Reduced thermal processing for ULSI: [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida]
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York u.a.
Plenum Pr.
1989
|
| Schriftenreihe: | Nato ASI series. Series B, Physics / NATO
207 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XI, 438 S. Ill. |
| ISBN: | 0306433826 |
Internformat
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| 245 | 1 | 0 | |a Reduced thermal processing for ULSI |b [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] |c ed. by Roland A. Levy |
| 264 | 1 | |a New York u.a. |b Plenum Pr. |c 1989 | |
| 300 | |a XI, 438 S. |b Ill. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Nato ASI series. Series B, Physics / NATO |v 207 | |
| 650 | 0 | 7 | |a ULSI |0 (DE-588)4226286-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Thermische Belastung |0 (DE-588)4059816-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Wärmebehandlung |0 (DE-588)4064180-6 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1988 |z Boca Raton Fla. |2 gnd-content | |
| 689 | 0 | 0 | |a ULSI |0 (DE-588)4226286-0 |D s |
| 689 | 0 | 1 | |a Thermische Belastung |0 (DE-588)4059816-0 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Wärmebehandlung |0 (DE-588)4064180-6 |D s |
| 689 | 1 | 1 | |a ULSI |0 (DE-588)4226286-0 |D s |
| 689 | 1 | |8 1\p |5 DE-604 | |
| 700 | 1 | |a Levy, Roland A. |4 edt | |
| 711 | 2 | |a Advanced Study Institute on Reduced Thermal Processing for ULSI |d 1988 |c Boca Raton, Fla. |j Sonstige |0 (DE-588)5013870-4 |4 oth | |
| 776 | 0 | 8 | |i Erscheint auch als |n Online-Ausgabe |z 978-1-4613-0541-5 |
| 810 | 2 | |a NATO |t Nato ASI series. Series B, Physics |v 207 |w (DE-604)BV005876464 |9 207 | |
| 856 | 4 | 2 | |u https://www.gbv.de/dms/tib-ub-hannover/01838675x.pdf |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-001905063 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
Datensatz im Suchindex
| _version_ | 1804117329865342976 |
|---|---|
| any_adam_object | |
| author2 | Levy, Roland A. |
| author2_role | edt |
| author2_variant | r a l ra ral |
| author_facet | Levy, Roland A. |
| building | Verbundindex |
| bvnumber | BV003041503 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85 |
| callnumber-search | TK7871.85 |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | UX 2350 ZN 4950 |
| ctrlnum | (OCoLC)255987000 (DE-599)BVBBV003041503 |
| dewey-full | 621.395 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.395 |
| dewey-search | 621.395 |
| dewey-sort | 3621.395 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1988 Boca Raton Fla. gnd-content |
| genre_facet | Konferenzschrift 1988 Boca Raton Fla. |
| id | DE-604.BV003041503 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:52:41Z |
| institution | BVB |
| institution_GND | (DE-588)5013870-4 |
| isbn | 0306433826 |
| language | English |
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| physical | XI, 438 S. Ill. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | Plenum Pr. |
| record_format | marc |
| series2 | Nato ASI series. Series B, Physics / NATO |
| spelling | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] ed. by Roland A. Levy New York u.a. Plenum Pr. 1989 XI, 438 S. Ill. txt rdacontent n rdamedia nc rdacarrier Nato ASI series. Series B, Physics / NATO 207 ULSI (DE-588)4226286-0 gnd rswk-swf Thermische Belastung (DE-588)4059816-0 gnd rswk-swf Wärmebehandlung (DE-588)4064180-6 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1988 Boca Raton Fla. gnd-content ULSI (DE-588)4226286-0 s Thermische Belastung (DE-588)4059816-0 s DE-604 Wärmebehandlung (DE-588)4064180-6 s 1\p DE-604 Levy, Roland A. edt Advanced Study Institute on Reduced Thermal Processing for ULSI 1988 Boca Raton, Fla. Sonstige (DE-588)5013870-4 oth Erscheint auch als Online-Ausgabe 978-1-4613-0541-5 NATO Nato ASI series. Series B, Physics 207 (DE-604)BV005876464 207 https://www.gbv.de/dms/tib-ub-hannover/01838675x.pdf Inhaltsverzeichnis 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] ULSI (DE-588)4226286-0 gnd Thermische Belastung (DE-588)4059816-0 gnd Wärmebehandlung (DE-588)4064180-6 gnd |
| subject_GND | (DE-588)4226286-0 (DE-588)4059816-0 (DE-588)4064180-6 (DE-588)1071861417 |
| title | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] |
| title_auth | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] |
| title_exact_search | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] |
| title_full | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] ed. by Roland A. Levy |
| title_fullStr | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] ed. by Roland A. Levy |
| title_full_unstemmed | Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] ed. by Roland A. Levy |
| title_short | Reduced thermal processing for ULSI |
| title_sort | reduced thermal processing for ulsi proceedings of a nato advanced study institute on reduced thermal processing for ulsi held june 20 july 1 1988 in boca raton florida |
| title_sub | [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] |
| topic | ULSI (DE-588)4226286-0 gnd Thermische Belastung (DE-588)4059816-0 gnd Wärmebehandlung (DE-588)4064180-6 gnd |
| topic_facet | ULSI Thermische Belastung Wärmebehandlung Konferenzschrift 1988 Boca Raton Fla. |
| url | https://www.gbv.de/dms/tib-ub-hannover/01838675x.pdf |
| volume_link | (DE-604)BV005876464 |
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