Verfügbarkeit: Reduced thermal processing for ULSI

Reduced thermal processing for ULSI: [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida]

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Bibliographische Detailangaben
Weitere Verfasser:	Levy, Roland A. (HerausgeberIn)
Format:	Tagungsbericht Buch
Sprache:	English
Veröffentlicht:	New York u.a. Plenum Pr. 1989
Schriftenreihe:	Nato ASI series. Series B, Physics / NATO 207
Schlagworte:	ULSI Thermische Belastung Wärmebehandlung Konferenzschrift > 1988 > Boca Raton Fla.
Online-Zugang:	Inhaltsverzeichnis
Beschreibung:	XI, 438 S. Ill.
ISBN:	0306433826

Internformat

MARC


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Datensatz im Suchindex

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language	English
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physical	XI, 438 S. Ill.
publishDate	1989
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publisher	Plenum Pr.
record_format	marc
series2	Nato ASI series. Series B, Physics / NATO
spelling	Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] ed. by Roland A. Levy New York u.a. Plenum Pr. 1989 XI, 438 S. Ill. txt rdacontent n rdamedia nc rdacarrier Nato ASI series. Series B, Physics / NATO 207 ULSI (DE-588)4226286-0 gnd rswk-swf Thermische Belastung (DE-588)4059816-0 gnd rswk-swf Wärmebehandlung (DE-588)4064180-6 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1988 Boca Raton Fla. gnd-content ULSI (DE-588)4226286-0 s Thermische Belastung (DE-588)4059816-0 s DE-604 Wärmebehandlung (DE-588)4064180-6 s 1\p DE-604 Levy, Roland A. edt Advanced Study Institute on Reduced Thermal Processing for ULSI 1988 Boca Raton, Fla. Sonstige (DE-588)5013870-4 oth Erscheint auch als Online-Ausgabe 978-1-4613-0541-5 NATO Nato ASI series. Series B, Physics 207 (DE-604)BV005876464 207 https://www.gbv.de/dms/tib-ub-hannover/01838675x.pdf Inhaltsverzeichnis 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk
spellingShingle	Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] ULSI (DE-588)4226286-0 gnd Thermische Belastung (DE-588)4059816-0 gnd Wärmebehandlung (DE-588)4064180-6 gnd
subject_GND	(DE-588)4226286-0 (DE-588)4059816-0 (DE-588)4064180-6 (DE-588)1071861417
title	Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida]
title_auth	Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida]
title_exact_search	Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida]
title_full	Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] ed. by Roland A. Levy
title_fullStr	Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] ed. by Roland A. Levy
title_full_unstemmed	Reduced thermal processing for ULSI [proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida] ed. by Roland A. Levy
title_short	Reduced thermal processing for ULSI
title_sort	reduced thermal processing for ulsi proceedings of a nato advanced study institute on reduced thermal processing for ulsi held june 20 july 1 1988 in boca raton florida
title_sub	[proceedings of a NATO Advanced Study Institute on Reduced Thermal Processing for ULSI held June 20 - July 1, 1988, in Boca Raton, Florida]
topic	ULSI (DE-588)4226286-0 gnd Thermische Belastung (DE-588)4059816-0 gnd Wärmebehandlung (DE-588)4064180-6 gnd
topic_facet	ULSI Thermische Belastung Wärmebehandlung Konferenzschrift 1988 Boca Raton Fla.
url	https://www.gbv.de/dms/tib-ub-hannover/01838675x.pdf
volume_link	(DE-604)BV005876464
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