Proceedings of the 3rd International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology: Garzau, German Democratic Republic, October 8 - 13, 1989
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Vaduz, Liechtenstein
Sci-Tech Publ.
1989
|
| Schriftenreihe: | [Diffusion and defect data / B]
6/7 |
| Schlagworte: | |
| Beschreibung: | Literaturangaben |
| Beschreibung: | XI, 607 S. Ill., graph. Darst. |
| ISBN: | 3908044049 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV004173637 | ||
| 003 | DE-604 | ||
| 005 | 19990909 | ||
| 007 | t | ||
| 008 | 901212s1989 ad|| |||| 10||| eng d | ||
| 020 | |a 3908044049 |9 3-908044-04-9 | ||
| 035 | |a (OCoLC)311212163 | ||
| 035 | |a (DE-599)BVBBV004173637 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-91 |a DE-703 | ||
| 084 | |a UP 3250 |0 (DE-625)146380: |2 rvk | ||
| 084 | |a PHY 696f |2 stub | ||
| 111 | 2 | |a GADEST |n 3 |d 1989 |c Garzau |j Verfasser |0 (DE-588)5043024-5 |4 aut | |
| 245 | 1 | 0 | |a Proceedings of the 3rd International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology |b Garzau, German Democratic Republic, October 8 - 13, 1989 |c ed. M. Kittler |
| 246 | 1 | 3 | |a Gettering and defect engineering in the semiconductor technology |
| 264 | 1 | |a Vaduz, Liechtenstein |b Sci-Tech Publ. |c 1989 | |
| 300 | |a XI, 607 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a [Diffusion and defect data / B] |v 6/7 | |
| 500 | |a Literaturangaben | ||
| 650 | 0 | 7 | |a Gitterbaufehler |0 (DE-588)4125030-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1989 |z Garzau |2 gnd-content | |
| 689 | 0 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 0 | 1 | |a Gitterbaufehler |0 (DE-588)4125030-8 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Kittler, Martin |e Sonstige |4 oth | |
| 810 | 2 | |a B] |t [Diffusion and defect data |v 6/7 |w (DE-604)BV021637351 |9 6/7 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-002602062 | ||
Datensatz im Suchindex
| _version_ | 1804118383891841024 |
|---|---|
| any_adam_object | |
| author_corporate | GADEST Garzau |
| author_corporate_role | aut |
| author_facet | GADEST Garzau |
| author_sort | GADEST Garzau |
| building | Verbundindex |
| bvnumber | BV004173637 |
| classification_rvk | UP 3250 |
| classification_tum | PHY 696f |
| ctrlnum | (OCoLC)311212163 (DE-599)BVBBV004173637 |
| discipline | Physik |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01600nam a2200409 cb4500</leader><controlfield tag="001">BV004173637</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">19990909 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">901212s1989 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3908044049</subfield><subfield code="9">3-908044-04-9</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)311212163</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV004173637</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-703</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 3250</subfield><subfield code="0">(DE-625)146380:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">PHY 696f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">GADEST</subfield><subfield code="n">3</subfield><subfield code="d">1989</subfield><subfield code="c">Garzau</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)5043024-5</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Proceedings of the 3rd International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology</subfield><subfield code="b">Garzau, German Democratic Republic, October 8 - 13, 1989</subfield><subfield code="c">ed. M. Kittler</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">Gettering and defect engineering in the semiconductor technology</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Vaduz, Liechtenstein</subfield><subfield code="b">Sci-Tech Publ.</subfield><subfield code="c">1989</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XI, 607 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">[Diffusion and defect data / B]</subfield><subfield code="v">6/7</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Gitterbaufehler</subfield><subfield code="0">(DE-588)4125030-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1989</subfield><subfield code="z">Garzau</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Gitterbaufehler</subfield><subfield code="0">(DE-588)4125030-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kittler, Martin</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="810" ind1="2" ind2=" "><subfield code="a">B]</subfield><subfield code="t">[Diffusion and defect data</subfield><subfield code="v">6/7</subfield><subfield code="w">(DE-604)BV021637351</subfield><subfield code="9">6/7</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-002602062</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1989 Garzau gnd-content |
| genre_facet | Konferenzschrift 1989 Garzau |
| id | DE-604.BV004173637 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:09:26Z |
| institution | BVB |
| institution_GND | (DE-588)5043024-5 |
| isbn | 3908044049 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-002602062 |
| oclc_num | 311212163 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-703 |
| owner_facet | DE-91 DE-BY-TUM DE-703 |
| physical | XI, 607 S. Ill., graph. Darst. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | Sci-Tech Publ. |
| record_format | marc |
| series2 | [Diffusion and defect data / B] |
| spelling | GADEST 3 1989 Garzau Verfasser (DE-588)5043024-5 aut Proceedings of the 3rd International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology Garzau, German Democratic Republic, October 8 - 13, 1989 ed. M. Kittler Gettering and defect engineering in the semiconductor technology Vaduz, Liechtenstein Sci-Tech Publ. 1989 XI, 607 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier [Diffusion and defect data / B] 6/7 Literaturangaben Gitterbaufehler (DE-588)4125030-8 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1989 Garzau gnd-content Halbleiter (DE-588)4022993-2 s Gitterbaufehler (DE-588)4125030-8 s DE-604 Kittler, Martin Sonstige oth B] [Diffusion and defect data 6/7 (DE-604)BV021637351 6/7 |
| spellingShingle | Proceedings of the 3rd International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology Garzau, German Democratic Republic, October 8 - 13, 1989 Gitterbaufehler (DE-588)4125030-8 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4125030-8 (DE-588)4022993-2 (DE-588)1071861417 |
| title | Proceedings of the 3rd International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology Garzau, German Democratic Republic, October 8 - 13, 1989 |
| title_alt | Gettering and defect engineering in the semiconductor technology |
| title_auth | Proceedings of the 3rd International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology Garzau, German Democratic Republic, October 8 - 13, 1989 |
| title_exact_search | Proceedings of the 3rd International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology Garzau, German Democratic Republic, October 8 - 13, 1989 |
| title_full | Proceedings of the 3rd International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology Garzau, German Democratic Republic, October 8 - 13, 1989 ed. M. Kittler |
| title_fullStr | Proceedings of the 3rd International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology Garzau, German Democratic Republic, October 8 - 13, 1989 ed. M. Kittler |
| title_full_unstemmed | Proceedings of the 3rd International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology Garzau, German Democratic Republic, October 8 - 13, 1989 ed. M. Kittler |
| title_short | Proceedings of the 3rd International Autumn Meeting Gettering and Defect Engineering in the Semiconductor Technology |
| title_sort | proceedings of the 3rd international autumn meeting gettering and defect engineering in the semiconductor technology garzau german democratic republic october 8 13 1989 |
| title_sub | Garzau, German Democratic Republic, October 8 - 13, 1989 |
| topic | Gitterbaufehler (DE-588)4125030-8 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Gitterbaufehler Halbleiter Konferenzschrift 1989 Garzau |
| volume_link | (DE-604)BV021637351 |
| work_keys_str_mv | AT gadestgarzau proceedingsofthe3rdinternationalautumnmeetinggetteringanddefectengineeringinthesemiconductortechnologygarzaugermandemocraticrepublicoctober8131989 AT kittlermartin proceedingsofthe3rdinternationalautumnmeetinggetteringanddefectengineeringinthesemiconductortechnologygarzaugermandemocraticrepublicoctober8131989 AT gadestgarzau getteringanddefectengineeringinthesemiconductortechnology AT kittlermartin getteringanddefectengineeringinthesemiconductortechnology |