Ion tracks and microtechnology: principles and applications
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Braunschweig
Vieweg
1990
|
| Schlagworte: | |
| Beschreibung: | X, 272 S. zahlr. Ill. u. graph. Darst. |
| ISBN: | 3528063300 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV002769422 | ||
| 003 | DE-604 | ||
| 005 | 19910104 | ||
| 007 | t | ||
| 008 | 900605s1990 gw ad|| |||| 00||| eng d | ||
| 020 | |a 3528063300 |9 3-528-06330-0 | ||
| 035 | |a (OCoLC)636015361 | ||
| 035 | |a (DE-599)BVBBV002769422 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 044 | |a gw |c DE | ||
| 049 | |a DE-19 |a DE-384 |a DE-91G |a DE-20 |a DE-11 | ||
| 050 | 0 | |a TA418.6 | |
| 084 | |a UM 5000 |0 (DE-625)145902: |2 rvk | ||
| 084 | |a UN 6410 |0 (DE-625)146160: |2 rvk | ||
| 084 | |a UN 6500 |0 (DE-625)146164: |2 rvk | ||
| 084 | |a UN 7000 |0 (DE-625)146170: |2 rvk | ||
| 084 | |a FER 792f |2 stub | ||
| 084 | |a ELT 293f |2 stub | ||
| 100 | 1 | |a Spohr, Reimar |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Ion tracks and microtechnology |b principles and applications |c Reimar Spohr. Ed. by Klaus Bethge |
| 264 | 1 | |a Braunschweig |b Vieweg |c 1990 | |
| 300 | |a X, 272 S. |b zahlr. Ill. u. graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Ion beam lithography | |
| 650 | 4 | |a Ion bombardment |x Industrial applications | |
| 650 | 4 | |a Materials |x Effect of radiation on | |
| 650 | 0 | 7 | |a Spur |0 (DE-588)4056591-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ion |0 (DE-588)4027597-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ionenspur |0 (DE-588)4248351-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Ionenspur |0 (DE-588)4248351-7 |D s |
| 689 | 0 | 1 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Ion |0 (DE-588)4027597-8 |D s |
| 689 | 1 | 1 | |a Spur |0 (DE-588)4056591-9 |D s |
| 689 | 1 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-001769028 | ||
Datensatz im Suchindex
| _version_ | 1804117119689818112 |
|---|---|
| any_adam_object | |
| author | Spohr, Reimar |
| author_facet | Spohr, Reimar |
| author_role | aut |
| author_sort | Spohr, Reimar |
| author_variant | r s rs |
| building | Verbundindex |
| bvnumber | BV002769422 |
| callnumber-first | T - Technology |
| callnumber-label | TA418 |
| callnumber-raw | TA418.6 |
| callnumber-search | TA418.6 |
| callnumber-sort | TA 3418.6 |
| callnumber-subject | TA - General and Civil Engineering |
| classification_rvk | UM 5000 UN 6410 UN 6500 UN 7000 |
| classification_tum | FER 792f ELT 293f |
| ctrlnum | (OCoLC)636015361 (DE-599)BVBBV002769422 |
| discipline | Physik Elektrotechnik Fertigungstechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01698nam a2200505 c 4500</leader><controlfield tag="001">BV002769422</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">19910104 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">900605s1990 gw ad|| |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3528063300</subfield><subfield code="9">3-528-06330-0</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)636015361</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV002769422</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">DE</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-19</subfield><subfield code="a">DE-384</subfield><subfield code="a">DE-91G</subfield><subfield code="a">DE-20</subfield><subfield code="a">DE-11</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TA418.6</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UM 5000</subfield><subfield code="0">(DE-625)145902:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UN 6410</subfield><subfield code="0">(DE-625)146160:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UN 6500</subfield><subfield code="0">(DE-625)146164:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UN 7000</subfield><subfield code="0">(DE-625)146170:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">FER 792f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 293f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Spohr, Reimar</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Ion tracks and microtechnology</subfield><subfield code="b">principles and applications</subfield><subfield code="c">Reimar Spohr. Ed. by Klaus Bethge</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Braunschweig</subfield><subfield code="b">Vieweg</subfield><subfield code="c">1990</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">X, 272 S.</subfield><subfield code="b">zahlr. Ill. u. graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Ion beam lithography</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Ion bombardment</subfield><subfield code="x">Industrial applications</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Materials</subfield><subfield code="x">Effect of radiation on</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Spur</subfield><subfield code="0">(DE-588)4056591-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ion</subfield><subfield code="0">(DE-588)4027597-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ionenspur</subfield><subfield code="0">(DE-588)4248351-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Ionenspur</subfield><subfield code="0">(DE-588)4248351-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Ion</subfield><subfield code="0">(DE-588)4027597-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Spur</subfield><subfield code="0">(DE-588)4056591-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-001769028</subfield></datafield></record></collection> |
| id | DE-604.BV002769422 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:49:20Z |
| institution | BVB |
| isbn | 3528063300 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001769028 |
| oclc_num | 636015361 |
| open_access_boolean | |
| owner | DE-19 DE-BY-UBM DE-384 DE-91G DE-BY-TUM DE-20 DE-11 |
| owner_facet | DE-19 DE-BY-UBM DE-384 DE-91G DE-BY-TUM DE-20 DE-11 |
| physical | X, 272 S. zahlr. Ill. u. graph. Darst. |
| publishDate | 1990 |
| publishDateSearch | 1990 |
| publishDateSort | 1990 |
| publisher | Vieweg |
| record_format | marc |
| spelling | Spohr, Reimar Verfasser aut Ion tracks and microtechnology principles and applications Reimar Spohr. Ed. by Klaus Bethge Braunschweig Vieweg 1990 X, 272 S. zahlr. Ill. u. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Ion beam lithography Ion bombardment Industrial applications Materials Effect of radiation on Spur (DE-588)4056591-9 gnd rswk-swf Ion (DE-588)4027597-8 gnd rswk-swf Ionenspur (DE-588)4248351-7 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Ionenspur (DE-588)4248351-7 s Mikrosystemtechnik (DE-588)4221617-5 s DE-604 Ion (DE-588)4027597-8 s Spur (DE-588)4056591-9 s |
| spellingShingle | Spohr, Reimar Ion tracks and microtechnology principles and applications Ion beam lithography Ion bombardment Industrial applications Materials Effect of radiation on Spur (DE-588)4056591-9 gnd Ion (DE-588)4027597-8 gnd Ionenspur (DE-588)4248351-7 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4056591-9 (DE-588)4027597-8 (DE-588)4248351-7 (DE-588)4221617-5 |
| title | Ion tracks and microtechnology principles and applications |
| title_auth | Ion tracks and microtechnology principles and applications |
| title_exact_search | Ion tracks and microtechnology principles and applications |
| title_full | Ion tracks and microtechnology principles and applications Reimar Spohr. Ed. by Klaus Bethge |
| title_fullStr | Ion tracks and microtechnology principles and applications Reimar Spohr. Ed. by Klaus Bethge |
| title_full_unstemmed | Ion tracks and microtechnology principles and applications Reimar Spohr. Ed. by Klaus Bethge |
| title_short | Ion tracks and microtechnology |
| title_sort | ion tracks and microtechnology principles and applications |
| title_sub | principles and applications |
| topic | Ion beam lithography Ion bombardment Industrial applications Materials Effect of radiation on Spur (DE-588)4056591-9 gnd Ion (DE-588)4027597-8 gnd Ionenspur (DE-588)4248351-7 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | Ion beam lithography Ion bombardment Industrial applications Materials Effect of radiation on Spur Ion Ionenspur Mikrosystemtechnik |
| work_keys_str_mv | AT spohrreimar iontracksandmicrotechnologyprinciplesandapplications |