Polymers in microlithography: materials and processes ; developed from a symposium ... ath the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9 - 14, 1989
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | Undetermined |
| Veröffentlicht: |
Washington, DC
1989
|
| Schriftenreihe: | ACS symposium series / American Chemical Society
412 |
| Schlagworte: | |
| Beschreibung: | XII, 449 S. Ill. |
| ISBN: | 0841217017 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV003473694 | ||
| 003 | DE-604 | ||
| 005 | 20100330 | ||
| 007 | t | ||
| 008 | 900823s1989 a||| |||| 10||| undod | ||
| 020 | |a 0841217017 |9 0-8412-1701-7 | ||
| 035 | |a (OCoLC)260188555 | ||
| 035 | |a (DE-599)BVBBV003473694 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | |a und | ||
| 049 | |a DE-12 |a DE-703 | ||
| 084 | |a ZN 4170 |0 (DE-625)157366: |2 rvk | ||
| 245 | 1 | 0 | |a Polymers in microlithography |b materials and processes ; developed from a symposium ... ath the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9 - 14, 1989 |c Elsa Reichmanis, ed. ... |
| 264 | 1 | |a Washington, DC |c 1989 | |
| 300 | |a XII, 449 S. |b Ill. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a ACS symposium series / American Chemical Society |v 412 | |
| 650 | 0 | 7 | |a Polymere |0 (DE-588)4046699-1 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Fotolithografie |g Halbleitertechnologie |0 (DE-588)4174516-4 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1989 |z Dallas Tex. |2 gnd-content | |
| 689 | 0 | 0 | |a Fotolithografie |g Halbleitertechnologie |0 (DE-588)4174516-4 |D s |
| 689 | 0 | 1 | |a Polymere |0 (DE-588)4046699-1 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Reichmanis, Elsa |e Sonstige |4 oth | |
| 810 | 2 | |a American Chemical Society |t ACS symposium series |v 412 |w (DE-604)BV000003091 |9 412 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-002200224 | ||
Datensatz im Suchindex
| _version_ | 1804117819850227712 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV003473694 |
| classification_rvk | ZN 4170 |
| ctrlnum | (OCoLC)260188555 (DE-599)BVBBV003473694 |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01447nam a2200361 cb4500</leader><controlfield tag="001">BV003473694</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20100330 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">900823s1989 a||| |||| 10||| undod</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0841217017</subfield><subfield code="9">0-8412-1701-7</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)260188555</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV003473694</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">und</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-12</subfield><subfield code="a">DE-703</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4170</subfield><subfield code="0">(DE-625)157366:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Polymers in microlithography</subfield><subfield code="b">materials and processes ; developed from a symposium ... ath the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9 - 14, 1989</subfield><subfield code="c">Elsa Reichmanis, ed. ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Washington, DC</subfield><subfield code="c">1989</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XII, 449 S.</subfield><subfield code="b">Ill.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">ACS symposium series / American Chemical Society</subfield><subfield code="v">412</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Polymere</subfield><subfield code="0">(DE-588)4046699-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Fotolithografie</subfield><subfield code="g">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4174516-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1989</subfield><subfield code="z">Dallas Tex.</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Fotolithografie</subfield><subfield code="g">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4174516-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Polymere</subfield><subfield code="0">(DE-588)4046699-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Reichmanis, Elsa</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="810" ind1="2" ind2=" "><subfield code="a">American Chemical Society</subfield><subfield code="t">ACS symposium series</subfield><subfield code="v">412</subfield><subfield code="w">(DE-604)BV000003091</subfield><subfield code="9">412</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-002200224</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1989 Dallas Tex. gnd-content |
| genre_facet | Konferenzschrift 1989 Dallas Tex. |
| id | DE-604.BV003473694 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T16:00:28Z |
| institution | BVB |
| isbn | 0841217017 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-002200224 |
| oclc_num | 260188555 |
| open_access_boolean | |
| owner | DE-12 DE-703 |
| owner_facet | DE-12 DE-703 |
| physical | XII, 449 S. Ill. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| record_format | marc |
| series2 | ACS symposium series / American Chemical Society |
| spelling | Polymers in microlithography materials and processes ; developed from a symposium ... ath the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9 - 14, 1989 Elsa Reichmanis, ed. ... Washington, DC 1989 XII, 449 S. Ill. txt rdacontent n rdamedia nc rdacarrier ACS symposium series / American Chemical Society 412 Polymere (DE-588)4046699-1 gnd rswk-swf Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1989 Dallas Tex. gnd-content Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s Polymere (DE-588)4046699-1 s DE-604 Reichmanis, Elsa Sonstige oth American Chemical Society ACS symposium series 412 (DE-604)BV000003091 412 |
| spellingShingle | Polymers in microlithography materials and processes ; developed from a symposium ... ath the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9 - 14, 1989 Polymere (DE-588)4046699-1 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| subject_GND | (DE-588)4046699-1 (DE-588)4174516-4 (DE-588)1071861417 |
| title | Polymers in microlithography materials and processes ; developed from a symposium ... ath the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9 - 14, 1989 |
| title_auth | Polymers in microlithography materials and processes ; developed from a symposium ... ath the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9 - 14, 1989 |
| title_exact_search | Polymers in microlithography materials and processes ; developed from a symposium ... ath the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9 - 14, 1989 |
| title_full | Polymers in microlithography materials and processes ; developed from a symposium ... ath the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9 - 14, 1989 Elsa Reichmanis, ed. ... |
| title_fullStr | Polymers in microlithography materials and processes ; developed from a symposium ... ath the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9 - 14, 1989 Elsa Reichmanis, ed. ... |
| title_full_unstemmed | Polymers in microlithography materials and processes ; developed from a symposium ... ath the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9 - 14, 1989 Elsa Reichmanis, ed. ... |
| title_short | Polymers in microlithography |
| title_sort | polymers in microlithography materials and processes developed from a symposium ath the 197th national meeting of the american chemical society dallas texas april 9 14 1989 |
| title_sub | materials and processes ; developed from a symposium ... ath the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9 - 14, 1989 |
| topic | Polymere (DE-588)4046699-1 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| topic_facet | Polymere Fotolithografie Halbleitertechnologie Konferenzschrift 1989 Dallas Tex. |
| volume_link | (DE-604)BV000003091 |
| work_keys_str_mv | AT reichmaniselsa polymersinmicrolithographymaterialsandprocessesdevelopedfromasymposiumaththe197thnationalmeetingoftheamericanchemicalsocietydallastexasapril9141989 |