An introduction to semiconductor microtechnology:
Gespeichert in:
Hauptverfasser: | , |
---|---|
Format: | Buch |
Sprache: | English |
Veröffentlicht: |
Chichester u.a.
Wiley
1990
|
Ausgabe: | 2. ed. |
Schriftenreihe: | Open university set book
|
Schlagworte: | |
Beschreibung: | XIV, 208 S. Ill., graph. Darst. |
ISBN: | 0471924784 |
Internformat
MARC
LEADER | 00000nam a2200000 c 4500 | ||
---|---|---|---|
001 | BV002751802 | ||
003 | DE-604 | ||
005 | 00000000000000.0 | ||
007 | t | ||
008 | 900711s1990 ad|| |||| 00||| engod | ||
020 | |a 0471924784 |9 0-471-92478-4 | ||
035 | |a (OCoLC)20757303 | ||
035 | |a (DE-599)BVBBV002751802 | ||
040 | |a DE-604 |b ger |e rakddb | ||
041 | 0 | |a eng | |
049 | |a DE-91 |a DE-83 | ||
050 | 0 | |a TK7871.85 | |
080 | |a 621.382.3 | ||
082 | 0 | |a 621.381/52 |2 20 | |
084 | |a ZN 4100 |0 (DE-625)157351: |2 rvk | ||
084 | |a ELT 270f |2 stub | ||
100 | 1 | |a Morgan, David V. |e Verfasser |4 aut | |
245 | 1 | 0 | |a An introduction to semiconductor microtechnology |c D. V. Morgan ; K. Board |
250 | |a 2. ed. | ||
264 | 1 | |a Chichester u.a. |b Wiley |c 1990 | |
300 | |a XIV, 208 S. |b Ill., graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
490 | 0 | |a Open university set book | |
650 | 4 | |a Semiconducteurs - Conception et construction | |
650 | 4 | |a Semiconductors |x Design and construction | |
650 | 0 | 7 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |2 gnd |9 rswk-swf |
655 | 7 | |8 1\p |0 (DE-588)4151278-9 |a Einführung |2 gnd-content | |
689 | 0 | 0 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |D s |
689 | 0 | |5 DE-604 | |
700 | 1 | |a Board, Kenneth |e Verfasser |4 aut | |
999 | |a oai:aleph.bib-bvb.de:BVB01-001759270 | ||
883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk |
Datensatz im Suchindex
_version_ | 1804117104983539712 |
---|---|
any_adam_object | |
author | Morgan, David V. Board, Kenneth |
author_facet | Morgan, David V. Board, Kenneth |
author_role | aut aut |
author_sort | Morgan, David V. |
author_variant | d v m dv dvm k b kb |
building | Verbundindex |
bvnumber | BV002751802 |
callnumber-first | T - Technology |
callnumber-label | TK7871 |
callnumber-raw | TK7871.85 |
callnumber-search | TK7871.85 |
callnumber-sort | TK 47871.85 |
callnumber-subject | TK - Electrical and Nuclear Engineering |
classification_rvk | ZN 4100 |
classification_tum | ELT 270f |
ctrlnum | (OCoLC)20757303 (DE-599)BVBBV002751802 |
dewey-full | 621.381/52 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 621 - Applied physics |
dewey-raw | 621.381/52 |
dewey-search | 621.381/52 |
dewey-sort | 3621.381 252 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
edition | 2. ed. |
format | Book |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01438nam a2200433 c 4500</leader><controlfield tag="001">BV002751802</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">900711s1990 ad|| |||| 00||| engod</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0471924784</subfield><subfield code="9">0-471-92478-4</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)20757303</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV002751802</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7871.85</subfield></datafield><datafield tag="080" ind1=" " ind2=" "><subfield code="a">621.382.3</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381/52</subfield><subfield code="2">20</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4100</subfield><subfield code="0">(DE-625)157351:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 270f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Morgan, David V.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">An introduction to semiconductor microtechnology</subfield><subfield code="c">D. V. Morgan ; K. Board</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">2. ed.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Chichester u.a.</subfield><subfield code="b">Wiley</subfield><subfield code="c">1990</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XIV, 208 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Open university set book</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconducteurs - Conception et construction</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="x">Design and construction</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="8">1\p</subfield><subfield code="0">(DE-588)4151278-9</subfield><subfield code="a">Einführung</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Board, Kenneth</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-001759270</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield></record></collection> |
genre | 1\p (DE-588)4151278-9 Einführung gnd-content |
genre_facet | Einführung |
id | DE-604.BV002751802 |
illustrated | Illustrated |
indexdate | 2024-07-09T15:49:06Z |
institution | BVB |
isbn | 0471924784 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001759270 |
oclc_num | 20757303 |
open_access_boolean | |
owner | DE-91 DE-BY-TUM DE-83 |
owner_facet | DE-91 DE-BY-TUM DE-83 |
physical | XIV, 208 S. Ill., graph. Darst. |
publishDate | 1990 |
publishDateSearch | 1990 |
publishDateSort | 1990 |
publisher | Wiley |
record_format | marc |
series2 | Open university set book |
spelling | Morgan, David V. Verfasser aut An introduction to semiconductor microtechnology D. V. Morgan ; K. Board 2. ed. Chichester u.a. Wiley 1990 XIV, 208 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Open university set book Semiconducteurs - Conception et construction Semiconductors Design and construction Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf 1\p (DE-588)4151278-9 Einführung gnd-content Halbleitertechnologie (DE-588)4158814-9 s DE-604 Board, Kenneth Verfasser aut 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
spellingShingle | Morgan, David V. Board, Kenneth An introduction to semiconductor microtechnology Semiconducteurs - Conception et construction Semiconductors Design and construction Halbleitertechnologie (DE-588)4158814-9 gnd |
subject_GND | (DE-588)4158814-9 (DE-588)4151278-9 |
title | An introduction to semiconductor microtechnology |
title_auth | An introduction to semiconductor microtechnology |
title_exact_search | An introduction to semiconductor microtechnology |
title_full | An introduction to semiconductor microtechnology D. V. Morgan ; K. Board |
title_fullStr | An introduction to semiconductor microtechnology D. V. Morgan ; K. Board |
title_full_unstemmed | An introduction to semiconductor microtechnology D. V. Morgan ; K. Board |
title_short | An introduction to semiconductor microtechnology |
title_sort | an introduction to semiconductor microtechnology |
topic | Semiconducteurs - Conception et construction Semiconductors Design and construction Halbleitertechnologie (DE-588)4158814-9 gnd |
topic_facet | Semiconducteurs - Conception et construction Semiconductors Design and construction Halbleitertechnologie Einführung |
work_keys_str_mv | AT morgandavidv anintroductiontosemiconductormicrotechnology AT boardkenneth anintroductiontosemiconductormicrotechnology |