Verfügbarkeit: Handbook of plasma processing technology

Handbook of plasma processing technology: fundamentals, etching, deposition, and surface interactions

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Bibliographische Detailangaben
Format:	Buch
Sprache:	English
Veröffentlicht:	Westwood, NJ Noyes 1990
Schriftenreihe:	Materials science and process technology series
Schlagworte:	Plasma engineering Plasma etching Semiconductors > Etching Plasmaätzen Ätzen Plasmatechnik Plasmastrahlbearbeitung Halbleiter Plasma Dünnschichttechnik Sputtern Plasmametallurgie
Beschreibung:	XXIII, 523 S. Ill., graph. Darst.
ISBN:	0815512201

Internformat

MARC


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Datensatz im Suchindex

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dewey-tens	620 - Engineering and allied operations
discipline	Physik Fertigungstechnik Werkstoffwissenschaften / Fertigungstechnik
format	Book
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genre	Plasmametallurgie gnd
genre_facet	Plasmametallurgie
id	DE-604.BV004135620
illustrated	Illustrated
indexdate	2024-07-09T16:08:54Z
institution	BVB
isbn	0815512201
language	English
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-002580072
oclc_num	20265048
open_access_boolean
owner	DE-91G DE-BY-TUM DE-898 DE-BY-UBR DE-355 DE-BY-UBR DE-29T DE-384 DE-92 DE-526
owner_facet	DE-91G DE-BY-TUM DE-898 DE-BY-UBR DE-355 DE-BY-UBR DE-29T DE-384 DE-92 DE-526
physical	XXIII, 523 S. Ill., graph. Darst.
publishDate	1990
publishDateSearch	1990
publishDateSort	1990
publisher	Noyes
record_format	marc
series2	Materials science and process technology series
spelling	Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions ed. by Stephen M. Rossnagel ... Westwood, NJ Noyes 1990 XXIII, 523 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials science and process technology series Plasma engineering Plasma etching Semiconductors Etching Plasmaätzen (DE-588)4174821-9 gnd rswk-swf Ätzen (DE-588)4000648-7 gnd rswk-swf Plasmatechnik (DE-588)4140353-8 gnd rswk-swf Plasmastrahlbearbeitung (DE-588)4136199-4 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Plasma (DE-588)4046249-3 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf Plasmametallurgie gnd rswk-swf Plasmatechnik (DE-588)4140353-8 s DE-604 Sputtern (DE-588)4182614-0 s Halbleiter (DE-588)4022993-2 s Plasmastrahlbearbeitung (DE-588)4136199-4 s Plasmaätzen (DE-588)4174821-9 s Plasmametallurgie f Dünnschichttechnik (DE-588)4136339-5 s 1\p DE-604 Plasma (DE-588)4046249-3 s 2\p DE-604 Ätzen (DE-588)4000648-7 s 3\p DE-604 Rossnagel, Stephen M. Sonstige oth 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk
spellingShingle	Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions Plasma engineering Plasma etching Semiconductors Etching Plasmaätzen (DE-588)4174821-9 gnd Ätzen (DE-588)4000648-7 gnd Plasmatechnik (DE-588)4140353-8 gnd Plasmastrahlbearbeitung (DE-588)4136199-4 gnd Halbleiter (DE-588)4022993-2 gnd Plasma (DE-588)4046249-3 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Sputtern (DE-588)4182614-0 gnd
subject_GND	(DE-588)4174821-9 (DE-588)4000648-7 (DE-588)4140353-8 (DE-588)4136199-4 (DE-588)4022993-2 (DE-588)4046249-3 (DE-588)4136339-5 (DE-588)4182614-0
title	Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions
title_auth	Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions
title_exact_search	Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions
title_full	Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions ed. by Stephen M. Rossnagel ...
title_fullStr	Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions ed. by Stephen M. Rossnagel ...
title_full_unstemmed	Handbook of plasma processing technology fundamentals, etching, deposition, and surface interactions ed. by Stephen M. Rossnagel ...
title_short	Handbook of plasma processing technology
title_sort	handbook of plasma processing technology fundamentals etching deposition and surface interactions
title_sub	fundamentals, etching, deposition, and surface interactions
topic	Plasma engineering Plasma etching Semiconductors Etching Plasmaätzen (DE-588)4174821-9 gnd Ätzen (DE-588)4000648-7 gnd Plasmatechnik (DE-588)4140353-8 gnd Plasmastrahlbearbeitung (DE-588)4136199-4 gnd Halbleiter (DE-588)4022993-2 gnd Plasma (DE-588)4046249-3 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Sputtern (DE-588)4182614-0 gnd
topic_facet	Plasma engineering Plasma etching Semiconductors Etching Plasmaätzen Ätzen Plasmatechnik Plasmastrahlbearbeitung Halbleiter Plasma Dünnschichttechnik Sputtern Plasmametallurgie
work_keys_str_mv	AT rossnagelstephenm handbookofplasmaprocessingtechnologyfundamentalsetchingdepositionandsurfaceinteractions

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