marc |
| spelling | Eden, Klaus Verfasser aut Excimer-Laser-Lithographie bei nm lambda = 193 nm Probleme und Lösungen Excimer-Laser-Lithographie bei nm 1988 144 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Aachen, Techn. Hochsch., Diss., 1988 Excimerlaser (DE-588)4153300-8 gnd rswk-swf Laserlithografie (DE-588)4240927-5 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Laserstrahllithographie gnd rswk-swf Laserlithografie (DE-588)4240927-5 s Excimerlaser (DE-588)4153300-8 s DE-604 Laserstrahllithographie f |
| spellingShingle | Eden, Klaus Excimer-Laser-Lithographie bei nm lambda = 193 nm Probleme und Lösungen Excimerlaser (DE-588)4153300-8 gnd Laserlithografie (DE-588)4240927-5 gnd |
| subject_GND | (DE-588)4153300-8 (DE-588)4240927-5 (DE-588)4113937-9 |
| title | Excimer-Laser-Lithographie bei nm lambda = 193 nm Probleme und Lösungen |
| title_alt | Excimer-Laser-Lithographie bei nm |
| title_auth | Excimer-Laser-Lithographie bei nm lambda = 193 nm Probleme und Lösungen |
| title_exact_search | Excimer-Laser-Lithographie bei nm lambda = 193 nm Probleme und Lösungen |
| title_full | Excimer-Laser-Lithographie bei nm lambda = 193 nm Probleme und Lösungen |
| title_fullStr | Excimer-Laser-Lithographie bei nm lambda = 193 nm Probleme und Lösungen |
| title_full_unstemmed | Excimer-Laser-Lithographie bei nm lambda = 193 nm Probleme und Lösungen |
| title_short | Excimer-Laser-Lithographie bei nm lambda = 193 nm |
| title_sort | excimer laser lithographie bei nm lambda 193 nm probleme und losungen |
| title_sub | Probleme und Lösungen |
| topic | Excimerlaser (DE-588)4153300-8 gnd Laserlithografie (DE-588)4240927-5 gnd |
| topic_facet | Excimerlaser Laserlithografie Hochschulschrift Laserstrahllithographie |
| work_keys_str_mv | AT edenklaus excimerlaserlithographiebeinmlambda193nmproblemeundlosungen AT edenklaus excimerlaserlithographiebeinm |