Handbook of plasma processing technology: fundamentals, etching, deposition, and surface interactions
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Westwood, NJ
Noyes
1990
|
| Series: | Materials science and process technology series
|
| Subjects: | |
| Physical Description: | XXIII, 523 S. Ill., graph. Darst. |
| ISBN: | 0815512201 |
Staff View
MARC
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Record in the Search Index
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| bvnumber | BV004135620 |
| callnumber-first | T - Technology |
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| callnumber-subject | TA - General and Civil Engineering |
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| classification_tum | FER 786f |
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| dewey-search | 621.044 |
| dewey-sort | 3621.044 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Fertigungstechnik Werkstoffwissenschaften / Fertigungstechnik |
| format | Book |
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| genre | Plasmametallurgie gnd |
| genre_facet | Plasmametallurgie |
| id | DE-604.BV004135620 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:08:54Z |
| institution | BVB |
| isbn | 0815512201 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-002580072 |
| oclc_num | 20265048 |
| open_access_boolean | |
| owner | DE-91G DE-BY-TUM DE-898 DE-BY-UBR DE-355 DE-BY-UBR DE-29T DE-384 DE-92 DE-526 |
| owner_facet | DE-91G DE-BY-TUM DE-898 DE-BY-UBR DE-355 DE-BY-UBR DE-29T DE-384 DE-92 DE-526 |
| physical | XXIII, 523 S. Ill., graph. Darst. |
| publishDate | 1990 |
| publishDateSearch | 1990 |
| publishDateSort | 1990 |
| publisher | Noyes |
| record_format | marc |
| series2 | Materials science and process technology series |
| spelling | Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions ed. by Stephen M. Rossnagel ... Westwood, NJ Noyes 1990 XXIII, 523 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials science and process technology series Plasma engineering Plasma etching Semiconductors Etching Plasmaätzen (DE-588)4174821-9 gnd rswk-swf Ätzen (DE-588)4000648-7 gnd rswk-swf Plasmatechnik (DE-588)4140353-8 gnd rswk-swf Plasmastrahlbearbeitung (DE-588)4136199-4 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Plasma (DE-588)4046249-3 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf Plasmametallurgie gnd rswk-swf Plasmatechnik (DE-588)4140353-8 s DE-604 Sputtern (DE-588)4182614-0 s Halbleiter (DE-588)4022993-2 s Plasmastrahlbearbeitung (DE-588)4136199-4 s Plasmaätzen (DE-588)4174821-9 s Plasmametallurgie f Dünnschichttechnik (DE-588)4136339-5 s 1\p DE-604 Plasma (DE-588)4046249-3 s 2\p DE-604 Ätzen (DE-588)4000648-7 s 3\p DE-604 Rossnagel, Stephen M. Sonstige oth 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions Plasma engineering Plasma etching Semiconductors Etching Plasmaätzen (DE-588)4174821-9 gnd Ätzen (DE-588)4000648-7 gnd Plasmatechnik (DE-588)4140353-8 gnd Plasmastrahlbearbeitung (DE-588)4136199-4 gnd Halbleiter (DE-588)4022993-2 gnd Plasma (DE-588)4046249-3 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Sputtern (DE-588)4182614-0 gnd |
| subject_GND | (DE-588)4174821-9 (DE-588)4000648-7 (DE-588)4140353-8 (DE-588)4136199-4 (DE-588)4022993-2 (DE-588)4046249-3 (DE-588)4136339-5 (DE-588)4182614-0 |
| title | Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions |
| title_auth | Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions |
| title_exact_search | Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions |
| title_full | Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions ed. by Stephen M. Rossnagel ... |
| title_fullStr | Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions ed. by Stephen M. Rossnagel ... |
| title_full_unstemmed | Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions ed. by Stephen M. Rossnagel ... |
| title_short | Handbook of plasma processing technology |
| title_sort | handbook of plasma processing technology fundamentals etching deposition and surface interactions |
| title_sub | fundamentals, etching, deposition, and surface interactions |
| topic | Plasma engineering Plasma etching Semiconductors Etching Plasmaätzen (DE-588)4174821-9 gnd Ätzen (DE-588)4000648-7 gnd Plasmatechnik (DE-588)4140353-8 gnd Plasmastrahlbearbeitung (DE-588)4136199-4 gnd Halbleiter (DE-588)4022993-2 gnd Plasma (DE-588)4046249-3 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Sputtern (DE-588)4182614-0 gnd |
| topic_facet | Plasma engineering Plasma etching Semiconductors Etching Plasmaätzen Ätzen Plasmatechnik Plasmastrahlbearbeitung Halbleiter Plasma Dünnschichttechnik Sputtern Plasmametallurgie |
| work_keys_str_mv | AT rossnagelstephenm handbookofplasmaprocessingtechnologyfundamentalsetchingdepositionandsurfaceinteractions |