Ion tracks and microtechnology: principles and applications
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Braunschweig
Vieweg
1990
|
| Subjects: | |
| Physical Description: | X, 272 S. zahlr. Ill. u. graph. Darst. |
| ISBN: | 3528063300 |
Staff View
MARC
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| 100 | 1 | |a Spohr, Reimar |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Ion tracks and microtechnology |b principles and applications |c Reimar Spohr. Ed. by Klaus Bethge |
| 264 | 1 | |a Braunschweig |b Vieweg |c 1990 | |
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| 336 | |b txt |2 rdacontent | ||
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| 650 | 4 | |a Ion beam lithography | |
| 650 | 4 | |a Ion bombardment |x Industrial applications | |
| 650 | 4 | |a Materials |x Effect of radiation on | |
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| 689 | 0 | 0 | |a Ionenspur |0 (DE-588)4248351-7 |D s |
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Record in the Search Index
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|---|---|
| any_adam_object | |
| author | Spohr, Reimar |
| author_facet | Spohr, Reimar |
| author_role | aut |
| author_sort | Spohr, Reimar |
| author_variant | r s rs |
| building | Verbundindex |
| bvnumber | BV002769422 |
| callnumber-first | T - Technology |
| callnumber-label | TA418 |
| callnumber-raw | TA418.6 |
| callnumber-search | TA418.6 |
| callnumber-sort | TA 3418.6 |
| callnumber-subject | TA - General and Civil Engineering |
| classification_rvk | UM 5000 UN 6410 UN 6500 UN 7000 |
| classification_tum | FER 792f ELT 293f |
| ctrlnum | (OCoLC)636015361 (DE-599)BVBBV002769422 |
| discipline | Physik Elektrotechnik Fertigungstechnik |
| format | Book |
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| id | DE-604.BV002769422 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:49:20Z |
| institution | BVB |
| isbn | 3528063300 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001769028 |
| oclc_num | 636015361 |
| open_access_boolean | |
| owner | DE-19 DE-BY-UBM DE-384 DE-91G DE-BY-TUM DE-20 DE-11 |
| owner_facet | DE-19 DE-BY-UBM DE-384 DE-91G DE-BY-TUM DE-20 DE-11 |
| physical | X, 272 S. zahlr. Ill. u. graph. Darst. |
| publishDate | 1990 |
| publishDateSearch | 1990 |
| publishDateSort | 1990 |
| publisher | Vieweg |
| record_format | marc |
| spelling | Spohr, Reimar Verfasser aut Ion tracks and microtechnology principles and applications Reimar Spohr. Ed. by Klaus Bethge Braunschweig Vieweg 1990 X, 272 S. zahlr. Ill. u. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Ion beam lithography Ion bombardment Industrial applications Materials Effect of radiation on Spur (DE-588)4056591-9 gnd rswk-swf Ion (DE-588)4027597-8 gnd rswk-swf Ionenspur (DE-588)4248351-7 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Ionenspur (DE-588)4248351-7 s Mikrosystemtechnik (DE-588)4221617-5 s DE-604 Ion (DE-588)4027597-8 s Spur (DE-588)4056591-9 s |
| spellingShingle | Spohr, Reimar Ion tracks and microtechnology principles and applications Ion beam lithography Ion bombardment Industrial applications Materials Effect of radiation on Spur (DE-588)4056591-9 gnd Ion (DE-588)4027597-8 gnd Ionenspur (DE-588)4248351-7 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4056591-9 (DE-588)4027597-8 (DE-588)4248351-7 (DE-588)4221617-5 |
| title | Ion tracks and microtechnology principles and applications |
| title_auth | Ion tracks and microtechnology principles and applications |
| title_exact_search | Ion tracks and microtechnology principles and applications |
| title_full | Ion tracks and microtechnology principles and applications Reimar Spohr. Ed. by Klaus Bethge |
| title_fullStr | Ion tracks and microtechnology principles and applications Reimar Spohr. Ed. by Klaus Bethge |
| title_full_unstemmed | Ion tracks and microtechnology principles and applications Reimar Spohr. Ed. by Klaus Bethge |
| title_short | Ion tracks and microtechnology |
| title_sort | ion tracks and microtechnology principles and applications |
| title_sub | principles and applications |
| topic | Ion beam lithography Ion bombardment Industrial applications Materials Effect of radiation on Spur (DE-588)4056591-9 gnd Ion (DE-588)4027597-8 gnd Ionenspur (DE-588)4248351-7 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | Ion beam lithography Ion bombardment Industrial applications Materials Effect of radiation on Spur Ion Ionenspur Mikrosystemtechnik |
| work_keys_str_mv | AT spohrreimar iontracksandmicrotechnologyprinciplesandapplications |